# US 10,483,092 B2 · Baffle plate and showerhead assemblies and corresponding manufacturing method

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- Number: US 10,483,092 B2
- Document ID: US10483092B2
- Status: Granted
- Kind: B2
- Application number: 15/097,600
- Filed: 2016-04-13
- Published: 2017-10-19
- Granted: 2019-11-19
- Earliest claimed: 2016-04-13
- Assignees: Lam Research Corporation
- Applicants: Lam Research Corporation
- Inventors: Eric Russell Madsen; Lance Dyrdahl
- Web page: https://patentgrep.com/patent/US10483092B2

## CPC

- H01J 37/3244: {Gas supply means}
- C23C 16/45565: {Shower nozzles}
- C23C 16/45591: {Fixed means, e.g. wings, baffles}
- H01J 37/32091: {the radio frequency energy being capacitively coupled to the plasma}
- H01J 37/32449: {Gas control, e.g. control of the gas flow}
- H01J 37/32633: {Baffles}
- B23K 20/122: {using a non-consumable tool, e.g. friction stir welding}
- B23K 20/127: {Friction stir welding involving a mechanical connection}
- H01J 2237/327: Arrangements for generating the plasma
- H01J 2237/3321: CVD [Chemical Vapor Deposition]
- H01J 2237/334: Etching
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B23K: SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM

## Abstract

A baffle plate assembly including a baffle plate, a ring and support members. The baffle plate has an outer diameter and configured to distribute gases through a showerhead of a showerhead assembly of a substrate processing system. The gases are received from a stem of the showerhead assembly. The ring has an inner diameter and configured to be disposed in a ring channel of the showerhead assembly. The inner diameter is greater than the outer diameter of the baffle plate. The support members extend from the baffle plate to the ring. The ring and the support members hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.

## Claims

### Claim 1

A baffle plate assembly comprising:
a baffle plate having an outer diameter and configured to receive gases from a stem of a showerhead assembly and distribute the gases through a showerhead of the showerhead assembly of a substrate processing system;
a ring having an inner diameter and configured to be disposed in a ring channel of the showerhead assembly, wherein the inner diameter is greater than the outer diameter of the baffle plate; and
a plurality of support members extending from the baffle plate to the ring,
wherein the ring and the plurality of support members are configured to hold the baffle plate in a position between a top plate and a bottom plate of the showerhead.

### Claim 2 (depends on 1)

The baffle plate assembly of claim 1, wherein the plurality of support members are configured to be placed in notches in a collar of the stem of the showerhead assembly.

### Claim 3 (depends on 1)

The baffle plate assembly of claim 1, wherein the baffle plate comprises a plurality of holes through which portions of the gases pass.

### Claim 4 (depends on 1)

The baffle plate assembly of claim 1, wherein each of the plurality of support members is thicker at the baffle plate than at the ring.

### Claim 5 (depends on 1)

The baffle plate assembly of claim 1, wherein the plurality of support members comprise a tapered bottom surface.

### Claim 6 (depends on 1)

The baffle plate assembly of claim 1, wherein each of the plurality of support members comprises:
a top surface extending parallel to a bottom surface of the stem or a bottom surface of the top plate of the showerhead; and
a tapered bottom surface.

### Claim 7 (depends on 1)

The baffle plate assembly of claim 1, wherein a top surface of the baffle plate, top surfaces of the plurality of support members, and a top surface of the ring are in a same plane.

### Claim 8 (depends on 1)

A showerhead assembly comprising:
the baffle plate assembly of claim 1; and
the showerhead,
wherein
the baffle plate receives the gases from the stem of the showerhead assembly and distributes the gases through the showerhead,
the ring is disposed in the ring channel of the showerhead assembly, and
the ring and the plurality of support members hold the baffle plate in the position between the top plate and the bottom plate of the showerhead.

### Claim 9 (depends on 8)

The showerhead assembly of claim 8, further comprising the stem,
wherein the top plate is connected to the stem and comprises the ring channel.

### Claim 10 (depends on 9)

The showerhead assembly of claim 9, wherein:
the stem comprises notches; and
a portion of each of the plurality of support members is placed in a respective one of the notches.

### Claim 11 (depends on 10)

The showerhead assembly of claim 10, wherein the portions of the plurality of support members have a thermal interference fit with the notches.

### Claim 12 (depends on 9)

The showerhead assembly of claim 9, wherein the ring is welded to the stem or the top plate.

### Claim 13 (depends on 9)

The showerhead assembly of claim 9, wherein the ring is friction stir welded to the stem and the top plate.

### Claim 14 (depends on 9)

The showerhead assembly of claim 9, wherein:
the ring is friction stir welded to the stem; and
the stem is friction stir welded to the top plate.

### Claim 15 (depends on 9)

The showerhead assembly of claim 9, wherein:
the stem comprises swage tabs;
the ring comprises notches; and
the swage tabs are pressed at least partially into the notches of the ring.

### Claim 16 (depends on 9)

The showerhead assembly of claim 9, wherein the ring has a thermal interference fit with the ring channel.

### Claim 17 (depends on 9)

The showerhead assembly of claim 9, wherein the ring abuts the top plate of the showerhead.

### Claim 18

A method comprising:
forming a top plate for a showerhead of a showerhead assembly of a substrate processing system;
forming a stem of the showerhead assembly;
forming a baffle plate assembly including a baffle plate, a ring and a plurality of support members, wherein the plurality of support members extend from the baffle plate to the ring;
sliding the top plate on to the stem;
placing the ring in a ring channel of the showerhead assembly to suspend the baffle plate between (i) the stem or the top plate of the showerhead, and (ii) a bottom plate of the showerhead; and
locking the ring in the ring channel.

### Claim 19 (depends on 18)

The method of claim 18, further comprising welding the ring to the stem or the top plate.

### Claim 20 (depends on 18)

The method of claim 18, further comprising friction stir welding the ring to the stem and to the top plate.

### Claim 21 (depends on 18)

The method of claim 18, wherein the locking of the ring in the ring channel comprises:
forming swage tabs in a collar of the stem;
forming notches in the ring; and
pressing or compressing the swage tabs at least partially into the notches of the ring to lock the ring in the ring channel.

### Claim 22 (depends on 18)

The method of claim 18, wherein the locking of the ring in the ring channel comprises:
prior to placing the ring in the ring channel, heating the ring or a portion of the stem to allow the ring to be placed in the ring channel; and
allowing the ring or the portion of the stem to return to an ambient temperature to lock the ring in the ring channel.

### Claim 23 (depends on 18)

The method of claim 18, wherein the locking of the ring in the ring channel comprises:
prior to placing the ring in the ring channel, cooling the ring or a portion of the stem to allow the ring to be placed in the ring channel; and
allowing the ring or the portion of the stem to return to an ambient temperature to lock the ring in the ring channel.

### Claim 24 (depends on 18)

The method of claim 18, further comprising locking the plurality of support members in notches of the stem, wherein the locking of the plurality of support members comprises:
prior to placing the ring in the ring channel, heating the plurality of support members or a portion of the stem to allow the plurality of support members to be placed in the notches; and
allowing the plurality of support members or the portion of the stem to return to an ambient temperature to lock the plurality of support members in the notches.

### Claim 25 (depends on 18)

The method of claim 18, further comprising locking the plurality of support members in notches of the stem, wherein the locking of the plurality of support members comprises:
prior to placing the ring in the ring channel, cooling the plurality of support members or a portion of the stem to allow the plurality of support members to be placed in the notches; and
allowing the plurality of support members or the portion of the stem to return to an ambient temperature to lock the plurality of support members in the notches.