Self-tuning microelectromechanical impedance matching circuits and methods of fabrication

A self-tuning impedance-matching microelectromechanical circuit, comprising

• a) a self-tuning capacitor element connected to a first mechanical spring and having a tunable reactance;
• b) an inductor;
• c) one or more electrical connections between the self-tuning capacitor element and the inductor;
• and
• d) an AC signal source configured to (i) provide an AC signal to the self-tuning capacitor element and the inductor, the AC signal having a frequency, and (ii) create an electromagnetic force on the self-tuning capacitor element that moves the self-tuning capacitor element and tunes the self-tuning impedance-matching circuit toward resonance with the AC signal.

A self-tuning impedance-matching microelectromechanical circuit, comprising

• a) a first tunable reactance element connected to a first mechanical spring and having a tunable reactance;
• b) a second tunable or fixed reactance element;
• c) one or more electrical connections between the first tunable reactance element and the second tunable or fixed reactance element, wherein all or part of the at least one electrical connection comprises a superconducting material;
• and
• d) an AC signal source configured to (i) provide an AC signal to the first tunable reactance element and the second tunable or fixed reactance element, the AC signal having a frequency, and (ii) create an electromagnetic force on the first tunable reactance element that moves the first tunable reactance element and tunes the self-tuning impedance-matching circuit toward resonance with the AC signal,
• wherein one of the first tunable reactance element and the second tunable or fixed reactance element comprises a capacitor and the other of the first tunable reactance element and the second tunable or fixed reactance element comprises an inductor.

A self-tuning impedance-matching microelectromechanical circuit, comprising

• a) a first tunable reactance element connected to a first mechanical spring and having a tunable reactance;
• b) a second tunable or fixed reactance element;
• c) one or more electrical connections between the first tunable reactance element and the second tunable or fixed reactance element;
• d) an AC signal source configured to (i) provide an AC signal to the first tunable reactance element and the second tunable or fixed reactance element, the AC signal having a frequency, and (ii) create an electromagnetic force on the first tunable reactance element that moves the first tunable reactance element and tunes the self-tuning impedance-matching circuit toward resonance with the AC signal;
• and
• e) a plurality of actuator electrodes electrically coupled to the first tunable reactance element, configured to fine tune or de-tune the resonance of the self-tuning impedance-matching circuit,
• wherein one of the first tunable reactance element and the second tunable or fixed reactance element comprises a capacitor and the other of the first tunable reactance element and the second tunable or fixed reactance element comprises an inductor.

A circuit comprising:

• an antenna;
• a plurality of channels connected to the antenna, each having a different frequency;
• a first self-tuning circuit in series with at least one of the plurality of channels;
• and
• a second self-tuning parallel circuit connected between adjacent ones of the plurality of channels,
• wherein at least one of the first and second self-tuning circuits is directly or indirectly electromagnetically coupled to the antenna, and comprises
• a first tunable reactance element connected to a first mechanical spring and having a tunable reactance;
• a second tunable or fixed reactance element;
• one or more electrical connections between the first tunable reactance element and the second reactance elements;
• and
• an AC signal source configured to (i) provide an AC signal to the first tunable reactance element and second reactance elements, the AC signal having a frequency, and (ii) create an electromagnetic force on the first tunable reactance element that moves the first tunable reactance element and tunes the self-tuning impedance-matching circuit toward resonance with the AC signal, wherein one of the first tunable reactance element and second reactance elements comprises a capacitor and the other of the first tunable reactance element and second reactance elements comprises an inductor.

A circuit comprising:

• an antenna;
• an energy storage device comprising a battery or a capacitor;
• and
• at least one self-tuning microelectromechanical impedance-matching circuit, directly or indirectly electromagnetically coupled to the antenna and/or the energy storage device, comprising
• a first tunable reactance element connected to a first mechanical spring and having a tunable reactance;
• a second tunable or fixed reactance element;
• one or more electrical connections between the first tunable reactance element and the second reactance elements;
• and
• an AC signal source configured to (i) provide an AC signal to the first tunable reactance element and the second tunable or fixed reactance element, the AC signal having a frequency, and (ii) create an electromagnetic force on the first tunable reactance element that moves the first tunable reactance element and tunes the self-tuning impedance-matching circuit toward resonance with the AC signal,
• wherein one of the first tunable reactance element and the second tunable or fixed reactance element comprises a capacitor, the other of the first tunable reactance element and the second tunable or fixed reactance element comprises an inductor, and the energy storage device is configured to store electromagnetic energy from the antenna and the self-tuning microelectromechanical impedance-matching circuit.

A circuit comprising:

• an energy storage device comprising a battery or a capacitor;
• a piezoelectric energy harvester;
• and
• at least one self-tuning microelectromechanical (MEMS) impedance-matching circuit, directly or indirectly electromagnetically coupled to the piezoelectric energy harvester and/or the energy storage device, comprising
• a first tunable reactance element connected to a first mechanical spring and having a tunable reactance;
• a second reactance element, wherein the second reactance element is tunable or fixed;
• one or more electrical connections between the first tunable reactance element and the second reactance element;
• and
• an AC signal source configured to (i) provide an AC signal to the first and second reactance elements, the AC signal having a frequency, and (ii) create an electromagnetic force on the first tunable reactance element that moves the first tunable reactance element and tunes the self-tuning impedance-matching circuit toward resonance with the AC signal,
• wherein one of the first tunable reactance element and the second reactance element comprises a capacitor, the other of the first tunable reactance element and the second reactance element comprises an inductor, and the energy storage device is configured to store electromagnetic energy from the piezoelectric energy harvester and the self-tuning MEMS impedance-matching circuit.