# US 10,483,145 B2 · Wafer edge measurement and control > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,145 B2 - Document ID: US10483145B2 - Status: Granted - Kind: B2 - Application number: 15/727,105 - Filed: 2017-10-06 - Published: 2018-02-01 - Granted: 2019-11-19 - Earliest claimed: 2012-04-25 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Blake Koelmel - Web page: https://patentgrep.com/patent/US10483145B2 ## CPC - H10P 72/53: {using optical controlling means} - H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract Devices and methods are provided for positioning and/or rotating a substrate without solid contact, such as by floating the wafer on a thin layer of gas. Since there is no solid contact with components of a processing chamber, features on the wafer are used to determine wafer position and rotational speed. Closed loop control systems are provided with capacitive sensors to monitor the position of the edge of the wafer in a horizontal plane. Control systems may also monitor the position of a wafer feature as it rotates, such as a notch in the edge of the wafer. Because the presence of a notch can disrupt sensors facing the edge of the wafer, methods and devices to reduce or eliminate this disruption are also provided. ## Claims ### Claim 1 An apparatus for processing a substrate, comprising: a chamber body defining an inner volume; a substrate positioning assembly disposed in the inner volume, wherein the substrate positioning assembly is capable of positioning and rotating the substrate at least within a horizontal plane; a first capacitive sensor disposed in the inner volume, wherein the first capacitive sensor is positioned to detect a location of an edge of the substrate at a first edge location; a second capacitive sensor disposed in the inner volume, wherein the second capacitive sensor is positioned to detect the location of the edge of the substrate at a second edge location; a third capacitive sensor disposed in the inner volume at a position between the first and second capacitive sensors, wherein the third capacitive sensor is positioned to detect a vertical location of the substrate; and a controller coupled to the first, second, and third capacitive sensors, wherein the controller is programmed to determine a first time period when a non-uniform portion on the edge of the substrate passes through a field of view of the first capacitive sensor and to determine a second time period when the non-uniform portion passes through a field of view of the second capacitive sensor. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the first and second capacitive sensors are positioned at a 90 degree angle such that the first capacitive sensor measures the position of the substrate in the X direction and the second capacitive sensor measures the position of the substrate in the Y direction. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the third capacitive sensor is positioned between the first and second capacitive sensors on a same X-Y plane and the third capacitive sensor is positioned radially inwards such that the edge of the substrate is not within the field of view of the third capacitive sensor. ### Claim 4 (depends on 2) The apparatus of claim 2, further comprising: a support body, wherein the first, second, and third capacitive sensors are disposed in cut outs in the support body. ### Claim 5 (depends on 4) The apparatus of claim 4, wherein the support body includes nozzles for directing fluid flow towards the substrate. ### Claim 6 (depends on 5) The apparatus of claim 5, wherein the first set of actuators are flow control valves capable of controlling the amount of fluid being sent to nozzles in the support body. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the controller is programmed to determine the revolutions per minute (RPM) of the substrate based on measuring when the non-uniform portion on the outer diameter edge of the substrate passes through the respective fields of view of the first and second capacitive sensors. ### Claim 8 (depends on 1) The apparatus of claim 1, further comprising a rotation sensor coupled to the controller and positioned to monitor the position of the non-uniform portion on the edge of the substrate. ### Claim 9 (depends on 8) The apparatus of claim 8, wherein the rotation sensor comprises a camera. ### Claim 10 (depends on 8) The apparatus of claim 8, further comprising a first set of actuators coupled to the controller and disposed to control the position of the substrate in the X and Y directions. ### Claim 11 (depends on 10) The apparatus of claim 10, further comprising a second set of actuators coupled to the controller and disposed to apply a torque to control the rotation of the substrate. ### Claim 12 An apparatus for processing a substrate, comprising: a chamber body defining an inner volume; a substrate positioning assembly disposed in the inner volume, wherein the substrate positioning assembly is capable of positioning and rotating the substrate at least within a horizontal plane; a first capacitive sensor disposed in the inner volume, wherein the first capacitive sensor is positioned facing towards a tangent line of the substrate at a first location of a circle that is substantially the same size as the circumference of the substrate to detect a location of an edge of the substrate at a first edge location; a second capacitive sensor disposed in the inner volume, wherein the second capacitive sensor is positioned facing towards a tangent line of the substrate at a second location of the circle that is substantially the same size as the circumference of the substrate to detect the location of the edge of the substrate at a second edge location, wherein the first capacitive sensor and the second capacitive sensor are positioned at a separation angle less than 180 degrees around the circumference of the circle; a third capacitive sensor disposed in the inner volume at a position between the first and second capacitive sensors, positioned closer to a midpoint of the substrate than the first capacitive sensor and the second capacitive sensor, positioned such that the edge of the substrate does not enter the field of view of the third capacitive sensor, and positioned to detect a vertical location of the substrate; one or more rotation sensors configured to monitor a position of a non-uniform portion on the substrate and track an angular position and/or rotation of the substrate; and a lamp disposed to provide backlighting to the underside of the substrate. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the first and second capacitive sensors are positioned at a 90 degree angle such that the first capacitive sensor measures the position of the substrate in the X direction and the second capacitive sensor measures the position of the substrate in the Y direction. ### Claim 14 (depends on 12) The apparatus of claim 12, wherein the rotation sensor comprises a camera. ### Claim 15 (depends on 12) The apparatus of claim 12, further comprising a first set of actuators disposed to control the position of the substrate in the X and Y directions. ### Claim 16 (depends on 15) The apparatus of claim 15, further comprising a second set of actuators disposed to apply a torque to control the rotation of the substrate. ### Claim 17 (depends on 12) The apparatus of claim 12, wherein the third capacitive sensor is positioned between the first and second capacitive sensors on a same X-Y plane and the third capacitive sensor is positioned radially inwards such that the edge of the substrate is not within the field of view of the third capacitive sensor. ### Claim 18 (depends on 12) The apparatus of claim 12, further comprising: a support body, wherein the first, second, and third capacitive sensors are disposed in cut outs in the support body. ### Claim 19 (depends on 18) The apparatus of claim 18, wherein the support body includes nozzles for directing fluid flow towards the substrate. ### Claim 20 (depends on 19) The apparatus of claim 19, wherein the first set of actuators are flow control valves capable of controlling the amount of fluid being sent to nozzles in the support body.