# US 10,485,087 B2 · Portable information terminal, beam irradiation system, and program > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,485,087 B2 - Document ID: US10485087B2 - Status: Granted - Kind: B2 - Application number: 15/936,183 - Filed: 2018-03-26 - Published: 2018-10-04 - Granted: 2019-11-19 - Earliest claimed: 2017-03-28 - Assignees: Hitachi High-Tech Science Corporation - Applicants: Hitachi High-Tech Science Corporation - Inventors: Takuma Aso; Atsushi Uemoto; Tatsuya Asahata; Masato Suzuki - Web page: https://patentgrep.com/patent/US10485087B2 ## CPC - H05H 7/001: {Arrangements for beam delivery or irradiation (irradiation systems per se G21K5/00)} - G21K 5/00: Irradiation devices (discharge tubes for irradiating H01J37/00) - H01J 37/02: Details - H05H 7/00: Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00 - H01J 2237/28: Scanning microscopes - H01J 2237/304: Controlling tubes - H01J 2237/31749: Focused ion beam - H05H 2007/004: {for modifying beam energy, e.g. spread out Bragg peak devices} - H05H 2007/005: {for modifying beam emittance, e.g. stochastic cooling devices, stripper foils} - H05H 2007/007: {for focusing the beam to irradiation target} - H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS - G21K: HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A portable information terminal is separated from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam. The portable information terminal performs operation of a first operation item at a desired position and includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating the first operation item based on operation by a user, the first operation item being one or more operation items among a plurality of items operable in the charged particle beam irradiation apparatus. ## Claims ### Claim 1 A portable information terminal separate from a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam, the portable information terminal comprising: a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating a first operation item based on operation by a user, the first operation item being a part of operation items among a plurality of operation items operable in the charged particle beam irradiation apparatus; and an output controller causing an output unit to output an output of a type according to the first operation item assigned to the GUI operated by the user, wherein different first operation items are assigned to the GUI, and the output unit is a speaker, and the output controller causes the output unit to output an audible sound of the type as the output of the type. ### Claim 2 (depends on 1) The portable information terminal of claim 1, wherein the first operation item includes an operation item related to a state of the charged particle beam. ### Claim 3 (depends on 2) The portable information terminal of claim 2, wherein the operation item related to the state of the charged particle beam includes at least some among acceleration voltage, beam current, lens modes, aligner, beam shift, OL values, and stigma values. ### Claim 4 (depends on 1) The portable information terminal of claim 1, wherein the first operation item includes an operation item related to detection sensitivity at which a secondary particle radiated from the sample irradiated with the charged particle beam is detected. ### Claim 5 (depends on 4) The portable information terminal of claim 4, wherein the operation item related to the detection sensitivity includes at least one of contrast and brightness. ### Claim 6 (depends on 1) The portable information terminal of claim 1, further comprising: an image generating part generating an observation image of the sample based on information indicating the secondary particle radiated from the sample irradiated with the charged particle beam, wherein the display controller causes the display unit to display the observation image generated by the image generating part at a predetermined position in the image. ### Claim 7 (depends on 1) The portable information terminal of claim 1, wherein the display controller places, in the image, the GUI at a position according to operation received from the user. ### Claim 8 (depends on 1) The portable information terminal of claim 1, wherein the output controller causes the output unit to output an audible sound of a level according to a level of operation performed by the user with respect to the GUI operated by the user. ### Claim 9 (depends on 8) The portable information terminal of claim 8, wherein the portable information terminal is communicably connected to the control device wirelessly. ### Claim 10 (depends on 1) The portable information terminal of claim 1, wherein the display unit is a touch panel; and the output controller does not output the sound of the type from the output unit when the user does not move a touch position where the user touches while the user touches a region where the GUI is displayed on the touch panel. ### Claim 11 (depends on 1) The portable information terminal of claim 1, wherein the charged particle beam irradiation apparatus is communicably connected to a control device controlling the charged particle beam irradiation apparatus; and the portable information terminal, is communicably connected to the control device and operates the first operation item via the control device according to operation received from the user. ### Claim 12 (depends on 1) The portable information terminal of claim 1, wherein the portable information terminal is one of a tablet PC, a smart phone or a personal digital assistant. ### Claim 13 (depends on 1) The portable information terminal of claim 1, wherein the portable information terminal is configured to be carried by hand. ### Claim 14 A beam irradiation system comprising: a charged particle beam irradiation apparatus for performing processing of a sample by irradiating the sample with a charged particle beam; and a portable information terminal separate from the charged particle beam irradiation apparatus, wherein the portable information terminal includes a display controller causing a display unit to display an image containing a graphical user interface (GUI) capable of operating a first operation item based on operation by a user, the first operation item being at least a part of operation items among operation items operable in the charged particle beam irradiation apparatus; and an output controller causing an output unit to output an output of a type according to the first operation item assigned to the GUI operated by the user, wherein different first operation items are assigned to the GUI, and the output unit is a speaker and the output controller causes the output unit to output an audible sound of the type as the output of the type. ### Claim 15 (depends on 14) The beam irradiation system of claim 14, wherein the output controller causes the output unit to output an audible sound of a level according to a level of operation performed by the user with respect to the GUI operated by the user. ### Claim 16 (depends on 14) The beam irradiation system of claim 14, wherein the portable information terminal is one of a tablet PC, a smart phone or a personal digital assistant. ### Claim 17 (depends on 14) The beam irradiating system of claim 14, wherein the portable information terminal is configured to be carried by hand.