# US 10,483,091 B1 · Selective ion filtering in a multipurpose chamber

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- Number: US 10,483,091 B1
- Document ID: US10483091B1
- Status: Granted
- Kind: B1
- Application number: 15/984,101
- Filed: 2018-05-18
- Published: 2019-11-21
- Granted: 2019-11-19
- Earliest claimed: 2018-05-18
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Lawrence A. Clevenger; Roger Allan Quon; Theodorus E. Standaert; Wei Wang; Chih-Chao Yang
- Web page: https://patentgrep.com/patent/US10483091B1

## CPC

- H01J 37/32422: {Arrangement for selecting ions or species in the plasma}
- H10P 70/234: {the processing being the formation of vias or contact holes}
- H10P 70/30: {Cleaning after the substrates have been singulated}
- H10P 95/94: {Hydrogenation or deuterisation, e.g. using atomic hydrogen from a plasma}
- H01J 2237/335: Cleaning
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A multipurpose semiconductor process chamber includes a vessel wall that encloses contiguous first and second volumes of the multipurpose chamber, and means for selectively effectively preventing ions moving across a plane that partitions the first volume from the second volume. For example, the means can include an electromagnet, or at least one permanent magnet, that is operable to impose and remove a magnetic field with field lines extending in the plane.

## Claims

### Claim 1

A method comprising:
placing a semiconductor wafer into a first volume of a multipurpose chamber having contiguous first and second volumes;
establishing a vacuum in the multipurpose chamber;
activating an ion filter to effectively prevent ions moving between first and second volumes;
producing a first plasma in the second volume of the multipurpose chamber, such that the ion filter effectively prevents ions of the first plasma entering the first volume;
venting the first plasma from the multipurpose chamber;
de-activating the ion filter to permit ions to move between the first and second volumes; and
producing a second plasma in the second volume of the multipurpose chamber, such that ions of the second plasma interact with the semiconductor wafer.

### Claim 2 (depends on 1)

The method of claim 1 wherein the first plasma is a hydrogen plasma and the second plasma is a nitrogen plasma, and the multipurpose chamber is used as a combined preclean and nitridation chamber, with the hydrogen plasma cleaning the semiconductor wafer and the nitrogen plasma nitridating the semiconductor wafer.

### Claim 3 (depends on 1)

The method of claim 1 wherein the first volume of the multipurpose chamber is a lower portion and the second volume of the multipurpose chamber is an upper portion.

### Claim 4 (depends on 1)

The method of claim 1 further comprising, while providing the first plasma in the second volume of the multipurpose chamber, repelling positive ions from the semiconductor wafer by establishing a positive electrical charge at the dielectric surface of the semiconductor wafer.

### Claim 5 (depends on 1)

The method of claim 1 further comprising, while providing the second plasma in the second volume of the multipurpose chamber, attracting positive ions to the semiconductor wafer by establishing a negative or neutral electrical charge at the dielectric surface of the semiconductor wafer.

### Claim 6 (depends on 1)

The method of claim 1 wherein activating the ion filter comprises imposing a magnetic field with field lines that extend along a plane that partitions the first volume of the multipurpose chamber from the second volume of the multipurpose chamber, and de-activating the ion filter comprises removing the magnetic field.

### Claim 7 (depends on 6)

The method of claim 6 wherein imposing the magnetic field includes energizing an electromagnet with poles disposed opposite each other in the plane partitioning the first volume from the second volume.

### Claim 8 (depends on 6)

The method of claim 6 wherein imposing the magnetic field includes positioning first and second permanent magnets at opposite sides of the multipurpose chamber in a plane partitioning the first and second volumes of the multipurpose chamber, such that opposed poles of the permanent magnets face each other across the multipurpose chamber in the plane partitioning the first volume from the second volume.

### Claim 9 (depends on 8)

The method of claim 8 wherein removing the magnetic field includes repositioning the first and second permanent magnets such that the opposed poles no longer face each other in the plane partitioning the first volume from the second volume.

### Claim 10 (depends on 1)

The method of claim 1 wherein the ion filter is activated and de-activated without breaking vacuum on the multipurpose chamber.