# US 10,482,592 B2 · Shape measuring device, structured object manufacturing system, shape measuring method, structured object manufacturing method, shape measuring program, and recording medium > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,482,592 B2 - Document ID: US10482592B2 - Status: Granted - Kind: B2 - Application number: 15/318,409 - Filed: 2014-06-13 - Published: 2017-05-11 - Granted: 2019-11-19 - Earliest claimed: 2014-06-13 - Assignees: Nikon Corporation - Applicants: Nikon Corporation - Inventors: Tomoaki Yamada - Web page: https://patentgrep.com/patent/US10482592B2 ## CPC - G01B 11/25: by projecting a pattern, e.g. {one or more lines,} moiré fringes on the object (G01B11/255 takes precedence {; image analysis for depth or shape recovery G06T7/50}) - G01B 11/2416: {of gears (optical projection profile comparators G01B9/08)} - G01B 11/2518: {Projection by scanning of the object} - G06F 18/22: Matching criteria, e.g. proximity measures - G06F 18/24: Classification techniques - G06T 7/0006: {using a design-rule based approach} - G06T 7/001: {using an image reference approach} - G06T 7/74: {involving reference images or patches} - G06V 40/20: Movements or behaviour, e.g. gesture recognition (recognition of facial expressions G06V40/16) - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING ## Abstract An object is to measure the shape of an object to be measured under a more appropriate condition. A shape measuring device includes a projection unit configured to project a pattern onto a measurement target by light, an image capturing unit configured to capture a picture image of the measurement target onto which the pattern is projected by the projection unit, a movement unit capable of moving a projected position of the pattern on the measurement target by relatively moving the projection unit and the measurement target, and a region-of-interest setting unit configured to set a region of interest for acquiring information used to measure the measurement target to be in at least part of a region captured by the image capturing unit, so as to include an image of the pattern. ## Claims ### Claim 1 A shape measuring device comprising: a projection unit configured to project a pattern onto a measurement target; an image capturing unit configured to capture a picture image of a measurement target onto which the pattern is projected by the projection unit; a movement unit capable of moving a projected position of the pattern on the measurement target by relatively moving the projection unit and the measurement target; a region-of-interest setting unit configured to set a region of interest for acquiring information used to measure the measurement target, as at least part of a region captured by the image capturing unit to include an image of the pattern; and a reference region-of-interest setting unit configured to set a reference region-of-interest in part of the region captured by the image capturing unit, wherein the region-of-interest setting unit determines whether to set the region of interest based on a state of the image of the pattern in the reference region-of-interest, and sets the region of interest in a case where the image of the pattern is in the reference region-of-interest. ### Claim 2 (depends on 1) The shape measuring device according to claim 1, wherein the region-of-interest setting unit sets the region of interest based on a picture image including an image of the pattern acquired by the image capturing unit. ### Claim 3 (depends on 1) The shape measuring device according to claim 1, wherein the region-of-interest setting unit sets the region of interest based on position information when the pattern is projected onto the measurement target. ### Claim 4 (depends on 1) The shape measuring device according to claim 1, wherein the region-of-interest setting unit sets the region of interest based on movement information including a condition of relative movement between the projection unit and the measurement target. ### Claim 5 (depends on 4) The shape measuring device according to claim 4, wherein the movement information includes a moving direction of a position at which the pattern is projected onto the measurement target, and the region-of-interest setting unit sets the region of interest based on the moving direction. ### Claim 6 (depends on 4) The shape measuring device according to claim 4, wherein the region-of-interest setting unit sets the region of interest based on an image of the pattern before the relative movement is performed, and a moving distance of the image of the pattern on an imaging plane of the image capturing unit calculated based on the relative movement condition. ### Claim 7 (depends on 4) The shape measuring device according to claim 4, wherein the region-of-interest setting unit sets again the region of interest based on a moving distance or moving direction of an image of the pattern caused by relative movement of a projected position of the pattern. ### Claim 8 (depends on 7) The shape measuring device according to claim 7, wherein the region-of-interest setting unit calculates the moving distance or moving direction of the image of the pattern based on a plurality of picture images before and after the relative movement. ### Claim 9 (depends on 7) The shape measuring device according to claim 7, wherein the region-of-interest setting unit moves the region of interest based on a distance from an outer edge of the region of interest to the image of the pattern. ### Claim 10 (depends on 9) The shape measuring device according to claim 9, further comprising a distance measurement region setting unit configured to set a distance measurement region that specifies a place in which the distance from the outer edge of the region of interest to the image of the pattern is measured. ### Claim 11 (depends on 7) The shape measuring device according to claim 7, further comprising a superimposed picture image