Biasable rotatable electrostatic chuck
AssigneeApplied Materials, Inc.
InventorsBharath Swaminathan, Anantha K. Subramani
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure relate to a rotatable RF coupling device and an electrostatic chuck incorporating the same. In some embodiments, a rotatable RF coupling device includes a conductive plate; a rotatable split cylinder configured to be coupled to a dielectric disk of an electrostatic chuck to provide RF power to one or more RF bias electrodes disposed within the dielectric disk; a plurality of RF input taps coupled to the conductive plate to couple RF power to the conductive plate; a stationary ring coupled to the conductive plate and surrounding the rotatable split cylinder; and a grounded shield surrounding the conductive plate, the stationary ring, and the rotatable split cylinder.
Claims20
A rotatable radio frequency (RF) coupling device, comprising:
- a conductive plate;
- a rotatable split cylinder configured to be coupled to a dielectric disk of an electrostatic chuck to provide RF power to one or more RF bias electrodes disposed within the dielectric disk;
- a plurality of RF input taps coupled to the conductive plate to couple RF power to the conductive plate;
- a stationary ring coupled to the conductive plate and surrounding the rotatable split cylinder;
- and
- a grounded shield surrounding the conductive plate, the stationary ring, and the rotatable split cylinder.
An electrostatic chuck, comprising:
- a dielectric disk having a support surface to support a substrate and an opposing second surface, wherein at least one chucking electrode is disposed within the dielectric disk;
- a lamp housing disposed below the dielectric disk and having a plurality of lamps to heat the dielectric disk;
- a metallic plate disposed below the lamp housing to absorb heat generated by the plurality of lamps;
- a rotatable radio frequency (RF) coupling device extending through the lamp housing and the metallic plate and coupled to the dielectric disk at a first end of the rotatable RF coupling device to support the dielectric disk in a spaced relation to the lamp housing;
- a shaft coupled to a second end of the rotatable RF coupling device at a first end of the shaft;
- and
- a rotation assembly coupled to the shaft to rotate the shaft, a portion of the RF coupling device, and the dielectric disk with respect to the lamp housing and the metallic plate.
An electrostatic chuck, comprising:
- a dielectric disk having a support surface to support a substrate and an opposing second surface, wherein at least one chucking electrode and one or more radio frequency (RF) bias electrodes are disposed within the dielectric disk;
- a lamp housing disposed below the dielectric disk and having a plurality of lamps to heat the dielectric disk;
- a metallic plate disposed below the lamp housing to absorb heat generated by the plurality of lamps;
- a rotatable radio frequency (RF) coupling device extending through the lamp housing and the metallic plate and coupled to the dielectric disk at a first end of the rotatable RF coupling device to support the dielectric disk in a spaced relation to the lamp housing, wherein the rotatable RF coupling device comprises:
- a conductive plate;
- a rotatable split cylinder coupled to the dielectric disk to provide RF power to one or more RF bias electrodes disposed within the dielectric disk;
- a plurality of RF input taps coupled to the conductive plate to couple RF power to the conductive plate;
- a stationary ring coupled to the conductive plate and surrounding the rotatable split cylinder;
- and
- a grounded shield surrounding the conductive plate, the stationary ring, and the rotatable split cylinder;
- a shaft coupled to a second end of the rotatable RF coupling device at a first end of the shaft;
- a housing surrounding the lamp housing and the metallic plate;
- a gap disposed between an outer diameter of the metallic plate and an inner surface of the housing, wherein the gap is sized such that when the metallic plate absorbs heat from the plurality of lamps, thermal expansion of the metallic plate causes the outer diameter of the metallic plate to contact the inner surface of the housing;
- and
- a magnetic drive assembly coupled to the shaft to rotate the shaft, a portion of the RF coupling device, and the dielectric disk with respect to the lamp housing and the metallic plate.
Dependencies are inferred from the claim text.