# US 10,483,138 B2 · Wafer clamp and a method of clamping a wafer

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- Number: US 10,483,138 B2
- Document ID: US10483138B2
- Status: Granted
- Kind: B2
- Application number: 15/454,978
- Filed: 2017-03-09
- Published: 2018-09-13
- Granted: 2019-11-19
- Earliest claimed: 2017-03-09
- Assignees: Himax Technologies Limited
- Applicants: Himax Technologies Limited
- Inventors: Fang Wan Lu; Jui Tang Chang
- Web page: https://patentgrep.com/patent/US10483138B2

## CPC

- H10P 72/0606: {Position monitoring, e.g. misposition detection or presence detection}
- H10P 72/53: {using optical controlling means}
- H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance}
- G01V 8/14: using reflectors
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- G01V: GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS (means for indicating the location of accidentally buried, e.g. snow-buried, persons A63B29/02)

## Abstract

A wafer clamp includes a platform with a top surface, a stopper disposed at a front end of the platform, a push rod disposed at a rear end of the platform, at least one actuator pivotally connected to the push rod, and a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor.

## Claims

### Claim 1

A wafer clamp comprising:
a platform with a top surface;
a stopper disposed at a front end of the platform;
a push rod disposed at a rear end of the platform;
at least one actuator pivotally connected to the push rod; and
a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor;
wherein the actuator comprises a pneumatic cylinder, a front end of which pulls back to an original position when the pneumatic cylinder is not actuated.

### Claim 2 (depends on 1)

The wafer clamp of claim 1, wherein the top surface of the platform is substantially flat.

### Claim 3 (depends on 1)

The wafer clamp of claim 1, wherein a top surface of the stopper is at a level higher than the top surface of the platform, such that the top surface of the stopper is at a level equal to or higher than a top surface of the wafer when the wafer rests on the platform.

### Claim 4 (depends on 1)

The wafer clamp of claim 1, wherein a top surface of the push rod is at a level higher than the top surface of the platform, such that the top surface of the push rod is at a level equal to or higher than a top surface of the wafer when the wafer rests on the platform.

### Claim 5 (depends on 1)

The wafer clamp of claim 1, wherein the actuator is configured to move the push rod forward, such that the wafer is held tightly between the stopper and the push rod.

### Claim 6 (depends on 1)

The wafer clamp of claim 1, wherein said at least one actuator comprises two actuators being parallel with each other and pivotally connected to the push rod.

### Claim 7 (depends on 1)

The wafer clamp of claim 1, wherein said at least one actuator comprises one actuator, which is parallel with at least one auxiliary rod that is pivotally connected to the push rod.

### Claim 8 (depends on 1)

The wafer clamp of claim 1, further comprising a plate for supporting the actuator.

### Claim 9

The wafer clamp comprising:
a platform with a top surface;
a stopper disposed at a front end of the platform;
a push rod disposed at a rear end of the platform;
at least one actuator pivotally connected to the push rod; and
a sensor disposed at the front end of the platform, the sensor measuring a distance between the sensor and a wafer over the sensor;
wherein the sensor comprises a fiber optic sensor, which comprises a reflective fiber optic sensor.