generation unit configured to generate a picture image in which the images of the pattern of a plurality of pieces of picture image data acquired by performing image capturing during the relative movement are superimposed with each other, wherein the region-of-interest setting unit calculates the moving distance or moving direction of the image of the pattern based on the picture image in which the images of a pattern are superimposed and that is generated by the superimposed picture image generation unit. ### Claim 12 (depends on 7) The shape measuring device according to claim 7, wherein the region-of-interest setting unit calculates the moving distance or moving direction of the image of the pattern based on a relative moving direction of the projection unit relative to the measurement target obtained from the movement unit and specification data of the measurement target. ### Claim 13 (depends on 1) The shape measuring device according to claim 1, wherein the region-of-interest setting unit sets the region of interest based on the reference region of interest and the movement information. ### Claim 14 (depends on 1) The shape measuring device according to claim 1, wherein the region-of-interest setting unit includes a second region-of-interest generating unit configured to newly generate a second region of interest at a position at which the reference region of interest is set. ### Claim 15 (depends on 14) The shape measuring device according to claim 14, wherein the second region-of-interest generating unit includes a new region-of-interest generation determining unit configured to determine whether to newly generate the second region of interest based on a feature amount of an image formed inside the reference region of interest. ### Claim 16 (depends on 15) The shape measuring device according to claim 15, wherein the projection unit projects line light by projecting a light beam having a line-shaped light intensity distribution as a pattern projected onto the measurement target, and the new region-of-interest generation determining unit detects, for an image of the pattern of line light in the reference region of interest, a pixel having a peak value detected along a detection direction of the image of the pattern of line light, at each position in a direction intersecting the detection direction of the image of the pattern of line light, and performs control to newly generate the region of interest when the number of peak pixels is equal to or larger than a set value. ### Claim 17 (depends on 15) The shape measuring device according to claim 15, wherein the new region-of-interest generation determining unit performs control to newly generate the region of interest when the image of the pattern of line light in the reference region of interest has a length that is equal to or larger than a set length. ### Claim 18 (depends on 14) The shape measuring device according to claim 14, wherein the region-of-interest setting unit includes a region-of-interest cancellation determining unit configured to determine whether to cancel the second region of interest based on a feature of an image formed inside the second region of interest. ### Claim 19 (depends on 1) The shape measuring device according to claim 1, further comprising a probe provided with a housing holding the projection unit and the image capturing unit so that a projection direction of the line light by the projection unit and an image capturing direction of the image capturing unit are different from each other. ### Claim 20 (depends on 1) The shape measuring device according to claim 1, wherein the region of interest is a point group generation region, the shape measuring device further comprising a measurement unit configured to measure a shape of the measurement target based on a position of the image of the pattern positioned in the point group generation region of the picture image data. ### Claim 21 (depends on 1) The shape measuring device according to claim 1, wherein the region of interest is a light adjustment region, the shape measuring device further comprising a light adjustment control unit configured to control, in accordance with brightness of an image detected and captured in the light adjustment region of the picture image data, the amount of projected light from the projection unit, the quantity of light received by the image capturing unit, an exposure when the picture image data is acquired by the image capturing unit, or an input and output feature of the image capturing unit. ### Claim 22 (depends on 1) The shape measuring device according to claim 1, the region-of-interest setting unit configured to change the region of interest based on movement of a projected position of the pattern on the measurement target. ### Claim 23 (depends on 1) A structured object manufacturing system comprising: a shaping device configured to shape a structured object based on designing information related to the shape of the structured object; the shape measuring device according to claim 1 configured to measure the shape of the structured object shaped by the shaping device; and a control device configured to compare the designing information and shape information indicating the shape of the structured object measured by the shape measuring device. ### Claim 24 A shape measuring method that projects a pattern onto a measurement target, acquires picture image data by capturing a picture image of an image of the pattern projected onto the measurement target in a direction different from a projection direction of the pattern, and measures the shape of the measurement target based on the image of the pattern of the picture image data, the shape measuring method comprising: moving a projected position of the pattern relative to the measurement target; setting a region of interest for acquiring information used to measure the measurement target to be in at least part of a region captured by the image