# US 10,483,876 B2 · Electrostatically deflectable micromechanical device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,876 B2 - Document ID: US10483876B2 - Status: Granted - Kind: B2 - Application number: 14/968,635 - Filed: 2015-12-14 - Published: 2016-06-16 - Granted: 2019-11-19 - Earliest claimed: 2015-12-14 - Assignees: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. - Applicants: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V. - Inventors: Sergiu Langa; Holger Conrad; Harald Schenk; Michael Stolz - Web page: https://patentgrep.com/patent/US10483876B2 ## CPC - H02N 1/006: {of the gap-closing type (H02N1/004 takes precedence)} - B81B 3/0021: {Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00)} - B81B 2201/032: Bimorph and unimorph actuators, e.g. piezo and thermo - B81B 2203/0118: Cantilevers - B81B 2203/0127: Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries. ## Claims ### Claim 1 A micromechanical device comprising: a deflectable element, wherein the deflectable element comprises: an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a deflection direction from a neutral fiber of the deflectable element, the capacitor comprising a distal electrode and a proximal electrode, wherein the proximal electrode is arranged between the distal electrode and the neutral fiber and the plate capacitor is subdivided along a direction into segments between which the distal electrode is fixed mechanically at segment boundaries such that the deflectable element, by providing the plate capacitor with a voltage, is deflected along the direction in or opposite to the deflection direction; and wherein the proximal electrode is arranged at a side of an insulation material of the deflectable element facing the distal electrode and is structured along the direction so as to comprise gaps at the segment boundaries such that the distal electrode is mounted mechanically to the insulation material at the segment boundaries in a manner laterally spaced apart from the proximal electrode. ### Claim 2 (depends on 1) The micromechanical device in accordance with claim 1, wherein the distal electrode is formed to be continuous in the direction across the segments and segment boundaries. ### Claim 3 (depends on 1) The micromechanical device in accordance with claim 1, wherein the side of the insulation material facing the distal electrode is implemented to be planar. ### Claim 4 (depends on 1) The micromechanical device in accordance with claim 1, wherein the proximal electrode comprises one portion per segment, wherein the portions are spaced apart from one another at the segment boundaries via the gaps, wherein the portions, at a side facing the distal electrode, due to a multi-layered setup, comprise a side facing the distal electrode and facing away from the insulation material, which comprises a non-planar shape. ### Claim 5 (depends on 4) The micromechanical device in accordance with claim 4, wherein the deflectable element comprises a beam or membrane through which passes the neutral fiber, wherein the insulation material is formed by an insulation layer which is arranged at a side of the beam or membrane facing the distal electrode. ### Claim 6 (depends on 5) The micromechanical device in accordance with claim 5, wherein the insulation layer is a conformingly deposited insulation layer of basically constant thickness. ### Claim 7 (depends on 4) The micromechanical device in accordance with claim 4, wherein the proximal electrode or the distal electrode is electrically short-circuited to the beam or membrane. ### Claim 8 (depends on 3) The micromechanical device in accordance with claim 3, wherein the portions of the proximal electrode are short-circuited to one another to be placed at a common potential, are drivable individually to be placed at mutually different potentials, are short-circuited in groups to be set in groups to different potentials. ### Claim 9 A micromechanical device comprising: a deflectable element, wherein the deflectable element comprises: an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a direction of deflection from a neutral fiber of the delectable element, the capacitor comprising a distal and a proximal electrode, wherein the distal electrode is arranged on a side of the place capacitor facing away from the neutral fiber and the place capacitor is subdivided along a direction into segments between which the distal electrode and the proximal electrode are connected mechanically at segment boundaries such that, by providing the plate capacitor with a voltage, the deflectable element is deflected along the direction in or opposite to the direction of deflection, and wherein an insulation layer extends between the distal electrode and the proximal electrode in a manner formed continuously in the direction across the segments and segment boundaries so as to insulate same from one another such that mechanical coupling at the segment boundary is realized indirectly via the insulation layer. ### Claim 10 (depends on 9) The micromechanical device in accordance with claim 9, wherein the proximal electrode and the distal electrode are formed continuously in the direction across the segments and segment boundaries. ### Claim 11 (depends on 9) The micromechanical device in accordance with claim 9, wherein the insulation layer abuts