# US 10,483,369 B2 · Methods of forming replacement gate structures on transistor devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,369 B2 - Document ID: US10483369B2 - Status: Granted - Kind: B2 - Application number: 15/797,723 - Filed: 2017-10-30 - Published: 2019-05-02 - Granted: 2019-11-19 - Earliest claimed: 2017-10-30 - Assignees: Globalfoundries Inc. - Applicants: GLOBALFOUNDRIES Inc. - Inventors: Haigou Huang; Xusheng Wu; Jinsheng Gao - Web page: https://patentgrep.com/patent/US10483369B2 ## CPC - H10D 64/017: {using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes} - H10D 30/024: {of fin field-effect transistors [FinFET]} - H10D 84/0135: {Manufacturing their gate conductors} - H10D 84/014: {the gate conductors having different materials or different implants} - H10D 84/0158: {the components including FinFETs} - H10D 84/0177: {the gate conductors having different materials or different implants} - H10D 84/038: {using silicon technology, e.g. SiGe} - H10D 84/83135: {the IGFETs characterised by having different gate conductor materials or different gate conductor implants} - H10D 84/834: {comprising FinFETs} - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, the sacrificial gate structure comprising a sacrificial gate insulation layer and a multi-layer sacrificial gate electrode structure, removing the sacrificial gate structure to form a replacement gate cavity, and forming a replacement gate structure in the replacement gate cavity. ## Claims ### Claim 1 A method, comprising: forming a continuous line-type sacrificial gate structure above a semiconductor substrate by performing a method that comprises: forming a sacrificial gate insulation layer above said semiconductor substrate; forming a first sacrificial gate electrode material layer above said sacrificial gate insulation layer; and forming a second sacrificial gate electrode material layer above said first sacrificial gate electrode material layer; after forming said continuous line-type sacrificial gate structure, removing a portion of said second sacrificial gate electrode material layer and removing a portion of said first sacrificial gate electrode material layer so as to thereby form a first opening positioned above said sacrificial gate insulation layer, wherein said first opening extends through an entirety of said second sacrificial gate electrode material layer of said continuous line-type sacrificial gate structure and at least partially through said first sacrificial gate electrode material layer of said continuous line-type sacrificial gate structure; forming an insulating gate separation structure in said first opening; removing materials of said sacrificial gate structure on opposite sides of said insulating gate separation structure to form first and second replacement gate cavities on said opposite sides of said insulating gate separation structure; and forming first and second replacement gate structures in said first and second replacement gate cavities, respectively. ### Claim 2 (depends on 1) The method of claim 1, wherein said first and second replacement gate structures comprise a same material. ### Claim 3 (depends on 1) The method of claim 1, wherein removing said portion of said second sacrificial gate electrode material layer and removing said portion of said first sacrificial gate electrode material layer comprises: performing a first etching process to selectively remove said portion of said second sacrificial gate electrode material layer selectively relative to said first sacrificial gate electrode material layer to form a second layer opening that extends through an entirety of said second sacrificial gate electrode material layer and exposes an upper surface of said first sacrificial gate electrode material layer; and performing a second etching process to selectively remove said portion of said first sacrificial gate electrode material layer selectively relative to said sacrificial gate insulation layer to form a first layer opening that extends through an entirety of said first sacrificial gate electrode material layer and exposes an upper surface of said sacrificial gate insulation layer. ### Claim 4 (depends on 3) The method of claim 3, wherein performing said second etching process comprises performing an isotropic etching process such that a portion of said first layer opening extends under a portion of said second sacrificial gate electrode material layer, and wherein said insulating gate separation structure has an inverted T-shaped configuration. ### Claim 5 (depends on 3) The method of claim 3, wherein performing said second etching process comprises performing an anisotropic etching process such that said first layer opening does not extend under a portion of said second sacrificial gate electrode layer, and wherein said insulating gate separation structure has an substantially uniform width from a top of said insulating gate separation structure to a bottom of said insulating gate separation structure. ### Claim 6 (depends on 1) The method of claim 1, wherein removing said portion of said second sacrificial gate electrode material layer and removing said portion of said first sacrificial gate electrode material layer comprises: performing a first etching process to selectively remove said portion of said second sacrificial gate electrode material layer selectively relative to said first sacrificial gate electrode material layer to form a second layer opening that extends through an entirety of said second sacrificial gate electrode material layer and exposes an upper surface of said first sacrificial gate electrode material layer; and performing a second etching process to selectively remove said portion of said first sacrificial gate electrode material layer so as to form a first layer recess within said first sacrificial gate electrode layer, said first layer recess extending only partially through said first sacrificial gate electrode material layer; and forming an internal sidewall spacer within said second layer opening and said first layer recess, said internal sidewall spacer covering sidewall surfaces of said second layer opening and said first layer recess and exposing a bottom surface of said first layer recess. ### Claim 7 (depends on 6) The method of claim 6, further comprising performing an isotropic etching process on said exposed bottom surface of said first layer recess formed in said first sacrificial gate electrode material layer so as to form a first layer opening that extends through said first sacrificial gate electrode material layer and exposes an upper surface of said sacrificial gate insulation layer, wherein said first layer opening extends under at least a portion of said internal sidewall spacer and wherein said insulating gate separation structure has an inverted T-shaped configuration. ### Claim 8 (depends on 6) The method of claim 6, further comprising performing an anisotropic etching process on said exposed bottom surface of said first layer recess formed in said first sacrificial gate electrode material layer and exposes an upper surface of said sacrificial gate insulation layer, wherein said first layer opening does not extend under said internal sidewall spacer, and wherein said insulating gate separation structure has a substantially uniform width from a top of said insulating gate separation structure to a bottom of said insulating gate separation structure. ### Claim 9 (depends on 1) The method of claim 1, wherein said insulating gate separation structure is formed in direct contact with an upper surface of said sacrificial gate insulation layer positioned below said first opening. ### Claim 10 (depends on 1) The method of claim 1, wherein forming said continuous line-type sacrificial gate structure further comprises: forming a gate cap material layer above said second sacrificial gate electrode material layer; patterning said gate cap material layer, said patterned gate cap material layer defining a size and position of said continuous line-type sacrificial gate structure; and performing one or more etching processes to define said continuous line-type sacrificial gate structure using said patterned gate cap material layer as an etch mask. ### Claim 11 (depends on 1) The method of claim 1, further comprising, prior to forming said first opening, forming a sidewall spacer on said continuous line-type sacrificial gate structure.