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US 10,488,455 B2Granted
Micro device arrangement in donor substrate
AssigneeVueReal Inc.
InventorsGholamreza Chaji, Ehsanollah Fathi
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Abstract
This disclosure is related to arranging micro devices in the donor substrate by either patterning or population so that there is no interfering with non-receiving pads and the non-interfering area in the donor substrate is maximized. This enables the transfer of micro devices to a receiver substrate with fewer steps.
Claims14
A method of populating a receiver substrate, comprising:
- a) providing the receiver substrate that includes a plurality of pixels, each pixel including first pads for receiving a first type of micro devices, second pads for receiving a second type of micro devices, and third pads for receiving a third type of micro devices;
- b) providing a first donor substrate that includes a plurality of the first type of micro devices arranged in arrays separated by first interfering areas void of the first type of micro devices;
- c) aligning a first group of the first type of micro devices on the first donor substrate with a first group of the first pads on the receiver substrate, whereby the first interfering areas of the first donor substrate overlap the second pads preventing interference with the second pads by the first type of micro devices;
- d) transferring the first group of the first type of micro devices from the first donor substrate to the first group of the first pads of the receiver substrate;
- e) adjusting a relative position of the first donor substrate and the receiver substrate to align a second group of the first type of micro devices with a second group of the first pads on the receiver substrate, whereby the first interfering areas of the first donor substrate overlap the second pads preventing interference with the second pads by the first type of micro devices;
- and
- f) transferring the second group of the first type of micro devices from the first donor substrate to the second group of the first pads of the receiver substrate,
- wherein each of the first, second and third pads are arranged in a cluster, whereby a pitch of the first to the third pads within the cluster is smaller than a pitch between the third to the first pads of adjacent clusters in adjacent pixels.
5 more elements
Dependencies are inferred from the claim text.