# US 10,501,315 B2 · Analytical nanoscope on a chip for sub-optical resolution imaging

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- Number: US 10,501,315 B2
- Document ID: US10501315B2
- Status: Granted
- Kind: B2
- Application number: 15/601,357
- Filed: 2017-05-22
- Published: 2017-11-23
- Granted: 2019-12-10
- Earliest claimed: 2016-05-23
- Assignees: New Jersey Institute of Technology
- Applicants: New Jersey Institute of Technology
- Inventors: Reginald C. Farrow; Alokik Kanwal; Arooj A. Aslam
- Web page: https://patentgrep.com/patent/US10501315B2

## CPC

- B82B 1/001: {Devices without movable or flexible elements}
- B82B 3/0014: {Array or network of similar nanostructural elements}
- G01N 27/127: {comprising nanoparticles}
- G01N 27/27: Association of two or more measuring systems or cells, each measuring a different parameter, where the measurement results may be either used independently, the systems or cells being physically associated, or combined to produce a value for a further parameter
- G01N 27/4146: {involving nanosized elements, e.g. nanotubes, nanowires}
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- G01N 27/227: {Sensors changing capacitance upon adsorption or absorption of fluid components, e.g. electrolyte-insulator-semiconductor sensors, MOS capacitors (G01N27/225 takes precedence)}
- G01N 27/3278: {involving nanosized elements, e.g. nanogaps or nanoparticles (nanopores G01N33/48721; magnetic beads G01N27/745)}
- G01N 33/48728: {Investigating individual cells, e.g. by patch clamp, voltage clamp (investigating individual particles in general G01N15/10)}
- H10K 85/221: {Carbon nanotubes}
- B82B: NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

An imaging device and method of using is provided that requires no traditional optics but uses an addressable array of vertically oriented carbon nanotubes. The technique relies on the ability to reduce the nearest neighbor spacing between the carbon nanotubes to less than the wavelength of light used in traditional optical microscopes. The nanoscope can have a resolution of less than 100 nm. Electrophoresis deposition can be used to direct the assembly of the carbon nanotubes onto interconnects in an integrated circuit, which could be used to address the array. The device is portable, compact, and does not utilize complicated components. It also derives spatially resolved dielectric and chemical properties of a sample to be imaged.

## Claims

### Claim 1

An analytical nanoscope for sub-optical resolution imaging, comprising, a complementary metal oxide semiconductor (CMOS) chip or charge-couple device (CCD) image sensor; a plurality of nano-pixels forming an array of vertically oriented carbon nanotubes sensors or a nano-probe array, the carbon nanotubes disposed on the CMOS or the CCD;
wherein, the carbon nanotubes are functionalized to provide chemical information about a sample, and the nanoscope functions in a lightless environment collecting information directly from the sample by making contact or converting information from a functional molecule of the sample; and
wherein the CMOS further comprises a row decoder, and a column operator, the nano-probe array, and a packaging, wherein the packaging includes a plurality of electrical connections from the chip to an external circuitry, and the electrical connections are isolated from a region of the chip that remains exposed.

### Claim 2 (depends on 1)

The analytical nanoscope of claim 1, wherein the CMOS further comprises a row decoder, and a column operator, and the nano-probe array, and wherein the row decoder is used to connect a line of nanotubes to corresponding column lines.

### Claim 3 (depends on 2)

The analytical nanoscope of claim 2, wherein within the array are a plurality of pixels consisting of an access transistor and a vertical carbon nanotube.

### Claim 4 (depends on 3)

The analytical nanotube of claim 3, wherein the vertical carbon nanotube has a connection to a drain of the access transistor.

### Claim 5 (depends on 4)

The analytical nanotube of claim 4, wherein the connection is through a silicon nitride capping layer defining a hole approximately 50 nm in diameter.

### Claim 6 (depends on 1)

The analytical nanoscope of claim 1, further including a chip carrier for acting as an intermediary between the external circuitry and the chip.

### Claim 7 (depends on 1)

The analytical nanoscope of claim 1, wherein the column operator determines an appropriate function applied to the nanotubes and passes resulting information.

### Claim 8 (depends on 7)

The analytical nanoscope of claim 7, further including a plurality of multiplexors connected to the column operator, and wherein the multiplexors decode correct operation for each nano-pixel.

### Claim 9

A process used in an analytical nanoscope for sub-optical resolution imaging comprising,
resolving an image down to a nanoscale in real time;
wherein the analytical nanoscope includes a plurality of nano-pixel, and each nano-pixel includes a vertical carbon nanotube forming an array disposed on a semiconductor chip, and each vertical carbon nanotube is accessed through an access transistor;
reading an individual pixel by activating the pixel's access transistor via raising a corresponding row line to high; and then having the activated transistor connect its nanotube to a column line used to probe an environment in a vicinity of the nanotube;
measuring impedance differences between pixels to form an image; and
using as a reference electrode a platinum ring surrounding the array during liquid measurements.

### Claim 10 (depends on 9)

The process of claim 9 further includes reading and controlling the chip through a computer, wherein the computer receives at least one process parameter, processing the at least one process parameter, and adjusting operation of the system based upon processing of the at least one process parameter.

### Claim 11

Method of making an analytical nanoscope for sub-optical resolution imaging comprising,
positioning contact pads for a semiconductor chip on a same side of the chip as an active area, or positioning contact pads for the chip on the opposite side of the chip than the active region, or using a through wafer via process for backside contacts;
coating the chip with photoresist to protect a nanoscale window from contamination;
attaching the chip to a chip carrier with an adhesive if not using a through wafer via process;
removing the resist with a chemical reagent and making electrical contact using wires that connect the chip contact pads to the contact pads of the carrier;
coating the wires and contact pads of both the chip carrier and the chip with an insulating material while leaving an active region exposed;
after assembly of the chips using an electrophoresis process to deposit the carbon nanotubes; and
functionalizing the nanotubes using an electrochemical technique facilitated by a platinum ring as a counter electrode to allow for complementary metal oxide semiconductor (CMOS) processing to occur without contamination from the electrophoresis process and potential thermal damage to the nanotubes from the CMOS processing.