# US 10,483,285 B2 · Element substrate and display device

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- Number: US 10,483,285 B2
- Document ID: US10483285B2
- Status: Granted
- Kind: B2
- Application number: 15/604,663
- Filed: 2017-05-25
- Published: 2017-12-07
- Granted: 2019-11-19
- Earliest claimed: 2016-06-01
- Assignees: Innolux Corporation
- Applicants: Innolux Corporation
- Inventors: Wang-Cheng Chung
- Web page: https://patentgrep.com/patent/US10483285B2

## CPC

- H10D 86/60: wherein the TFTs are in active matrices
- G02F 1/1368: in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)}
- H10D 30/6729: {characterised by the electrodes}
- H10D 30/6755: {Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate}
- H10D 30/6757: {characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile (TFTs having channel structures for preventing kink or snapback effects H10D30/6708; TFTs having lightly-doped source or drain extensions H10D30/6715)}
- H10D 64/62: Electrodes ohmically coupled to a semiconductor
- H10D 86/423: {comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO}
- H10K 59/1213: {the pixel elements being TFTs}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

An element substrate and a display device are provided. The element substrate includes a substrate and an element layer, and the element layer is disposed on the substrate, wherein the element layer includes a plurality of active elements, each of the active elements includes a gate, a gate insulating layer, a metal oxide semiconductor layer, a source and a drain. The gate is disposed on the substrate. The gate insulating layer is disposed on the substrate and overlaps the gate. The metal oxide semiconductor layer is disposed on the gate insulating layer. The source and the drain are disposed on the metal oxide semiconductor layer, wherein the source and the drain respectively include a first layer and a second layer, the first layer is between the second layer and the metal oxide semiconductor layer, and the material of the first layer includes titanium nitride. Thereby, during the process of manufacturing the active elements, titanium atoms are not easy to diffuse into the metal oxide semiconductor layer so that the element substrate and the display device have good reliability.

## Claims

### Claim 1

An element substrate, comprising
a substrate; and
an element layer disposed on the substrate, wherein the element layer includes a plurality of active elements, the plurality of active elements respectively comprises:
a gate disposed on the substrate;
a gate insulating layer disposed on the substrate and overlapping the gate;
a metal oxide semiconductor layer disposed on the gate insulating layer; and
a source and a drain disposed on the metal oxide semiconductor layer,
wherein the metal oxide semiconductor layer has a first portion and a second portion, the source and the drain overlap the first portion, the source and the drain do not overlap the second portion, the first portion has a first thickness, the second portion has a second thickness, and the first thickness is greater than the second thickness,
wherein a difference between the first thickness and the second thickness is greater than or equal to 200 Å and less than or equal to 600 Å, and
wherein the source and the drain respectively comprise a first layer and a second layer, the first layer is disposed between the second layer and the metal oxide semiconductor layer, a material of the first layer comprises titanium nitride, a distance is between an edge of the first layer and an edge of the second layer, and the distance is greater than or equal to 0.1 μm and less than or equal to 0.3 μm.

### Claim 2 (depends on 1)

The element substrate as claimed in claim 1, wherein the titanium nitride is TiNx, and x is greater than or equal to 0.05 and less than or equal to 1.5.

### Claim 3 (depends on 1)

The element substrate as claimed in claim 1, wherein the source and the drain respectively further comprise a third layer, the second layer is disposed between the first layer and the third layer, a material of the second layer comprises at least one of aluminum and copper, a material of the third layer comprises at least one of molybdenum nitride, molybdenum and titanium.

### Claim 4

A display device, comprising:
an element substrate comprising a substrate and an element layer, wherein the element layer is disposed on the substrate, the element layer comprises a plurality of active elements, the plurality of active elements respectively comprises:
a gate disposed on the substrate;
a gate insulating layer disposed on the substrate and overlapping the gate;
a metal oxide semiconductor layer disposed on the gate insulating layer;
a source and a drain disposed on the metal oxide semiconductor layer,
wherein the metal oxide semiconductor layer has a first portion and a second portion, the source and the drain overlap the first portion, the source and the drain do not overlap the second portion, the first portion has a first thickness, the second portion has a second thickness, the first thickness is greater than the second thickness,
wherein a difference between the first thickness and the second thickness is greater than or equal to 200 Å and less than or equal to 600 Å, and
wherein the source and the drain respectively comprise a first layer and a second layer, the first layer is disposed between the second layer and the metal oxide semiconductor layer, a material of the first layer comprises titanium nitride, a distance is between an edge of the first layer and an edge of the second layer, and the distance is greater than or equal to 0.1 μm and less than or equal to 0.3 μm;
an opposing substrate disposed relative to the element substrate; and
a display layer disposed between the element substrate and the opposing substrate.

### Claim 5 (depends on 4)

The display device as claimed in claim 4, wherein the titanium nitride is TiNx, and x is greater than or equal to 0.05 and less than or equal to 1.5.

### Claim 6 (depends on 4)

The display device as claimed in claim 4, wherein the source and the drain of the element substrate respectively further comprise a third layer, the second layer is disposed between the first layer and the third layer, a material of the second layer comprises at least one of aluminum and copper, a material of the third layer comprises at least one of molybdenum nitride, molybdenum and titanium.