Fluid ejection device and printhead

A printhead, comprising:

• a reservoir having a reservoir chamber configured to contain a fluid;
• a plurality of ejection devices, each ejection device including a body including:
• a chamber configured to hold a fluid;
• an ejection nozzle in fluidic communication with the chamber;
• an actuator operatively coupled to the chamber to generate, in use, one or more pressure waves in the fluid to cause an ejection of the fluid from the ejection nozzle;
• a fluidic path in fluidic communication with the chamber and configured to provide the fluid to the chamber;
• a buried damping cavity in fluid communication with the fluidic path and configured to provide the fluid to the fluidic path;
• and
• a damping membrane suspended over the damping cavity;
• wherein the buried damping cavity and the damping membrane are formed in a monolithic body, and
• a manifold structure between the reservoir and the plurality of ejection devices, wherein the manifold structure is configured to place the reservoir in fluidic communication with the plurality of ejection devices.

A method for manufacturing an ejection device, comprising:

• forming in a first body, a chamber configured to hold a fluid, an ejection nozzle in fluidic connection with the chamber, and an actuator operatively coupled to the chamber to generate, in use, one or more pressure waves in the fluid to cause an ejection of the fluid from the ejection nozzle;
• forming, in the first body, a fluidic path in fluidic connection with the chamber configured to provide fluid to the chamber, and
• forming, in a monolithic body, a damping cavity, a damping membrane, and an inlet, wherein the damping membrane is suspended over the damping cavity, wherein the damping membrane is located upstream from the fluidic path and configured to provide fluid to the fluidic path;
• and
• coupling the monolithic body to the first body such that the inlet of the monolithic body is in fluid communication with the fluidic path of the first body.