# US 10,483,095 B2 · Method of extracting and accelerating ions

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,483,095 B2
- Document ID: US10483095B2
- Status: Granted
- Kind: B2
- Application number: 14/975,415
- Filed: 2015-12-18
- Published: 2017-06-22
- Granted: 2019-11-19
- Earliest claimed: 2015-12-18
- Assignees: Agc Flat Glass North America, Inc.; Asahi Glass Company, Limited; Agc Glass Europe
- Applicants: AGC Flat Glass North America, Inc.; Asahi Glass Co., Ltd.; AGC Glass Europe S.A.
- Inventors: John Chambers; Peter Maschwitz
- Web page: https://patentgrep.com/patent/US10483095B2

## CPC

- H01J 37/32623: {Mechanical discharge control means}
- H01J 27/08: using arc discharge
- H01J 37/08: Ion sources; Ion guns
- H01J 37/32055: {Arc discharge}
- H01J 37/32596: {Hollow cathodes}
- H01J 2237/004: Charge control of objects or beams
- H01J 2237/022: Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
- H01J 2237/316: Changing physical properties
- H01J 2237/3142: Ion plating
- H01J 2237/3151: Etching
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A method of extracting and accelerating ions is provided. The method includes providing a ion source. The ion source includes a chamber. The ion source further includes a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice, the first and second hollow cathodes being disposed adjacently in the chamber. The ion source further includes a first ion accelerator between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a second ion accelerator between and in communication with the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The method further includes generating a plasma using the first hollow cathode and the second hollow cathode. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counter-electrode. The method further includes extracting and accelerating ions. Each of the first ion acceleration cavity and the second ion acceleration cavity are sufficient to enable the extraction and acceleration of ions.

## Claims

### Claim 1

A method of extracting and accelerating ions comprising:
(i) providing a ion source comprising:
a chamber;
a first hollow cathode having a first hollow cathode cavity and a first plasma exit orifice and a second hollow cathode having a second hollow cathode cavity and a second plasma exit orifice, the first and second hollow cathodes being disposed adjacently in the chamber;
a first ion accelerator between and in communication with the first plasma exit orifice and the chamber, wherein the first ion accelerator forms a first ion acceleration cavity; and
a second ion accelerator between and in communication with the second plasma orifice and the chamber, wherein the second ion accelerator forms a second ion acceleration cavity;
wherein a width of the first ion acceleration cavity is larger than a width of the first plasma exit orifice, and a width of the second ion acceleration cavity is larger than a width of the second plasma exit orifice;
(ii) generating a plasma within the first hollow cathode and the second hollow cathode, wherein the first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counter-electrode; and
(iii) extracting and accelerating ions from the first hollow cathode and the second hollow cathode through the first ion acceleration cavity and the second ion acceleration cavity;
wherein each of the first ion acceleration cavity and the second ion acceleration cavity are sufficient to enable the extraction and acceleration of ions without the presence of magnetic fields.

### Claim 2 (depends on 1)

The method of claim 1, wherein the extracted and accelerated ions from at least one of the first ion acceleration cavity and the second ion acceleration cavity form one of: a single narrow beam, a single large-area beam, an array of single beams, and a continuous linear beam curtain.

### Claim 3 (depends on 1)

The method of claim 1, wherein the extracted and accelerated ions from at least one of the first ion acceleration cavity and the second ion acceleration cavity form a collimated ion beam.

### Claim 4 (depends on 1)

The method of claim 1, wherein the first hollow cathode and the first ion accelerator are at a first same electric potential difference and the second hollow cathode and the second ion accelerator are at a second same electric potential difference.

### Claim 5 (depends on 1)

The method of claim 1, wherein the first hollow cathode and the first ion accelerator are at a first same polarity relative to an electric potential of the plasma and the second hollow cathode and the second ion accelerator are at a second same polarity relative to the electric potential of the plasma.

### Claim 6 (depends on 1)

The method of claim 1, wherein the first ion accelerator comprises a portion of the first hollow cathode and/or the second ion accelerator comprises a portion of the second hollow cathode.

### Claim 7 (depends on 1)

The method of claim 1, wherein the first ion acceleration cavity comprises a slot in the first ion accelerator and/or the second ion acceleration cavity comprises a slot in the second ion accelerator.

### Claim 8 (depends on 1)

The method of claim 1, wherein the first ion accelerator and the first hollow cathode are electrically insulated from each other and/or the second ion accelerator and the second hollow cathode are electrically insulated from each other.

### Claim 9 (depends on 1)

The method of claim 1, wherein at least one of the electric potential of the first ion accelerator and the electric potential of the second ion accelerator is switching at a frequency between negative and positive with respect to the electric potential of the plasma.

### Claim 10 (depends on 1)

The method of claim 1, wherein the first ion accelerator is electrically connected to an exterior of the first hollow cathode and/or the second ion accelerator is electrically connected to an exterior of the second hollow cathode.

### Claim 11 (depends on 1)

The method of claim 1, wherein the first ion accelerator is electrically connected to an interior of the first hollow cathode and/or the second ion accelerator is electrically connected to an interior of the second hollow cathode.

### Claim 12 (depends on 1)

The method of claim 1, wherein at least one of the first ion acceleration cavity and the second ion acceleration cavity is in the form of one of a counterbore, a rectangular slot, a semicircle, a cone, an inverted cone, and a bell shape.

