# US 10,483,875 B2 · Surface elastic wave generator, transceiver, and generation method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,875 B2 - Document ID: US10483875B2 - Status: Granted - Kind: B2 - Application number: 14/290,995 - Filed: 2014-05-30 - Published: 2015-05-21 - Granted: 2019-11-19 - Earliest claimed: 2013-11-20 - Assignees: Industrial Technology Research Institute - Applicants: Industrial Technology Research Institute - Inventors: Feng-Chia Hsu; Tsun-Che Huang; Jyun-Cheng Huang - Web page: https://patentgrep.com/patent/US10483875B2 ## CPC - H02N 1/002: {Electrostatic motors} - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ## Abstract A surface elastic wave generator may include a substrate. A first conductivity type region is formed in the substrate. A second conductivity type doped region includes at least one doping pattern doped on surface of the first conductivity type region. Through applying reverse bias to junctions between the first conductivity type region and the second conductivity type doped region, a depletion capacitance region is formed. Also, through inputting signal to the first conductivity type region or the second conductivity type doped region, the surface elastic wave is generated on the substrate. In addition, a surface elastic wave transceiver and surface elastic wave generation method are also provided. ## Claims ### Claim 1 A surface elastic wave generator comprising: a substrate; a first conductivity type region formed in the substrate; and a second conductivity type doped region doped on a surface of the first conductivity type region, a depletion capacitance region being formed through applying reverse bias to junctions between the first conductivity type region and the second conductivity type doped region, a surface elastic wave being generated on the substrate through inputting an alternating current signal to the first conductivity type region or the second conductivity type doped region, wherein the second conductivity type doped region comprising at least one doping pattern. ### Claim 2 (depends on 1) The surface elastic wave generator as recited in claim 1, wherein the substrate is a silicon substrate or a SOI substrate. ### Claim 3 (depends on 1) The surface elastic wave generator as recited in claim 1, wherein one of the first and the second conductivity types is P-type and the other one is N-type. ### Claim 4 (depends on 1) The surface elastic wave generator as recited in claim 1, wherein the second conductivity type doped region appears to be in fork-shapes or a plurality of periodically arranged rectangles. ### Claim 5 (depends on 1) The surface elastic wave generator as recited in claim 1, wherein a period of the at least one doping pattern is an integer multiple of a wavelength of the surface elastic wave. ### Claim 6 (depends on 1) The surface elastic wave generator as recited in claim 1, wherein a period of the at least one doping pattern is twice the wavelength of the surface elastic wave. ### Claim 7 (depends on 1) The surface elastic wave generator as recited in claim 1, wherein the substrate has a layer of dielectric material thereon. ### Claim 8 (depends on 7) The surface elastic wave generator as recited in claim 7, wherein the dielectric material is silicon oxide, silicon nitride, silicon fluoride glass, undoped silicon glass, phosphorus, phosphosilicate glass or boron phosphorous silica glass. ### Claim 9 A surface elastic wave transceiver comprising: a substrate; a transmitter formed in the substrate, the transmitter comprising a first region with a first conductivity type and a first doped region with a second conductivity type, the first doped region comprising at least one first doping pattern doped on a surface of the first region with the first conductivity type, a surface elastic wave being generated through applying reverse bias between the first doped region and the first region and inputting a signal to the first region or the first doped region; and a receiver formed in the substrate, the receiver comprising a second region with the first conductivity type and a second doped region with the second conductivity type, the second doped region comprising at least one second doping pattern doped on a surface of the second region with the first conductivity type. ### Claim 10 (depends on 9) The surface elastic wave transceiver as recited in claim 9, wherein the substrate is a silicon substrate or a SOI substrate. ### Claim 11 (depends on 9) The surface elastic wave transceiver as recited in claim 9, wherein one of the first and the second conductivity types is P-type and the other one is N-type. ### Claim 12 (depends on 9) The surface elastic wave transceiver as recited in claim 9, wherein the first doped region and the second doped region respectively appear to be in fork-shapes or a plurality of periodically arranged rectangles, and the first doping patterns and the second doping patterns respectively are a plurality of fork portions or extending portions, extending parallelly to each other. ### Claim 13 (depends on 9) The surface elastic wave transceiver as recited in claim 9, wherein the receiver further comprises a gate located at a surface of the substrate be-tween the second doping patterns, and the second doping patterns at two sides of the gate are respectively being used as a source and a drain to form a plurality of field effect transistors. ### Claim 14 (depends on 9) The surface elastic wave transceiver as recited in claim 9 further comprising a first reflective structure and a second reflective structure formed in the substrate, and the