Manufacturing system of electronic-grade ammonia solution

A manufacturing system of an electronic-grade ammonia solution, comprising

• a mixing tank used to mix an ammonia solution and an alkali to form a mixing solution, wherein the ammonia solution is an unsaturated solution;
• a stripping unit disposed in a downstream of the mixing tank and including a heat exchanger and a stripping column, wherein the heat exchanger is used to heat the mixing solution, and wherein the stripping column is used to mix nitrogen and the heated mixing solution and undertake stripping to obtain a mixing gas;
• a first absorption unit disposed in a downstream of the stripping unit and including a first condensation unit and a first absorption column, wherein the first condensation unit is used to cool down the mixing gas, and wherein the first absorption column is used to mix saturated ammonia solution and the cooled mixing gas and undertake absorption to obtain a purge gas;
• and
• a second absorption unit disposed in a downstream of the first absorption unit and including a second condensation unit and a second absorption column, wherein the second condensation unit is used to cool down a deionized (DI) water, and wherein the second absorption column is used to mix the cooled DI water and the purge gas to obtain an electronic-grade ammonia solution.