### Claim 13 (depends on 1)

The method of claim 1, wherein interior surfaces of at least one of the first ion accelerator and the second ion accelerator are electron-emitting and electron-accepting.

### Claim 14 (depends on 1)

The method of claim 1, wherein external surfaces of at least one of the first hollow cathode, the first ion accelerator, the second hollow cathode, and the second ion accelerator are electrically insulated.

### Claim 15 (depends on 14)

The method of claim 14, wherein said external surfaces are electrically insulated by at least one of a polymer and a non-conductive ceramic.

### Claim 16 (depends on 14)

The method of claim 14, wherein said external surfaces are electrically insulated by a dark space shield.

### Claim 17 (depends on 1)

The method of claim 1, wherein the chamber comprises a vacuum chamber.

### Claim 18 (depends on 1)

The method of claim 1, wherein the first plasma exit orifice restricts gas flow between the first hollow cathode and the chamber and/or the second plasma exit orifice restricts gas flow between the second hollow cathode and the chamber.

### Claim 19 (depends on 1)

The method of claim 1, wherein at least one of the first ion acceleration cavity and the second ion acceleration cavity comprises an elongated cavity.

### Claim 20 (depends on 1)

The method of claim 1, wherein at least one of the first plasma exit orifice and the second plasma exit orifice comprises a plasma exit nozzle.

### Claim 21 (depends on 1)

The method of claim 1, wherein at least one of the first plasma exit orifice and the second plasma exit orifice comprises a plurality of plasma exit nozzles.

### Claim 22 (depends on 1)

The method of claim 1, wherein at least one of the first plasma exit orifice and the second plasma exit orifice comprises a linear slot.

### Claim 23 (depends on 1)

The method of claim 1, wherein the first ion acceleration cavity partially encloses gas emerging from the first plasma exit orifice and/or the second ion acceleration cavity partially encloses gas emerging from the second plasma exit orifice.

### Claim 24 (depends on 1)

The method of claim 1, wherein an average energy of the extracted and accelerated ions is less than 100 eV.

### Claim 25 (depends on 1)

The method of claim 1, wherein an average energy of the extracted and accelerated ions is greater than 100 eV.

### Claim 26 (depends on 1)

The method of claim 1, wherein the ion source further includes a source of power configured to power at least one of the first hollow cathode, the first ion accelerator, the second hollow cathode, and the second ion accelerator.

### Claim 27 (depends on 26)

The method of claim 26, wherein the source of power operates at a root-mean-square AC voltage between 200V and 1000V.

### Claim 28 (depends on 26)

The method of claim 26, wherein the source of power operates at a root-mean-square AC voltage between 20V and 200V.

### Claim 29 (depends on 1)

The method of claim 1, wherein the first and second hollow cathodes are configured such that, the hollow cathode serving as positive electrode is more positively biased than walls of the chamber.

### Claim 30 (depends on 1)

The method of claim 1, wherein the first and second ion accelerators are configured such that the first and second ion accelerators are biased more positively than the corresponding first and second hollow cathodes during the positive portion of the cycle for the respective ion accelerator and hollow cathode.

### Claim 31 (depends on 1)

The method of claim 1, wherein the first and second ion accelerators are configured such that the first and second ion accelerators are biased less positively than the corresponding first and second hollow cathodes.

### Claim 32 (depends on 1)

The method of claim 1, wherein the only electrically active surfaces consist essentially of an inner wall of each of the first and second hollow cathodes and an inner wall of each of the first and second ion accelerators.

### Claim 33 (depends on 1)

The method of claim 1, wherein the frequency that the first hollow cathode and the second hollow cathode alternate between electrode and counter-electrode is from 1 kHz to 1 MHz.

### Claim 34 (depends on 1)

The method of claim 1, wherein at least one of the first ion acceleration cavity and the second ion acceleration cavity is angled to distribute ion bombardment to a common line.

### Claim 35 (depends on 1)

The method of claim 1, wherein the plasma is self-neutralizing.

### Claim 36 (depends on 1)

The method of claim 1, wherein the ion source is absent of any Hall current.

### Claim 37 (depends on 1)

The method of claim 1, wherein the ion source is absent of any accelerating grids.

### Claim 38 (depends on 1)

The method of claim 1, wherein the ion source is from about 0.1 m to about 4 m long and has uniform plasma and ion emission over the length of the ion source.

### Claim 39 (depends on 1)

The method of claim 1, further comprising introducing plasma-forming gas into at least one of the first hollow cathode cavity and the second hollow cathode cavity, wherein for each hollow cathode where a plasma-forming gas is introduced, a pressure gradient is formed between the hollow cathode cavity, the plasma exit region, the ion acceleration cavity, and the chamber, in order of decreasing pressure gradient.

### Claim 40 (depends on 1)

The method of claim 1, further comprising depositing a coating using the extracted and accelerated ions.

### Claim 41 (depends on 40)

The method of claim 40, further comprising densifying the deposited coating.

### Claim 42 (depends on 1)

The method of claim 1, further comprising treating a substrate using the extracted or accelerated ions.

### Claim 43 (depends on 42)

The method of claim 42, wherein treating the substrate comprises at least one of: heating, cleaning, surface etching, and chemically modifying a surface.

### Claim 44 (depends on 1)

The method of claim 1, wherein each of the first ion acceleration cavity and the second ion acceleration cavity are sufficient to enable the extraction and acceleration of ions without the presence of additional electrodes.