on the proximal electrode. ### Claim 12 (depends on 9) The micromechanical device in accordance with claim 9, wherein the deflectable element comprises a beam or membrane through which passes the neutral fiber, wherein the beam or membrane abuts on the insulation layer at a side facing the distal electrode and serves itself as the proximal electrode. ### Claim 13 (depends on 9) The micromechanical device in accordance with claim 9, wherein a side of the proximal electrode facing the distal electrode is implemented to be planar and the insulation layer is a planar layer abutting thereon, wherein slots of the plate capacitor between the proximal and distal electrodes in the segments result from a deviation, repeating per segment, of the distal electrode from a planar shape extending in parallel to the insulation layer. ### Claim 14 (depends on 9) The micromechanical device in accordance with claim 9, wherein a side of the proximal electrode facing the distal electrode comprises one recess or projection extending transverse to the direction per segment and the insulation layer is a planar conforming layer abutting on the side of the proximal electrode facing the distal electrode. ### Claim 15 (depends on 14) The micromechanical device in accordance with claim 14, wherein slots of the plate capacitor between the proximal and distal electrodes in the segments comprise an essentially constant thickness. ### Claim 16 (depends on 1) The micromechanical device in accordance with claim 1, wherein the distal and/or proximal electrode(s) is/are formed from titanal aluminide, doped polysilicon, doped amorphous silicon or aluminum. ### Claim 17 (depends on 1) The micromechanical device in accordance with claim 1, wherein the insulation layer is formed from aluminum oxide or thermal silicon oxide. ### Claim 18 (depends on 1) The micromechanical device in accordance with claim 1, wherein a width of a slot between the distal and proximal electrodes within the segments is basically constant. ### Claim 19 (depends on 1) The micromechanical device in accordance with claim 1, wherein a slot between the distal electrode and the proximal electrode within the segments comprises a cross-sectional profile which is equal among the segments. ### Claim 20 (depends on 19) The micromechanical device in accordance with claim 19, wherein the profile comprises a cross-section arched in the direction of the neutral fiber or away from the neutral fiber or a pointed cross-section. ### Claim 21 (depends on 1) The micromechanical device in accordance with claim 1, wherein the deflectable element is formed from a semiconductor material, metal, plastic, polymer or FR4. ### Claim 22 (depends on 1) The micromechanical device in accordance with claim 1, wherein a thickness of the deflectable element in a direction of curvature into which the deflectable element is curved by providing the plate capacitor with a voltage is larger by more than 5 times a thickness of the distal electrode and a thickness of a slot between the distal and proximal electrodes in the segments together. ### Claim 23 (depends on 9) The micromechanical device in accordance with claim 9, wherein a thickness of the deflectable element in a direction of curvature into which the deflectable element is curved by providing the plate capacitor with a voltage is larger by more than 5 times a thickness of the distal electrode and a thickness of a slot between the distal and proximal electrodes in the segments together. ### Claim 24 (depends on 1) The micromechanical device in accordance with claim 1, wherein the deflectable element is implemented to be a membrane or beam. ### Claim 25 (depends on 1) The micromechanical device in accordance with claim 1, wherein a thickness of the deflectable element, measured in a direction of curvature into which the deflectable element is curved by providing the plate capacitor with a voltage, is varied along the direction such that the degree of deflection also varies along the direction. ### Claim 26 (depends on 1) The micromechanical device in accordance with claim 1, wherein a slot between the distal and proximal electrodes transverse to the direction and transverse to a direction of curvature into which the deflectable element is curved by providing the plate capacitor with a voltage, within the segments, is closed. ### Claim 27 (depends on 1) The micromechanical device in accordance with claim 1, wherein a slot between the distal and proximal electrodes within the segments is filled by air, polymer, a dielectric elastic material. ### Claim 28 (depends on 1) A method for operating a micromechanical device in accordance with claim 1. ### Claim 29 (depends on 9) A method for operating a micromechanical device in accordance with claim 9. ### Claim 30 A micromechanical device comprising a deflectable element, wherein the deflectable element comprises an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a deflection direction from a neutral fiber of the deflectable element, the capacitor comprising a distal electrode and a proximal electrode, wherein the proximal electrode is arranged between the distal electrode and the neutral fiber and the plate capacitor is subdivided along a direction into segments between which the distal electrode is fixed mechanically at segment boundaries such that the deflectable