# US 10,483,316 B2 · Fabrication and operation of multi-function flexible radiation detection systems

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- Number: US 10,483,316 B2
- Document ID: US10483316B2
- Status: Granted
- Kind: B2
- Application number: 15/404,978
- Filed: 2017-01-12
- Published: 2017-07-13
- Granted: 2019-11-19
- Earliest claimed: 2016-01-13
- Assignees: mPower Technology, Inc.
- Applicants: mPower Technology, Inc.
- Inventors: Murat Okandan; Markku Juhani Koskelo
- Web page: https://patentgrep.com/patent/US10483316B2

## CPC

- H10F 39/1892: {Direct radiation image sensors}
- G01T 1/20181: {Stacked detectors, e.g. for measuring energy and positional information (using a combination of different types of scintillation detectors, e.g. phoswich detectors, G01T1/2008)}
- G01T 1/24: with semiconductor detectors
- G01T 1/241: {Electrode arrangements, e.g. continuous or parallel strips or the like}
- G01T 3/08: with semiconductor detectors
- G01T 7/00: Details of radiation-measuring instruments
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00)

## Abstract

Curved, flexible arrays of radiation detectors are formed by using standard silicon semiconductor processing materials and techniques and additional functionalization through integration of conversion and shielding materials. The resulting flexible arrays can be handled, integrated, further functionalized and deployed for a wide variety of applications where conventional sensors do not provide the desired functionality, form factors and/or reliability. The arrays can be stacked and include multiple types and thicknesses of conversion layers, enabling the detector to simultaneously detect multiple radiation types, and perform complex, simultaneous functions such as energy discrimination, spectroscopy, directionality detection, and particle trajectory tracking of incident radiation.

## Claims

### Claim 1

A radiation detector comprising:
an array of singulated microscale semiconductor sensors disposed on a flexible substrate; and
at least one type of conversion layer;
wherein said conversion layer is sufficiently thin to enable the detector to flex in accordance with said substrate;
wherein the radiation detector is formable into an arbitrary three-dimensional shape; and
wherein the radiation detector comprises a rigid backer to maintain said shape of the radiation detector.

### Claim 2 (depends on 1)

The radiation detector of claim 1 wherein said conversion layer is disposed on top of each sensor, on one or more sides of each sensor, or both on top and on one or more sides of each sensor.

### Claim 3 (depends on 1)

The radiation detector of claim 1 wherein said sensors comprise solar cells, photodiodes, or one or more p-n junctions.

### Claim 4 (depends on 3)

The radiation detector of claim 3 wherein said sensors detect photons or electrons produced by said conversion layer when said conversion layer is illuminated by incident radiation.

### Claim 5 (depends on 1)

The radiation detector of claim 1 comprising different types and/or thicknesses of conversion layers.

### Claim 6 (depends on 5)

The radiation detector of claim 5 for simultaneously detecting two or more types of radiation.

### Claim 7 (depends on 6)

The radiation detector of claim 6 wherein said types of radiation are selected from the group consisting of x-rays, gamma rays, microwaves, neutrons, alpha particles, beta particles, and cosmic radiation.

### Claim 8 (depends on 5)

The radiation detector of claim 5 for performing energy discrimination and/or spectroscopy of incident radiation.

### Claim 9 (depends on 1)

The radiation detector of claim 1 comprising multiple stacked substrates and sensor arrays.

### Claim 10 (depends on 9)

The radiation detector of claim 9 for detecting directionality and/or tracking particle trajectories of incident radiation.

### Claim 11 (depends on 9)

The radiation detector of claim 9 wherein said detector generates multiple signals for each incident radiation particle or photon.

### Claim 12 (depends on 1)

The radiation detector of claim 1 comprising integrated circuitry for performing one or more functions on signals produced by said detectors, said functions selected from the group consisting of pre-conditioning, amplification, filtering, and processing.

### Claim 13 (depends on 12)

The radiation detector of claim 12 wherein said integrated circuitry is embedded with each said sensor.

### Claim 14 (depends on 13)

The radiation detector of claim 13 wherein said one or more functions are performed without said signals having to first be transmitted to an edge circuit.

### Claim 15 (depends on 12)

The radiation detector of claim 12 wherein said integrated circuitry is manufactured in the same process as a process used to manufacture said sensors.

### Claim 16 (depends on 12)

The radiation detector of claim 12 wherein said integrated circuitry is added to said detector after said sensors are manufactured.

### Claim 17 (depends on 1)

The radiation detector of claim 1 wherein flexing of said conversion layer in accordance with flexing of said substrate does not result in substantial loss of functionality.