receiver and the transmitter located between the first reflective structure and the second reflective structure. ### Claim 15 (depends on 14) The surface elastic wave transceiver as recited in claim 14, wherein the first reflective structure or the second reflective structure comprises a plurality of grooves being parallel to each other. ### Claim 16 (depends on 14) The surface elastic wave transceiver as recited in claim 14, wherein the first reflective structure or the second reflective structure comprises at least one acoustic impedance material different from a material of the substrate. ### Claim 17 (depends on 16) The surface elastic wave transceiver as recited in claim 16, wherein the at least one acoustic impedance material different from the material of the substrate is air, dielectric material or metal. ### Claim 18 (depends on 13) The surface elastic wave transceiver as recited in claim 13, wherein the gate comprises a gate dielectric layer and a gate electrode, wherein the gate dielectric layer is located between the gate electrode and the substrate. ### Claim 19 (depends on 13) The surface elastic wave transceiver as recited in claim 13, wherein the source and the drain respectively appear in cross-fork-shapes that are al-ternately arranged in parallel to each other, and the gate is located between the source and the drain. ### Claim 20 (depends on 13) The surface elastic wave transceiver as recited in claim 13 further comprising a first reflective structure and a second reflective structure formed in the substrate, and the receiver and the transmitter located between the first reflective structure and the second reflective structure. ### Claim 21 (depends on 20) The surface elastic wave transceiver as recited in claim 20, wherein the first reflective structure or the second reflective structure comprises a plurality of grooves being parallel to each other. ### Claim 22 (depends on 20) The surface elastic wave transceiver as recited in claim 20, wherein the first reflective structure or the second reflective structure comprises at least one acoustic impedance material different from a material of the substrate. ### Claim 23 (depends on 22) The surface elastic wave transceiver as recited in claim 22, wherein the at least one acoustic impedance material different from the material of that substrate is air, dielectric material or metal. ### Claim 24 (depends on 9) The surface elastic wave transceiver as recited in claim 9, wherein the substrate has a layer of dielectric material thereon. ### Claim 25 (depends on 24) The surface elastic wave transceiver as recited in claim 24, wherein the dielectric material is silicon oxide, silicon nitride, silicon fluoride glass, undoped silicon glass, phosphorus, phosphosilicate glass or boron phosphorous silica glass. ### Claim 26 A surface elastic wave generation method comprising: providing a substrate, wherein the substrate has a first conductivity type region, a surface of the first conductivity type region has a second conductivity type doped region, and the second conductivity type doped region comprises at least one doping pattern; applying reverse bias to junctions between the first conductivity type region and the second conductivity type doped region so as to generate a depletion capacitance region; and inputting a signal to the first conductivity type region or the second conductivity type doped region, and an acting force generated at two ends of the depletion capacitance region, wherein the acting force perturbs a surface of the substrate, thereby causing the surface elastic wave to spread along the surface of the substrate. ### Claim 27 (depends on 26) The surface elastic wave generation method as recited in claim 26, wherein the second conductivity type doped region appears to be in fork-shapes or a plurality of periodically arranged rectangles. ### Claim 28 (depends on 26) The surface elastic wave generation method as recited in claim 26, wherein the substrate has a layer of dielectric material thereon. ### Claim 29 (depends on 28) The surface elastic wave generation method as recited in claim 28, wherein the dielectric material is silicon oxide, silicon nitride, silicon fluoride glass, undoped silicon glass, phosphorus, phosphosilicate glass or boron phosphorous silica glass. ### Claim 30 A surface elastic wave transceiver comprising: a substrate; a transmitter being a surface elastic wave generator, the surface elastic wave generator comprising: a first conductivity type region formed in the substrate; and a second conductivity type doped region comprising at least one doping pattern doped on a surface of the first conductivity type region, a depletion capacitance region being formed through applying reverse bias to junctions between the first conductivity type region and the second conductivity type doped region, a surface elastic wave being generated on the substrate through inputting a signal to the first conductivity type region or the second conductivity type doped region; and a receiver formed on the substrate and adapted to receive the surface elastic wave generated by the transmitter, the receiver comprising: a first electrode plate set formed on the substrate; and a second electrode plate set formed above the first electrode plate set, wherein at least one dielectric material are respectively disposed between the substrate and the first electrode plate set and between the first electrode plate set and the second electrode plate set, wherein a difference is generated between the first electrode plate set and the second electrode plate set through applying bias voltage.