# US 10,500,719 B2 · Dual robot including spaced upper arms and interleaved wrists and systems and methods including same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,500,719 B2 - Document ID: US10500719B2 - Status: Granted - Kind: B2 - Application number: 15/619,424 - Filed: 2017-06-09 - Published: 2017-12-28 - Granted: 2019-12-10 - Earliest claimed: 2016-06-28 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Karuppasamy Muthukamatchi; Damon K. Cox; Jeffrey C. Hudgens - Web page: https://patentgrep.com/patent/US10500719B2 ## CPC - B25J 9/0087: {Dual arms (double SCARA arms B25J9/043)} - B25J 9/043: {double selective compliance articulated robot arms [SCARA]} - H10P 72/0461: {characterised by the presence of two or more transfer chambers} - H10P 72/3302: {Mechanical parts of transfer devices} - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms and first and second forearms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects. ## Claims ### Claim 1 A robot, comprising: a first upper arm rotatable about a shoulder axis; a second upper arm vertically spaced from the first upper arm and rotatable about the shoulder axis; a first forearm coupled to the first upper arm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the first upper arm about a second axis at a position offset from the shoulder axis; a second forearm coupled to the second upper arm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the second upper arm about a third axis at a position offset from the shoulder axis; a first wrist member coupled to the first forearm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the first forearm about a fourth axis at a position offset from the second axis; a second wrist member coupled to the second forearm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the second forearm about a fifth axis at a position offset from the third axis; a first forearm shaft rigidly coupled to the first upper arm and to a first wrist member driving member; a first wrist member driven member coupled to the first wrist member, wherein the first wrist member driving member comprises a first cam surface and the first wrist member driven member comprises a second cam surface; and a first wrist member transmission element coupled between the first cam surface and the second cam surface, wherein the first and second cam surfaces are to enable a nonlinear rate of rotation of the first wrist member with respect to the first forearm. ### Claim 2 (depends on 1) The robot of claim 1, further comprising a first end effector coupled to the first wrist member, and a second end effector coupled to the second wrist member. ### Claim 3 (depends on 1) The robot of claim 1, further comprising a first upper arm drive assembly comprising: a first motor; and a first shaft coupled to the first motor and to the first upper arm and adapted to cause independent rotation of the first upper arm. ### Claim 4 (depends on 1) The robot of claim 1, further comprising a second upper arm drive assembly comprising a second shaft coupled to a second motor and the second upper arm, the second shaft passing along a side of the first wrist member and the second wrist member and adapted to cause independent rotation of the second upper arm. ### Claim 5 (depends on 1) The robot of claim 1, further comprising a first forearm drive assembly comprising: a third motor; a third shaft coupled to the third motor and to a first forearm driving member; a first forearm driven member coupled to the first forearm; and a first forearm transmission element coupled between the first forearm driving member and the first forearm driven member. ### Claim 6 (depends on 1) The robot of claim 1, wherein the first wrist member driving member comprises a first oblong pulley and the first wrist member driven member comprises a second oblong pulley, wherein a first maximum radius of the first oblong pulley is perpendicular to a second maximum radius of the second oblong pulley. ### Claim 7 (depends on 1) The robot of claim 1, further comprising a second forearm drive assembly comprising: a fourth motor; a fourth shaft coupled to the fourth motor and to a second forearm driving member; a second forearm driven member coupled to the second forearm; and a second forearm transmission element coupled between the second forearm driving member and the second forearm driven member. ### Claim 8 (depends on 1) The robot of claim 1, further comprising: a second wrist member drive assembly including a second forearm shaft rigidly coupled to the second upper arm and to a second wrist member driving member; a second wrist member driven member coupled to the second wrist member; and a second wrist member transmission element coupled between the second wrist member driving member and the second wrist member driven member. ### Claim 9 (depends on 8) The robot of claim 8, wherein the second wrist member driving member comprises a third cam surface and the second wrist member driven member comprises a fourth cam surface, wherein the third and fourth cam surfaces are to be engaged by the second wrist member transmission element and to enable a nonlinear rate of rotation of the second wrist member with respect to the second forearm. ### Claim 10 (depends on 1) The robot of claim 1, wherein the first forearm and first wrist member are positioned below the second forearm and the second wrist member. ### Claim 11 (depends on 1) The robot of claim 1, wherein the first forearm includes a different center-to-center length than the first upper arm, and the second forearm includes a different center-to-center length than the second upper arm. ### Claim 12 An electronic device processing system, comprising: a transfer chamber; a robot at least partially disposed in the transfer chamber and adapted to transport substrates to and from process chambers coupled to the transfer chamber, the robot comprising: a first upper arm rotatable about a shoulder axis; a second upper arm vertically spaced from the first upper arm and rotatable about the shoulder axis; a first forearm coupled to the first upper arm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the first upper arm about a second axis at a position offset from the shoulder axis; a second forearm coupled to the second upper arm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the second upper arm about a third axis at a position offset from the shoulder axis; a first wrist member coupled to the first forearm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the first forearm about a fourth axis at a position offset from the second axis; a second wrist member coupled to the second forearm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the second forearm about a fifth axis at a position offset from the third axis; a first forearm shaft rigidly coupled to the first upper arm and to a first wrist member driving member; a first wrist member driven member coupled to the first wrist member, wherein the first wrist member driving member comprises a first cam surface and the first wrist member driven member comprises a second cam surface; and a first wrist member transmission element coupled between the first cam surface and the second cam surface, wherein the first and second cam surfaces are to enable a nonlinear rate of rotation of the first wrist member with respect to the first forearm. ### Claim 13 (depends on 12) The electronic device processing system of claim 12, wherein the robot further comprises a first upper arm drive assembly comprising: a first motor; and a first shaft coupled to the first motor and the first upper arm and adapted to cause independent rotation of the first upper arm. ### Claim 14 (depends on 12) The electronic device processing system of claim 12, wherein the robot further comprises: a second upper arm drive assembly comprising: a second motor; and a second shaft coupled to the second motor and the second upper arm and adapted to cause independent rotation of the second upper arm. ### Claim 15 (depends on 12) The electronic device processing system of claim 12, wherein the robot further comprises a first forearm drive assembly comprising: a third motor; a third shaft coupled to the third motor and to a first forearm driving member: a first forearm driven member coupled to the first forearm; and a first forearm transmission element coupled between the first forearm driving member and the first forearm driven member. ### Claim 16 (depends on 12) The electronic device processing system of claim 12, wherein the robot further comprises a second forearm drive assembly comprising: a fourth motor; a fourth shaft coupled to the fourth motor and to a second forearm driving member; a second forearm driven member coupled to the second forearm; and a second forearm transmission element coupled between the second forearm driving member and the second forearm driven member. ### Claim 17 (depends on 12) The electronic device processing system of claim 12, wherein the first wrist member driving member comprises a first oblong pulley and the first wrist member driven member comprises a second oblong pulley, wherein a first maximum radius of the first oblong pulley is perpendicular to a second maximum radius of the second oblong pulley. ### Claim 18 A method of transporting substrates within an electronic device processing system, comprising: providing a robot comprising a first upper arm rotatable about a shoulder axis, a second upper arm vertically spaced from the first upper arm and rotatable about the shoulder axis, a first forearm coupled to the first upper arm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the first upper arm about a second axis at a position offset from the shoulder axis, a second forearm coupled to the second upper arm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the second upper arm about a third axis at a position offset from the shoulder axis, a first wrist member coupled to the first forearm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the first forearm about a fourth axis at a position offset from the second axis, a second wrist member coupled to the second forearm and vertically located between the first upper arm and the second upper arm and adapted for rotation relative to the second forearm about a fifth axis at a position offset from the third axis, a first forearm shaft rigidly coupled to the first upper arm and to a first wrist member driving member, a first wrist member driven member coupled to the first wrist member, wherein the first wrist member driving member comprises a first cam surface and the first wrist member driven member comprises a second cam surface, and a first wrist member transmission element coupled between the first cam surface and the second cam surface, wherein the first and second cam surfaces are to enable a nonlinear rate of rotation of the first wrist member with respect to the first forearm; independently rotating the first upper arm to extend a first end effector radially into a first chamber; and independently rotating the second upper arm to extend a second end effector radially into a second chamber. ### Claim 19 (depends on 18) The method of transporting substrates of claim 18, further comprising independently rotating the first forearm. ### Claim 20 (depends on 18) The method of claim 18, further comprising independently rotating the second forearm.