# US 10,483,118 B2 · Etching method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,483,118 B2 - Document ID: US10483118B2 - Status: Granted - Kind: B2 - Application number: 15/975,852 - Filed: 2018-05-10 - Published: 2018-11-15 - Granted: 2019-11-19 - Earliest claimed: 2017-05-11 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Sho Kumakura; Masahiro Tabata - Web page: https://patentgrep.com/patent/US10483118B2 ## CPC - H10P 50/242: {of Group IV materials} - H10N 15/00: Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect (integrated devices or assemblies of multiple devices H10N19/00) - H10P 50/00: Etching of wafers, substrates or parts of devices - H10P 50/283: {by chemical means} - H10P 72/0421: {for drying etching} - H10P 72/0432: {mainly by conduction} - H10P 72/0434: {mainly by convection} - H10P 72/72: using electrostatic chucks - H10P 76/4085: {characterised by the processes involved to create the masks} - H10D 62/8325: {Silicon carbide} - H10P 50/244: {comprising alternated and repeated etching and passivation steps} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract A selectivity can be improved in a desirable manner when etching a processing target object containing silicon carbide. An etching method of processing the processing target object, having a first region containing silicon carbide and a second region containing silicon nitride and in contact with the first region, includes etching the first region to remove the first region atomic layer by atomic layer by repeating a sequence comprising: generating plasma from a first gas containing nitrogen to form a mixed layer containing ions contained in the plasma generated from the first gas in an atomic layer of an exposed surface of the first region; and generating plasma from a second gas containing fluorine to remove the mixed layer by radicals contained in the plasma generated from the second gas. ## Claims ### Claim 1 An etching method of etching a processing target object having a first region and a second region, the etching method comprising: etching the first region as an etching target layer to remove the first region in an atomic layer by using the second region as a mask and by repeating a sequence comprising: a first process of generating first plasma from a first gas within a processing vessel of a plasma processing apparatus in which the processing target object is accommodated to form a mixed layer containing ions contained in the first plasma in an atomic layer of an exposed surface of the first region; a second process of purging a space within the processing vessel after performing the first process; after performing the second process, a third process of generating second plasma from a second gas within the processing vessel to remove the mixed layer by radicals contained in the second plasma; and a fourth process of purging the space within the processing vessel after performing the third process, wherein the first region contains silicon carbide, the second region contains silicon nitride, the first gas contains nitrogen, and the second gas contains fluorine. ### Claim 2 (depends on 1) The etching method of claim 1, wherein, in the first process, the mixed layer containing the ions is formed in the atomic layer of the exposed surface of the first region by applying a bias voltage to the plasma generated from the first gas. ### Claim 3 (depends on 1) The etching method of claim 1, wherein the first gas is a N2 gas or a mixed gas containing a N2 gas and an O2 gas. ### Claim 4 (depends on 1) The etching method of claim 1, wherein the second gas is a mixed gas containing a NF3 gas, a H2 gas, an O2 gas and an Ar gas. ### Claim 5 (depends on 1) The etching method of claim 1, further comprising: determining whether a repetition number of the sequence reaches a preset number. ### Claim 6 (depends on 5) The etching method of claim 5, wherein the preset number is determined based on an etching amount of the first region. ### Claim 7 (depends on 5) The etching method of claim 5, wherein the preset number is determined such that a product of an etching thickness of the first region, which is removed by performing the sequence a single time, and the preset number reaches a predetermined value. ### Claim 8 An etching method of etching a processing target object within a processing vessel, the processing target object having a first region containing SiC and a second region containing Ti, TiN, TiOx, W, WC, Hf, HfOx, Zr, ZrOx, Ta, SiO2, Si, SiGe, Ge, or Ru (x is an integer), the etching method comprising: removing the first region as an etching target layer by using the second region as a mask and by repeating a sequence comprising: forming, by generating first plasma from a first gas containing nitrogen, a mixed layer containing ions contained in the first plasma in the first region; and removing the mixed layer by generating second plasma from a second gas containing fluorine within the processing vessel after the forming of the mixed layer. ### Claim 9 (depends on 8) The etching method of claim 8, further comprising: purging a space within the processing vessel between the forming of the mixed layer and the removing of the mixed layer or after the removing of the mixed layer. ### Claim 10 (depends on 8) The etching method of claim 8, wherein the first gas contains at least one of a N2 gas, a NH3 gas, a NO gas and a NO2 gas, and the second gas contains at least one of a NF3 gas, a SF6 gas and a CF4 gas. ### Claim 11 (depends on 10) The etching method of claim 10, wherein the first gas further contains at least one of an O2 gas, a CO2 gas, a CO gas, a NO gas and a NO2 gas. ### Claim 12 (depends on 11) The etching method of claim 11, wherein the second gas further contains at least one of a H2 gas, a D2 gas, a NH3 gas, an O2 gas, a CO2 gas, a CO gas, a NO gas and a NO2 gas. ### Claim 13 An etching method, comprising: preparing a processing target object having a first region as an etching target layer made of a first material containing silicon carbide and a second region as a mask containing containing silicon nitride; forming a layer containing nitrogen in the first region by exposing the processing target object to nitrogen plasma; and after the forming of the layer, removing the layer by exposing the processing target object to fluorine plasma, wherein the first region is removed by using the second region as a mask and by repeating the forming of the layer and the removing of the layer.