# US 10,483,206 B2 · Device comprising nanostructures and method of manufacturing thereof

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- Number: US 10,483,206 B2
- Document ID: US10483206B2
- Status: Granted
- Kind: B2
- Application number: 16/164,476
- Filed: 2018-10-18
- Published: 2019-08-22
- Granted: 2019-11-19
- Earliest claimed: 2011-06-29
- Assignees: Waqas Khalid
- Applicants: Waqas Khalid
- Inventors: Waqas Khalid
- Web page: https://patentgrep.com/patent/US10483206B2

## CPC

- H10W 20/4462: {Carbon or carbon-containing materials, e.g. graphene}
- H01J 1/3044: {Point emitters}
- H01J 9/025: {of field emission cathodes}
- H10W 20/064: {by modifying the conductivity of conductive parts, e.g. by alloying}
- H10W 20/49: Adaptable interconnections, e.g. fuses or antifuses
- Y02B 10/10: Photovoltaic [PV]
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- Y02B: CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS

## Abstract

A method for manufacturing of a device (300, 410-412) comprising a substrate (201) comprising a plurality of sets of nanostructures (207) arranged on the substrate, wherein each of the sets of nanostructures is individually electrically addressable, the method comprising the steps of: providing (101) the substrate (200) having a first (202) face, the substrate having an insulating layer (210) comprising an insulating material arranged on the first face (202) of the substrate forming an interface (203) between the insulating layer and the substrate; providing (102) a plurality of stacks (204) on the substrate, the stacks being spaced apart from each other, wherein each stack comprises a first conductive layer (205) comprising a first conductive material and a second conductive layer (206) comprising a second conductive material different from the first material, the second conductive layer being arranged on the first conductive layer for catalyzing nanostructure growth; heating (103) the substrate having the plurality of stacks arranged thereon in a reducing atmosphere to enable formation of nanostructures on the second conductive material; heating (103) the substrate having the plurality of stacks (204) arranged thereon in an atmosphere such that nanostructures (207) are formed on the second layer (206); wherein the insulating material and the first conductive material are selected such that during the heating steps, the first conductive material interacts with the insulating material to form an electrically conductive portion (208) within the insulating layer (201) below each of the stacks (204), wherein the electrically conductive por tion comprises a mixture of the first conductive material and the insulating material and/or reaction adducts thereof.

## Claims

### Claim 1

A method for manufacturing of a device comprising a first substrate comprising a plurality of sets of nanostructures arranged on said first substrate, wherein each of said sets of nanostructures is individually electrically addressable, said method comprising the steps of:
providing a substrate having a first face, said substrate having an insulating layer comprising an insulating material arranged on said first face of said substrate forming an interface between said insulating layer and said substrate;
providing a plurality of stacks on said first substrate, said stacks being spaced apart from each other, wherein each stack comprises a first conductive layer comprising a first conductive material and a second conductive layer comprising a second conductive material different from said first material, said second conductive layer being arranged on said first conductive layer for catalyzing nanostructure growth; heating said first substrate having said plurality of stacks arranged thereon in a reducing atmosphere to enable formation of nanostructures on said second conductive material;
heating said first substrate having said plurality of stacks arranged thereon in an atmosphere such that nanostructures are formed on said second layer; wherein said insulating material and said first conductive material are selected such that during said heating steps, said first conductive material interacts with said insulating material to form an electrically conductive portion within said insulating layer below each of said stacks, wherein said electrically conductive portion comprises a mixture of said first conductive material and said insulating material and/or reaction adducts thereof.

### Claim 2 (depends on 1)

The method according to claim 1, wherein said first material and/or said insulating material are chosen such that a diffusion of said first material into said first substrate and/or a chemical reaction between said first material and said insulating material is achievable by heating said first substrate having said stacks arranged thereon to within a temperature interval of from 100° C. to 1000° C.

### Claim 3 (depends on 2)

The method according to claim 2, wherein said temperature interval is preferably between 500° C. and 1000° C.

### Claim 4 (depends on 1)

The method according to claim 1, wherein said electrically conductive portion is a path formed through said insulating layer such that each of said set of nanostructures is electrically connectable via each of said electrical connection junctions.

### Claim 5 (depends on 1)

The method according to claim 1, wherein said method further comprises the step of providing a connecting structure configured to provide a first electrical connection to each of said sets of nanostructures via a respective one of said electrically conductive portions.

### Claim 6 (depends on 1)

The method according to claim 1, wherein said stacks comprises an intermediate layer arranged in between said second and said first layer, wherein said intermediate layer comprises an electrically conductive and/or semi-conductive material, and wherein each of said intermediate layer is electrically connectable to a power source or a sensing device, thereby providing a second individually addressable electrical connection to each set of nanostructures.

### Claim 7 (depends on 1)

The method according to claim 1, wherein said first conductive material comprises a metal.

### Claim 8 (depends on 1)

The method according to claim 1, wherein said first conductive material comprises Al or Au.

### Claim 9 (depends on 1)

The method according to claim 1, wherein said insulating material comprises at least one of SiO2 and Si3N4.