# US 10,483,423 B2 · Quantum dot photodetector apparatus and associated methods > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,423 B2 - Document ID: US10483423B2 - Status: Granted - Kind: B2 - Application number: 16/165,248 - Filed: 2018-10-19 - Published: 2019-02-14 - Granted: 2019-11-19 - Earliest claimed: 2016-06-02 - Assignees: Emberion Oy - Applicants: Emberion Oy - Inventors: Richard White; Alexander Bessonov; Piers Andrew; Mark Allen; Elisabetta Spigone; Michael Robert Astley - Web page: https://patentgrep.com/patent/US10483423B2 ## CPC - H10F 30/287: {the devices having PN heterojunction gates} - H10F 30/2823: {the devices being conductor-insulator-semiconductor devices, e.g. diodes or charge-coupled devices [CCD] (Insulated-gate field-effect transistors H10F30/282)} - H10F 77/1433: {Quantum dots} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract An apparatus comprises a layer of channel material, source and drain electrodes configured to enable a flow of electrical current through the channel material, and a layer of quantum dot material configured to generate electron-hole pairs on exposure to electromagnetic radiation to produce a detectable change in the electrical current indicative of one or more of the presence and magnitude of the electromagnetic radiation. The layer of quantum dot material is positioned between the channel material and a layer of conductive material. The layers of channel and conductive material have work functions such that respective built-in electric fields are created at the interfaces between the layer of quantum dot material and the channel and conductive material. The electric field at each interface acts in the same direction to promote separation of the electrons and holes of the electron-hole pairs to facilitate production of the detectable change in electrical current. ## Claims ### Claim 1 An apparatus comprising a layer of channel material, source and drain electrodes configured to enable a flow of electrical current through the layer of channel material, and a layer of quantum dot material configured to generate electron-hole pairs on exposure to incident electromagnetic radiation to produce a detectable change in the electrical current which is indicative of one or more of the presence and magnitude of the electromagnetic radiation, wherein the layer of quantum dot material is positioned between the layer of channel material and a layer of conductive material, and wherein the layers of channel and conductive material have work functions such that respective built-in electric fields are created at the interfaces between the layer of quantum dot material and the layers of channel and conductive material, the built-in electric field at each interface acting in the same direction to promote separation of the electrons and holes of the generated electron-hole pairs to facilitate production of the detectable change in electrical current. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein each built-in electric field extends across a depletion region of the respective interface, and wherein the layer of quantum dot material has a thickness of no more than the combined widths of the depletion regions such that an electric field is present throughout the thickness of the quantum dot layer. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the layer of conductive material is configured to be substantially transparent to the incident electromagnetic radiation to enable exposure of the layer of quantum dot material through the layer of conductive material. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the apparatus comprises a substrate configured to support the electrodes and layers of channel, quantum dot and conductive material, and wherein the substrate and layer of channel material are configured to be substantially transparent to the incident electromagnetic radiation to enable exposure of the layer of quantum dot material through the substrate and layer of channel material. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the layer of conductive material is configured to be substantially transparent to a predefined range of wavelengths of electromagnetic radiation and substantially opaque to wavelengths outside of this predefined range. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the layer of conductive material comprises a mesh having a periodicity configured to define the range of wavelengths. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the apparatus comprises a plurality of pixels each comprising respective source and drain electrodes and layers of channel, quantum dot and conductive material, and wherein a first subset of the plurality of pixels comprise a conductive material having a first work function, and a second subset of the plurality of pixels comprise a conductive material having a second work function. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein each pixel comprises a gate electrode configured to generate an electric field upon the application of a voltage thereto, and wherein the voltage applied to the gate electrode of the first subset of the plurality of pixels is different to the voltage applied to the gate electrode of the second subset of the plurality of pixels such that upon exposure to the incident electromagnetic radiation, the first and second subsets produce an increase and decrease in electrical current, respectively. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the layer of quantum dot material comprises one or more of an inorganic atomic passivant and an additional light-sensitive material configured to increase the charge carrier mobility of the layer of quantum dot material. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the layer of conductive material comprises a chemical dopant configured to vary the work function of the layer of conductive material. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the apparatus comprises an interfacial material at the interface between the layers of quantum dot and conductive material configured to introduce an electric dipole to vary the work function of the layer of conductive material. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein the respective lateral dimensions of the layers of quantum dot and conductive material are configured such that the layer of quantum dot material prevents physical contact between the layer of conductive material and one or more of the source and drain electrodes. ### Claim 13 (depends on 1) The apparatus of claim 1, wherein the layer of conductive material has a different work function than the layer of channel material. ### Claim 14 A method of detecting incident electromagnetic radiation using an apparatus, the apparatus comprising a layer of channel material, source and drain electrodes configured to enable a flow of electrical current through the layer of channel material, and a layer of quantum dot material configured to generate electron-hole pairs on exposure to incident electromagnetic radiation to produce a detectable change in the electrical current which is indicative of one or more of the presence and magnitude of the electromagnetic radiation, wherein the layer of quantum dot material is positioned between the layer of channel material and a layer of conductive material, and wherein the layers of channel and conductive material have work functions such that respective built-in electric fields are created at the interfaces between the layer of quantum dot material and the layers of channel and conductive material, the built-in electric field at each interface acting in the same direction to promote separation of the electrons and holes of the generated electron-hole pairs to facilitate production of the detectable change in electrical current, the method comprising determining one or more of the presence and magnitude of the incident electromagnetic radiation based on a detected change in the flow of electrical current through the layer of channel material. ### Claim 15 A method of making an apparatus, the method comprising: forming a layer of channel material; forming source and drain electrodes configured to enable a flow of electrical current through the layer of channel material; forming a layer of quantum dot material on top of the layer of channel material configured to generate electron-hole pairs on exposure to incident electromagnetic radiation to produce a detectable change in the electrical current which is indicative of one or more of the presence and magnitude of the electromagnetic radiation; and forming a layer of conductive material on top of the layer of quantum dot material such that the layer of quantum dot material is positioned between the layer of channel material and the layer of conductive material, the layers of channel and conductive material having work functions such that respective built-in electric fields are created at the interfaces between the layer of quantum dot material and the layers of channel and conductive material, the built-in electric field at each interface acting in the same direction to promote separation of the electrons and holes of the generated electron-hole pairs to facilitate production of the detectable change in electrical current.