# US 10,483,340 B2 · Transistor array panel, including a source connecting member and a drain connecting member manufacturing method thereof, and display device including the same

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- Number: US 10,483,340 B2
- Document ID: US10483340B2
- Status: Granted
- Kind: B2
- Application number: 15/481,273
- Filed: 2017-04-06
- Published: 2017-10-12
- Granted: 2019-11-19
- Earliest claimed: 2016-04-07
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Hyuk Soon Kwon
- Web page: https://patentgrep.com/patent/US10483340B2

## CPC

- H10D 86/423: {comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO}
- H10D 30/6729: {characterised by the electrodes}
- H10D 30/673: {characterised by the shapes, relative sizes or dispositions of the gate electrodes}
- H10D 86/40: characterised by multiple TFTs
- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/60: wherein the TFTs are in active matrices
- H10K 59/1213: {the pixel elements being TFTs}
- H10K 59/131: Interconnections, e.g. wiring lines or terminals
- H10K 71/166: {using selective deposition, e.g. using a mask}
- H10K 71/00: Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K 71/231: {by etching of existing layers}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A transistor display panel according to an exemplary embodiment includes: a substrate; a first transistor disposed on the substrate; and a pixel electrode connected to the first transistor, wherein the first transistor includes a lower electrode disposed on the substrate, a first semiconductor overlapping the lower electrode, a first insulating layer covering the first semiconductor, a first gate electrode disposed on the first insulating layer and overlapping the first semiconductor, and a first source connecting member and a first drain connecting member disposed on the same layer as the first gate electrode and connected to the first semiconductor, wherein the first gate electrode is formed as a triple layer, the first source connecting member and first drain connecting member are formed as a double layer, and the first source connecting member is connected to the lower electrode.

## Claims

### Claim 1

A transistor display panel comprising:
a substrate;
a first transistor disposed on the substrate; and
a pixel electrode connected to the first transistor,
wherein the first transistor includes:
a first semiconductor on the substrate,
a first insulating layer covering the first semiconductor,
a first gate electrode on the first insulating layer overlapping the first semiconductor,
a first connecting member disposed on the first insulating layer and connected to the first semiconductor, the first connecting member including a first source connecting member and a first drain connecting member,
a second insulating layer covering the first gate electrode, the first source connecting member and the first drain connecting member, and
a first source electrode and a first drain electrode disposed on the second insulating layer,
wherein the first gate electrode includes at least three layers and the first connecting member includes at least two layers,
wherein the first source electrode is connected to the first source connecting member,
wherein the first semiconductor includes a first channel, and a first source region and a first drain region disposed at respective sides of the first channel, and
wherein the first source region and the first drain region are respectively connected to the first source connecting member and the first drain connecting member.

### Claim 2 (depends on 1)

The transistor display panel of claim 1, wherein
the first gate electrode includes a first main gate layer, and a first upper gate layer and a first lower gate layer respectively disposed on and under the first main gate layer.

### Claim 3 (depends on 2)

The transistor display panel of claim 2, wherein
the first source connecting member includes a first main source connecting layer and a first lower source connecting layer disposed thereunder, and
the first drain connecting member includes a first main drain connecting layer and a first lower drain connecting layer disposed thereunder.

### Claim 4 (depends on 3)

The transistor display panel of claim 3, wherein
the first main source connecting layer and the first main drain connecting layer are disposed on the same layer as the first main gate layer.

### Claim 5 (depends on 1)

The transistor display panel of claim 1, further comprising
a lower electrode under the first semiconductor and connected to the first source connecting member,
a buffer layer covering the lower electrode,
wherein the first source connecting member is connected to the lower electrode through an opening of the buffer layer and the first insulating layer.

### Claim 6 (depends on 1)

The transistor display panel of claim 1, further comprising:
a scan line disposed on the substrate;
a data line crossing the scan line; and
a second transistor connected to the scan line and the data line,
wherein the second transistor includes
a second semiconductor disposed on the same layer as the first semiconductor,
a second gate electrode overlapping the second semiconductor, and
a second source connecting member and a second drain connecting member disposed on the same layer as the second gate electrode and connected to the second semiconductor,
wherein the second gate electrode includes at least three layers, and the first source connecting member and the first drain connecting member include at least two layers.

### Claim 7 (depends on 6)

The transistor display panel of claim 6, wherein
the first semiconductor and the second semiconductor include an oxide semiconductor material.

### Claim 8

A display device comprising:
a substrate;
a first transistor disposed on the substrate; and
a light-emitting diode element connected to the first transistor,
wherein the first transistor includes
a lower electrode disposed on the substrate,
a first semiconductor overlapping the lower electrode,
a first insulating layer covering the first semiconductor,
a first gate electrode disposed on the first insulating layer and overlapping the first semiconductor,
a first connecting member disposed on the first insulating layer and connected to the first semiconductor, the first connecting member including a first source connecting member and a first drain connecting member,
a second insulating layer covering the first gate electrode, the first source connecting member and the first drain connecting member, and
a first source electrode and a first drain electrode disposed on the second insulating layer,
wherein the first gate electrode includes at least three layers, the first connecting member includes at least two layers, and the first connecting member is connected to the lower electrode,
wherein the first source electrode is connected to the first source connecting member,
wherein the first semiconductor includes a first channel, and a first source region and a first drain region disposed at respective sides of the first channel, and
wherein the first source region and the first drain region are respectively connected to the first source connecting member and the first drain connecting member.

### Claim 9 (depends on 8)

The display device of claim 8, wherein:
the first gate electrode includes a first main gate layer, and a first upper gate layer and a first lower gate layer respectively disposed on and under the first main gate layer;
the first source connecting member includes a first main source connecting layer and a first lower source connecting layer disposed thereunder; and
the first drain connecting member includes a first main drain connecting layer and a first lower drain connecting layer disposed thereunder.

### Claim 10 (depends on 9)

The display device of claim 9, further comprising:
a scan line disposed on the substrate;
a data line crossing the scan line; and
a second transistor connected to the scan line and the data line,
wherein the second transistor includes:
a second semiconductor disposed on the same layer as the first semiconductor,
a second gate electrode overlapping the second semiconductor, and
a second source connecting member and a second drain connecting member disposed on the same layer as the second gate electrode and connected to the second semiconductor, and
wherein the second gate electrode includes at least three layers, and the first source connecting member and the first drain connecting member include at least two layers.

### Claim 11 (depends on 10)

The display device of claim 10, wherein
the first semiconductor and the second semiconductor include an oxide semiconductor material.

### Claim 12 (depends on 8)

The display device of claim 8, wherein
the light-emitting diode element includes an organic light emitting diode.
