# US 10,483,169 B2 · FinFET cut-last process using oxide trench fill

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- Number: US 10,483,169 B2
- Document ID: US10483169B2
- Status: Granted
- Kind: B2
- Application number: 15/280,703
- Filed: 2016-09-29
- Published: 2018-03-29
- Granted: 2019-11-19
- Earliest claimed: 2016-09-29
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Yen-Chun Huang; Chih-Tang Peng; Kuang-Yuan Hsu; Tai-Chun Huang; Tsu-Hsiu Perng; Tien-I Bao
- Web page: https://patentgrep.com/patent/US10483169B2

## CPC

- H10D 84/038: {using silicon technology, e.g. SiGe}
- H10D 84/0151: {Manufacturing their isolation regions}
- H10D 84/0158: {the components including FinFETs}
- H10D 84/8311: {the IGFETs characterised by having different channel structures}
- H10D 84/834: {comprising FinFETs}
- H10W 10/014: {using trench refilling with dielectric materials, e.g. shallow trench isolations}
- H10W 10/0145: {of trenches having shapes other than rectangular or V-shape (H10W10/0143 takes precedence)}
- H10W 10/17: formed using trench refilling with dielectric materials, e.g. shallow trench isolations
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10

## Abstract

A cut-last process for cutting fin segments of a FinFET structure on a substrate utilizes a two-step process. After the fins are formed, an oxide material is deposited in the trenches of the FinFET structure. The oxide material can be an STI oxide or a low-stress dummy gapfill material. A fin segment can be removed by an etchant and can leave a concave shaped (such as a u-shape or v-shape) portion of silicon at the bottom of the fin. Where the oxide material is an STI oxide, the void left by removing the fin can be filled with replacement STI oxide. Where the oxide material is a dummy gapfill material, the dummy gapfill material can be removed and replaced with an STI oxide or converted to an STI oxide and filled with replacement STI oxide before or after the conversion.

## Claims

### Claim 1

A method comprising:
etching a substrate to form fins and trenches;
filling the trenches with a first oxide, the first oxide having first material composition, the first material composition having a first stress characteristic;
etching a first fin to remove a first portion of the first fin, thereby forming a void; and
filling the void with a second oxide, the second oxide having a second material composition different than the first material composition, the second material composition having a second stress characteristic, wherein the second stress characteristic is greater than the first stress characteristic, the second oxide encapsulating a second portion of the first fin.

### Claim 2 (depends on 1)

The method of claim 1, wherein following the etching the first fin, an uppermost surface of the first fin is concave in cross-section view.

### Claim 3 (depends on 1)

The method of claim 1, wherein the first oxide is a dummy gapfill material with low-stress characteristics.

### Claim 4 (depends on 1)

The method of claim 1, further comprising:
following the etching the first fin, removing the first oxide.

### Claim 5 (depends on 4)

The method of claim 4, wherein filling the void with the second oxide includes depositing the second oxide in the trenches.

### Claim 6 (depends on 1)

The method of claim 1, further comprising:
following the etching the first fin, converting the first oxide into a third oxide, the third oxide having higher stress characteristics than the first oxide.

### Claim 7 (depends on 1)

The method of claim 1, wherein etching the first fin includes etching the first fin without etching the oxide.

### Claim 8 (depends on 1)

The method of claim 1, wherein the first stress is exhibited on a second fin and a third fin of the plurality of fins, wherein neither the first fin nor the second fin are adjacent to the first fin, wherein the second stress is exhibited on the second fin and the third fin.

### Claim 9

A method comprising:
etching a substrate to form a first plurality of semiconductor fins, a second plurality of semiconductor fins, and a plurality of trenches, wherein the first plurality of semiconductor fins are interspersed among the second plurality of semiconductor fins;
filling the trenches with a dummy gapfill oxide;
cutting a first fin of the first plurality of semiconductor fins by etching the first fin;
removing the dummy gapfill oxide, wherein following removing the dummy gapfill oxide, each of the second plurality of semiconductor fins has a respective first height protruding from the substrate as measured from a bottommost point of a respective adjacent trench of the plurality of trenches; and
depositing a shallow trench isolation (STI) oxide in the trenches and over the etched first fin, wherein following depositing the STI oxide each of the second plurality of semiconductor fins has the respective first height protruding from the substrate as measured from the same point of the respective adjacent trench of the plurality of trenches.

### Claim 10 (depends on 9)

The method of claim 9, wherein after the etching the first fin, the first fin has a topmost surface that is concave in cross-section view.

### Claim 11 (depends on 9)

The method of claim 9, wherein the cutting comprises exposing a cap layer over the first fin using a cutting pattern.

### Claim 12 (depends on 11)

The method of claim 11, wherein the cutting further comprises etching the first fin using the cutting pattern as a mask to remove a portion of the first fin.

### Claim 13 (depends on 9)

The method of claim 9, further comprising:
depositing a pad oxide layer on a silicon substrate;
depositing a silicon nitride layer on the pad oxide layer; and
patterning the pad oxide layer and silicon nitride layer using a photoresist and etch process.

### Claim 14 (depends on 9)

The method of claim 9, further comprising:
planarizing the STI oxide and fins to make an uppermost surface of the fins, except for the first fin, co-planar to an uppermost surface of the STI oxide.

### Claim 15 (depends on 9)

The method of claim 9, wherein the dummy gapfill oxide comprises a first material composition having a first stress characteristic, wherein the STI oxide comprises a second material composition having a second stress characteristic, the dummy gapfill oxide being different than the STI oxide, wherein the first stress characteristic is less than the second stress characteristic.

### Claim 16

A method comprising:
forming a plurality of fins and a plurality of trenches in a substrate, the fins being separated by the trenches;
depositing a dummy gapfill oxide in the trenches, the dummy gapfill oxide comprising a first material composition, the first material composition having a first stress characteristic which exhibits a first stress on sidewalls of the plurality of fins;
patterning the dummy gapfill oxide to expose a top portion of a first fin of the plurality of fins;
recessing the first fin to remove the first fin;
removing the dummy gapfill oxide to expose the trenches; and
filling the trenches with a shallow trench isolation (STI) oxide, the STI oxide comprising a second material composition different than the first material composition, the second material composition having a second stress characteristic which exhibits a second stress on the sidewalls of the plurality of fins, wherein the second stress is greater than the first stress, the STI oxide extending over and along sidewalls of the remaining portion of the first fin.

### Claim 17 (depends on 16)

The method of claim 16, further comprising:
following the recessing the first fin, removing the dummy gapfill oxide.

### Claim 18 (depends on 16)

The method of claim 16, wherein, after the recessing, the first fin has a topmost surface higher than a bottommost surface of an adjacent trench of the plurality of trenches.

### Claim 19 (depends on 16)

The method of claim 16, wherein, after the recessing, an entirety of a topmost surface of the first fin is higher than a bottommost surface of an adjacent trench of the plurality of trenches.

### Claim 20 (depends on 16)

The method of claim 16, wherein, after the recessing, the first fin has concave top surface in cross-sectional view.

### Claim 21 (depends on 16)

The method of claim 16, wherein the first stress is exhibited on a second fin and a third fin of the plurality of fins, wherein neither the first fin nor the second fin are adjacent to the first fin, wherein the second stress is exhibited on the second fin and the third fin.