# US 10,501,311 B2 · Micromechanical device having a first cavity and a second cavity > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,501,311 B2 - Document ID: US10501311B2 - Status: Granted - Kind: B2 - Application number: 16/012,391 - Filed: 2018-06-19 - Published: 2018-12-27 - Granted: 2019-12-10 - Earliest claimed: 2017-06-22 - Assignees: Robert Bosch GmbH - Applicants: Robert Bosch GmbH - Inventors: Martin Rambach - Web page: https://patentgrep.com/patent/US10501311B2 ## CPC - B81B 7/0038: {using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters} - B81B 7/0041: {maintaining a controlled atmosphere with techniques not provided for in B81B7/0038} - B81B 2203/0315: Cavities - H10W 72/923: {Bond pads having multiple stacked layers} - H10W 72/952: {comprising metals or metalloids, e.g. PbSn, Ag or Cu} - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A micromechanical device having a first cavity, which has a MEMS element, and having a second cavity. The second cavity is connected to the first cavity with a connection channel, the connection channel having a seal by which the first cavity and the second cavity are hermetically sealed from each other, the seal being able to be opened electrically. ## Claims ### Claim 1 A micromechanical device, comprising: a first cavity, which has an MEMS element; and a second cavity, wherein the second cavity is connected to the first cavity with a connection channel; wherein the connection channel includes a seal by which the first cavity and the second cavity are hermetically sealed from each other, and wherein the seal is openable electrically. ### Claim 2 (depends on 1) The micromechanical device of claim 1, wherein the second cavity includes a getter material. ### Claim 3 (depends on 1) The micromechanical device of claim 1, wherein the second cavity has a patterning of an inner surface. ### Claim 4 (depends on 1) The micromechanical device of claim 1, wherein the first cavity and the second cavity are disposed in an at least partially overlapping manner in a direction perpendicular to a top or bottom surface of a substrate containing the first and second cavities. ### Claim 5 (depends on 1) The micromechanical device of claim 1, wherein the micromechanical device has a bonding frame and a cap, wherein the bonding frame and the second cavity are disposed in an at least partially overlapping manner in a direction perpendicular to a top or bottom surface of the cap. ### Claim 6 (depends on 1) The micromechanical device of claim 1, further comprising a getter material coated onto a surface of the second cavity. ### Claim 7 (depends on 1) The micromechanical device of claim 1, further comprising a getter material deposited onto a patterning of an inner surface of the second cavity. ### Claim 8 (depends on 1) The micromechanical device of claim 1, further comprising a bonding frame and a cap, wherein the second cavity is disposed at least partially under the bonding frame. ### Claim 9 (depends on 1) The micromechanical device of claim 1, further comprising electrical contacts to the seal to enable a current to flow across the seal when a voltage is applied to the contacts, wherein in response to the current reaching at least predetermined magnitude, the seal heats up to transition from hermetically sealing the first and second cavities from each other to allowing communication of gases between the first and second cavities. ### Claim 10 (depends on 1) The micromechanical device of claim 1, further comprising electrical contacts to the seal to enable a current to flow across the seal when a voltage is applied to the contacts, wherein in response to the current reaching at least predetermined magnitude, the seal opens due to a deformation. ### Claim 11 (depends on 1) The micromechanical device of claim 1, further comprising electrical contacts to the seal to enable a current to flow across the seal when a voltage is applied to the contacts, wherein in response to the current reaching at least predetermined magnitude, the seal changes its porosity to allow communication of gases between the first and second cavities. ### Claim 12 (depends on 1) The micromechanical device of claim 1, wherein the seal includes at least one of: silicon, or germanium. ### Claim 13 (depends on 1) The micromechanical device of claim 1, wherein the seal includes aluminum. ### Claim 14 (depends on 1) The micromechanical device of claim 1, wherein the seal includes polysilicon. ### Claim 15 (depends on 1) The micromechanical device of claim 1, further comprising: a third cavity, wherein the third cavity is connected to the first cavity with an additional connection channel; wherein the additional connection channel includes an additional seal by which the first cavity and the third cavity are hermetically sealed from each other, and wherein the additional seal is openable electrically independently of the seal.