# US 10,483,142 B1 · Vacuum robot positioning system with reduced sensitivity to chamber pressure > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,142 B1 - Document ID: US10483142B1 - Status: Granted - Kind: B1 - Application number: 16/132,326 - Filed: 2018-09-14 - Granted: 2019-11-19 - Earliest claimed: 2018-09-14 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Mark K. Tan; Christopher William Burkhart; Richard M. Blank; Richard H. Gould - Web page: https://patentgrep.com/patent/US10483142B1 ## CPC - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/0464: {characterised by the construction of the transfer chamber} - H10P 72/50: for positioning, orientation or alignment - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - H10P 72/7604: {the wafers being placed on a susceptor, stage or support} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A system for mounting vacuum robot arms in horizontally elongate vacuum transfer modules is provided. The system provides mechanical isolation to the vacuum robot arm against deflections in the housing of the vacuum transfer module due to depressurization of the interior of the vacuum transfer module while the exterior of the vacuum transfer module is subjected to atmospheric pressure. Such systems may prevent undesirable, larger displacements of the end effector of such vacuum robot arms due to the deflection. ## Claims ### Claim 1 An apparatus comprising: a support structure for mounting a vacuum robot arm to a horizontally elongate vacuum transfer module for a semiconductor processing tool, the support structure including: a first set of one or more vacuum transfer module mount points collectively having a first centroid; a second set of one or more vacuum transfer module mount points collectively having a second centroid; and a set of one or more robot base mount points configured to connect the support structure with a base of the vacuum robot arm such that a rotational axis of a rotational joint in the base of the vacuum robot arm that connects the base with an arm segment of the vacuum robot arm is interposed between the first centroid and the second centroid, wherein: a first distance between the first centroid and the second centroid when viewed along the rotational axis is at least 70% of a horizontal width of the horizontally elongate vacuum transfer module along the short axis of the horizontally elongate vacuum transfer module, and a second distance between the first centroid and the rotational axis when viewed along the rotational axis is, when the support structure is connected with the base of the vacuum robot arm, at most 25% of the horizontal width of the vacuum transfer module along the short axis of the horizontally elongate vacuum transfer module. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein: the one or more vacuum transfer module mount points in the second set of vacuum transfer module mount points are each at least 60% of the horizontal width of the horizontally elongate vacuum transfer module from a closest one of the one or more vacuum transfer module mount points in the first set of vacuum transfer module mount points, and there are no vacuum transfer module mount points on the support structure in between the one or more vacuum transfer module mount points in the first set of vacuum transfer module mount points and the one or more vacuum transfer module mount points in the second set of vacuum transfer module mount points. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the first distance is at least 80% of a horizontal width of the vacuum transfer module along the short axis of the horizontally elongate vacuum transfer module. ### Claim 4 (depends on 1) The apparatus of claim 1, wherein the first distance is at least 90% of a horizontal width of the vacuum transfer module along the short axis of the horizontally elongate vacuum transfer module. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the first distance is at least 100% of a horizontal width of the vacuum transfer module along the short axis of the horizontally elongate vacuum transfer module. ### Claim 6 (depends on 1) The apparatus of claim 1, the support structure further including a compliance mechanism configured to permit relative displacement between the first centroid and the second centroid of at least 0.022 mm or more when the second set of one or more vacuum transfer module mount points are subjected to a load of less than 400 N directed towards the first centroid while the first set of one or more vacuum transfer module mount points is held fixed in place. ### Claim 7 (depends on 6) The apparatus of claim 6, wherein the compliance mechanism includes one or more items selected from the group consisting of: a) a linear bearing, b) a sliding bushing, c) a sliding contact interface, and d) a serpentine flexure following a serpentine path in the horizontal plane. ### Claim 8 (depends on 6) The apparatus of claim 6, wherein the compliance mechanism is located at least 80% or more of the first distance away from the first centroid and is closer to the second centroid than the first centroid. ### Claim 9 (depends on 1) The apparatus of claim 1, further comprising: the base of the vacuum robot arm; and a compliant vacuum-rated seal that has an inner mechanical mounting interface that is connected with the base of the vacuum robot arm. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein the compliant vacuum-rated seal is selected from the group consisting of: an axial bellows seal, a radial bellows seal, a flexible diaphragm seal, a flexible wavy diaphragm seal, and an elastomeric seal. ### Claim 11 (depends on 9) The apparatus of claim 9, further comprising the horizontally elongate vacuum transfer module, wherein: the horizontally elongate vacuum transfer module includes a housing having a plurality of vertical side walls and having chamber interfaces located at different locations on the vertical side walls around the perimeter of the horizontally elongate vacuum transfer module, each chamber interface is configured to connect with a corresponding component for receiving a semiconductor wafer, each chamber interface includes an opening sized to allow the semiconductor wafer to be passed through the vertical side wall on which the chamber interface is located, the housing defines the horizontal width of the horizontally elongate vacuum transfer chamber and a horizontal length of the horizontally elongate vacuum transfer chamber, the horizontal length is at least 1.25 times as large as the horizontal width, and the compliant vacuum-rated seal has an outer mechanical mounting interface that is connected with the horizontally elongate vacuum transfer chamber. ### Claim 12 (depends on 11) The apparatus of claim 11, wherein: the vacuum transfer module mount points in the first set of one or more vacuum transfer module mount points overlap with one of the vertical side walls when viewed along the rotational axis, and the vacuum transfer module mount points in the second set of one or more vacuum transfer module mount points overlap with another one of the vertical side walls when viewed along the rotational axis. ### Claim 13 (depends on 11) The apparatus of claim 11, wherein: the horizontally elongate vacuum transfer module further includes a vacuum robot arm mounting plate, the vacuum robot arm mounting plate includes mounting features that align with the first set of vacuum transfer module mount points and the second set of vacuum mount points, the support structure is mounted to the vacuum robot arm mounting plate via the first set of vacuum transfer module mount points and the second set of vacuum mount points, and the vacuum robot arm mounting plate is mounted to the housing. ### Claim 14 (depends on 11) The apparatus of claim 11, wherein the horizontally elongate vacuum transfer module includes at least two chamber interfaces along each of two longer vertical sidewalls. ### Claim 15 (depends on 1) The apparatus of claim 1, wherein: the horizontally elongate vacuum transfer module includes a housing having a plurality of vertical side walls each having one or more chamber interfaces, each chamber interface is configured to connect with a corresponding component for receiving a semiconductor wafer, each chamber interface includes an opening sized to allow the semiconductor wafer to be passed through the vertical side wall on which the chamber interface is located, and the one or more vacuum transfer module mount points in the first set of one or more vacuum transfer module mount points are positioned so as to interface with mounting features located at an elevation that overlaps with at least one of the openings when viewed along a horizontal axis. ### Claim 16 (depends on 1) The apparatus of claim 1, wherein: the horizontally elongate vacuum transfer module includes a vacuum robot arm that is configured to position wafers so as to lie in a common wafer transfer plane during wafer transfer operations, and the first centroid and the second centroid are located so as to be proximate to or on the common wafer transfer plane when the support structure is connected with the horizontally elongate vacuum transfer module. ### Claim 17 (depends on 1) The apparatus of claim 1, wherein the support structure is configured to not contact the horizontally elongate vacuum transfer module when installed except at locations proximate to the vacuum transfer module mount points. ### Claim 18 (depends on 1) The apparatus of claim 1, wherein the support structure is a single, contiguous component. ### Claim 19 (depends on 1) The apparatus of claim 1, wherein the support structure includes multiple, separate components.