# US 10,483,943 B2 · Artificially oriented piezoelectric film for integrated filters

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- Number: US 10,483,943 B2
- Document ID: US10483943B2
- Status: Granted
- Kind: B2
- Application number: 15/634,397
- Filed: 2017-06-27
- Published: 2018-12-27
- Granted: 2019-11-19
- Earliest claimed: 2017-06-27
- Assignees: Globalfoundries Inc.
- Applicants: Globalfoundries Inc.
- Inventors: Vincent J. McGahay; Bhupesh Chandra
- Web page: https://patentgrep.com/patent/US10483943B2

## CPC

- H03H 3/02: for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence)
- H03H 3/08: for the manufacture of resonators or networks using surface acoustic waves
- H03H 9/02015: {Characteristics of piezoelectric layers, e.g. cutting angles}
- H03H 9/02543: {Characteristics of substrate, e.g. cutting angles}
- H10N 30/045: by polarising
- H10N 30/074: by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- G01N 29/2437: {Piezoelectric probes}
- H03H 9/56: Monolithic crystal filters
- H10N 30/076: by vapour phase deposition
- Y10T 29/42: Piezoelectric device making
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The present disclosure relates to semiconductor structures and, more particularly, to artificially oriented piezoelectric films for integrated filters and methods of manufacture. The structure includes: a piezoelectric film with effective crystalline orientations of the polar axis rotated 90 degrees from a natural orientation for planar deposited films; and a conductor pattern formed on a surface of the piezoelectric film.

## Claims

### Claim 1

A structure comprising:
a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited films; and
a conductor pattern formed on a surface of the piezoelectric film, wherein
the conductor pattern comprises electrodes formed on a single, planar surface of the piezoelectric film,
the piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the conductor pattern, and
the effective crystalline orientations of the polar axis are in a vertical direction adjacent to an underlying substrate.

### Claim 2 (depends on 1)

The structure of claim 1, wherein the piezoelectric film is AN.

### Claim 3 (depends on 1)

The structure of claim 1, wherein the conductor pattern and piezoelectric film is an electrical filter.

### Claim 4 (depends on 1)

The structure of claim 1, wherein the effective crystalline orientations is to a depth of at least an electric field generated by the electrodes.

### Claim 5 (depends on 1)

The structure of claim 1, wherein the piezoelectric film fills in airgaps created in an underlying piezoelectric film.

### Claim 6 (depends on 1)

The structure of claim 1, wherein the horizontal orientation is an artificial orientation of the piezoelectric film which provides enhanced piezoelectric response in comparison to a film with a vertically oriented polar axis.

### Claim 7

A structure comprising:
a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited films; and
a conductor pattern formed on a surface of the piezoelectric film,
wherein the effective crystalline orientations of the polar axis are in a vertical direction adjacent to an underlying substrate.

### Claim 8 (depends on 7)

The structure of claim 7, wherein the piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the conductor pattern.