Method for manufacturing a FZ silicon single crystal subject to additional gallium doping for solar cells
AssigneeShin-Etsu Chemical Co., Ltd.
InventorHiroyuki Otsuka
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AssigneeShin-Etsu Chemical Co., Ltd.
InventorHiroyuki Otsuka
Estimating the term…
The present invention is a method for manufacturing an FZ silicon single crystal for a solar cell, including the steps of: pulling a CZ silicon single crystal doped with gallium by a Czochralski method; and float-zone processing a raw material rod, with the raw material rod being the CZ silicon single crystal, at 1.6 atmospheric pressure or more to manufacture the FZ silicon single crystal. As a result, it is possible to provide a method for manufacturing an FZ silicon single crystal for a solar cell that can decrease the amount of gallium dopant evaporated during the float-zone processing, thereby preventing the silicon single crystal from increasing the resistance while decreasing oxygen, which is inevitably introduced into a CZ crystal, and preventing formation of a B-O pair, which causes a problem to the characteristics of a solar cell.
A method for manufacturing an FZ silicon single crystal for a solar cell, comprising the steps of:
Dependencies are inferred from the claim text.