Substrate processing system, substrate processing apparatus and management device

A substrate processing system comprising:

• a plurality of substrate processing apparatuses;
• and a controller configured to manage the plurality of substrate processing apparatuses, wherein, upon receiving, by the controller, information specifying a substrate processing apparatus as a reference and file information designating a predetermined device file, the plurality of substrate processing apparatuses transmits request data including first device information indicating the reference substrate processing apparatus and first data information associated with the predetermined device file to the controller, wherein, upon receiving the request data, the controller transmits the received request data to the reference substrate processing apparatus, wherein the reference substrate processing apparatus creates response data including second data information responding to the first data information based on the received request data and transmits the created response data to the controller, wherein, upon receiving the response data, the controller transmits the received response data to the plurality of substrate processing apparatuses, and wherein the plurality of substrate processing apparatuses acquires the second data information from the response data, and wherein the controller comprises a corresponding device list comprising unique information of a previously registered substrate processing apparatus, and an electronic message management table comprising, as items, an item number, the first device information, second device information indicating the substrate processing apparatuses, and an identifier, and wherein the controller processes the request data received from the substrate processing apparatuses, compares the processed request data with the corresponding device list to calculate the second device information, and registers the calculated second device information in the electronic message management table.