# US 10,483,309 B1 · Image sensors with multipart diffractive lenses

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- Number: US 10,483,309 B1
- Document ID: US10483309B1
- Status: Granted
- Kind: B1
- Application number: 16/125,479
- Filed: 2018-09-07
- Granted: 2019-11-19
- Earliest claimed: 2018-09-07
- Assignees: Semiductor Components Industries, LLC
- Applicants: Semiconductor Components Industries, LLC
- Inventors: Byounghee Lee
- Web page: https://patentgrep.com/patent/US10483309B1

## CPC

- H10F 39/8063: {Microlenses}
- G02B 3/0037: {characterized by the distribution or form of lenses}
- G02B 3/0068: {arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements (G02B5/1885, G02B17/002, G02B30/27 take precedence)}
- H10F 39/18: Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F 39/182: {Colour image sensors}
- H10F 39/199: {Back-illuminated image sensors}
- H10F 39/8053: {Colour filters}
- H10F 39/806: {Optical elements or arrangements associated with the image sensors}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

An image sensor may include an array of imaging pixels. Each imaging pixel may have a photosensitive area that is covered by a respective multipart diffractive lens to focus light onto the photosensitive area. The multipart diffractive lenses may have multiple portions with different indices of refraction. The portions of the diffractive lenses closer to the center of the diffractive lenses may have higher indices of refraction to focus light. Alternatively, the portions of the diffractive lenses closer to the center of the diffractive lenses may have lower indices of refraction to defocus light. The multipart diffractive lenses may have stacked layers with the same refractive indices but different widths.

## Claims

### Claim 1

An image sensor comprising a plurality of imaging pixels, wherein each imaging pixel of the plurality of imaging pixels comprises:
a photodiode; and
a diffractive lens formed over the photodiode,
wherein the diffractive lens has an edge portion with a first refractive index and a center portion with a second refractive index that is different than the first refractive index and wherein the edge portion is adjacent a solid material with a third refractive index that is different than the first and second refractive indices.

### Claim 2 (depends on 1)

The image sensor defined in claim 1, wherein the edge portion laterally surrounds the center portion.

### Claim 3 (depends on 1)

The image sensor defined in claim 1, wherein the third refractive index is less than the first refractive index and wherein the second refractive index is greater than the first refractive index.

### Claim 4 (depends on 1)

The image sensor defined in claim 1, wherein each diffractive lens further comprises a third portion with a fourth refractive index that is different than the first, second, and third refractive indices.

### Claim 5

An image sensor comprising a plurality of imaging pixels, wherein each imaging pixel of the plurality of imaging pixels comprises:
a photodiode; and
a diffractive lens formed over the photodiode, wherein the diffractive lens has a first portion with a first refractive index, a second portion with a second refractive index, and a third portion with a third refractive index, wherein the second portion is interposed between the first portion and the third portion and wherein the second refractive index is less than the first refractive index and greater than the first refractive index.

### Claim 6 (depends on 1)

The image sensor defined in claim 1, wherein the diffractive lens of each imaging pixel has a planar upper surface and a planar lower surface.

### Claim 7 (depends on 1)

The image sensor defined in claim 1, wherein no microlens with a curved surface is formed over the diffractive lens of each pixel.

### Claim 8 (depends on 1)

The image sensor defined in claim 1, wherein each imaging pixel of the plurality of imaging pixels further comprises a color filter element interposed between the photodiode and the diffractive lens of that imaging pixel.

### Claim 9

An image sensor comprising a plurality of imaging pixels, wherein each imaging pixel of the plurality of imaging pixels comprises:
a photosensitive area;
a color filter element formed over the photosensitive area; and
a multipart diffractive lens formed over the color filter element that focuses incident light on the photosensitive area, wherein the multipart diffractive lens comprises a first layer and a second layer formed over the first layer, wherein the first layer has a first width, wherein the second layer has a second width that is greater than the first width, and wherein the first and second layers have the same refractive index.

### Claim 10 (depends on 9)

The image sensor defined in claim 9, wherein the first and second layers are surrounded by a material with an additional refractive index that is less than the refractive index of the first and second layers.

### Claim 11 (depends on 9)

The image sensor defined in claim 9, wherein no microlens with a curved surface is formed over the multipart diffractive lens of each pixel.

### Claim 12 (depends on 9)

The image sensor defined in claim 9, wherein the first layer has a first uniform thickness and wherein the second layer has a second uniform thickness.

### Claim 13 (depends on 4)

The image sensor defined in claim 4, wherein the third portion is interposed between the center portion and the edge portion.