element, by providing the plate capacitor with a voltage, a lateral expansion or a lateral tension is induced by the plate capacitor in the deflectable element which deflects the deflectable element according to the bimorph principle along the direction in or opposite to the deflection direction; wherein the proximal electrode is arranged at a side of an insulation material of the deflectable element facing the distal electrode and is structured along the direction so as to comprise gaps at the segment boundaries such that the distal electrode is mounted mechanically to the insulation material at the segment boundaries in a manner laterally spaced apart from the proximal electrode. ### Claim 31 A micromechanical device comprising a deflectable element, wherein the deflectable element comprises an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a deflection direction from a neutral fiber of the deflectable element, the capacitor comprising a distal electrode and a proximal electrode, wherein the proximal electrode is arranged between the distal electrode and the neutral fiber and the plate capacitor is subdivided along a direction into segments between which the distal electrode is fixed mechanically at segment boundaries such that the deflectable element, by providing the plate capacitor with a voltage, is deflected along the direction in or opposite to the deflection direction, wherein: the proximal electrode is arranged at a side of an insulation material of the deflectable element facing the distal electrode and is structured along the direction so as to comprise gaps at the segment boundaries such that the distal electrode is mounted mechanically to the insulation material at the segment boundaries in a manner laterally spaced apart from the proximal electrode, wherein the proximal electrode comprises one portion per segment, wherein the portions are spaced apart from one another at the segment boundaries via the gaps and wherein the portions of the proximal electrode are short-circuited to one another to be placed at a first common potential so that the proximal electrode is at the first common potential across the segments and segment boundaries, and the distal electrode is formed to be continuous in the direction across the segments and segment boundaries so that the distal electrode is at a second common potential across the segments and segment boundaries. ### Claim 32 A micromechanical device comprising a deflectable element, wherein the deflectable element comprises an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a direction of deflection from a neutral fiber of the delectable element, the capacitor comprising a distal and a proximal electrode, wherein the distal electrode is arranged on a side of the place capacitor facing away from the neutral fiber and the place capacitor is subdivided along a direction into segments between which the distal electrode and the proximal electrode are connected mechanically at segment boundaries such that, by providing the plate capacitor with a voltage, a lateral expansion or a lateral tension is induced by the plate capacitor in the deflectable element which deflects the deflectable element according to the bimorph principle along the direction in or opposite to the direction of deflection, wherein: an insulation layer extends between the distal electrode and the proximal electrode in a manner formed continuously in the direction across the segments and segment boundaries so as to insulate same from one another such that mechanical coupling at the segment boundary is realized indirectly via the insulation layer. ### Claim 33 A micromechanical device comprising a deflectable element, wherein the deflectable element comprises an electrostatic actuator which is implemented as a plate capacitor extending along and spaced apart in a direction of deflection from a neutral fiber of the delectable element, the capacitor comprising a distal and a proximal electrode, wherein the distal electrode is arranged on a side of the place capacitor facing away from the neutral fiber and the place capacitor is subdivided along a direction into segments between which the distal electrode and the proximal electrode are connected mechanically at segment boundaries such that, by providing the plate capacitor with a voltage, the deflectable element is deflected along the direction in or opposite to the direction of deflection, wherein: an insulation layer extends between the distal electrode and the proximal electrode in a manner formed continuously in the direction across the segments and segment boundaries so as to insulate same from one another such that mechanical coupling at the segment boundary is realized indirectly via the insulation layer, and between the segment boundaries a gap is arranged between the proximal electrode and the distal electrode at each segment in addition to the insulation layer, and the proximal electrode is formed to be continuous in the direction across the segments and segment boundaries so that the proximal electrode is at a first common potential across the segments and segment boundaries, and the distal electrode is formed to be continuous in the direction across the segments and segment boundaries so that the distal electrode is at a second common potential across the segments and segment boundaries.