capturing unit, so as to include the image of the pattern; measuring a shape of the measurement target based on a position of the image of the pattern positioned in the region of interest of the picture image data; and setting a reference region-of-interest in part of the region captured by the image capturing unit, wherein determining whether to set the region of interest based on a state of the image of the pattern in the reference region-of-interest, and setting the region of interest in a case where the image of the pattern is in the reference region-of-interest. ### Claim 25 (depends on 24) A structured object manufacturing method comprising: shaping a structured object based on designing information related to the shape of the structured object; measuring the shape of the shaped structured object by the shape measuring method according to claim 24; and comparing the designing information and shape information indicating the measured shape of the structured object. ### Claim 26 A non-transitory computer readable recording medium storing a shape measuring program that projects a pattern onto a measurement target, acquires picture image data by capturing a picture image of an image of the pattern projected onto the measurement target in a direction different from a projection direction of the pattern, and measures the shape of the measurement target based on the image of the pattern of the picture image data, the shape measuring program being configured to cause a computer to execute: moving a projected position of the pattern relative to the measurement target; setting a region of interest for acquiring information used to measure the measurement target to be in at least part of a region captured by the image capturing unit, so as to include the image of the pattern; measuring a shape of the measurement target based on a position of the image of the pattern positioned in the region of interest of the picture image data; and setting a reference region-of-interest in part of the region captured by the image capturing unit, wherein determining whether to set the region of interest based on a state of the image of the pattern in the reference region-of-interest, and setting the region of interest in a case where the image of the pattern is in the reference region-of-interest. ### Claim 27 A shape measuring device comprising: a projection unit configured to project a pattern of light onto a measurement target; an image capturing unit configured to capture a picture image of a measurement target onto which the pattern of light is projected by the projection unit; a movement unit capable of moving a projected position of the pattern of light on the measurement target by relatively moving the projection unit and the measurement target; a region-of-interest setting unit configured to change a position of a region-of-interest in accordance with a movement of the image of the pattern of light in a capturing area captured by the image capturing unit, the region-of-interest being for acquiring information used to measure the measurement target, and being set to include the image of the pattern of light at least in part of the capturing area; and a measurement unit configured to measure a shape of the measurement target based on a position of the image of the pattern of light in the region-of-interest, wherein the region-of-interest setting unit changes the position of the region-of-interest based on at least one of a moving distance and a moving direction of the image of the pattern of light in the capturing area of the image capturing unit, the moving distance and the moving direction being with a relative movement of the projection unit and the measurement target performed by the movement unit. ### Claim 28 A shape measuring device comprising: a projection unit configured to project a pattern of light onto a measurement target; an image capturing unit configured to capture a picture image of a measurement target onto which the pattern of light is projected by the projection unit; a movement unit capable of moving a projected position of the pattern of light on the measurement target by relatively moving the projection unit and the measurement target; a region-of-interest setting unit configured to change a position of a region-of-interest in accordance with a movement of the image of the pattern of light in a capturing area captured by the image capturing unit, the region-of-interest being for acquiring information used to measure the measurement target, and being set to include the image of the pattern of light at least in part of the capturing area; and a measurement unit configured to measure a shape of the measurement target based on a position of the image of the pattern of light in the region-of-interest, wherein the region-of-interest setting unit changes the position of the region-of-interest based on a distance between the image of the pattern of light and an edge of the region-of-interest. ### Claim 29 (depends on 28) The shape measuring device according to claim 28, wherein, the region-of-interest setting unit determines whether to change the position of the region-of-interest based on the distance between the image of the pattern of light and an edge of the region-of-interest, and, in case where the distance is same as or less than a predetermined distance, changes the position of the region-of-interest to make the distance longer than the predetermined distance. ### Claim 30 (depends on 27) A structured object manufacturing system comprising: a shaping device configured to shape a structured object based on designing information related to the shape of the structured object; the shape measuring device according to claim 27 configured to measure the shape of the structured object shaped by the shaping device; and a control device configured to compare the designing information and shape information indicating the shape of the structured object measured by the shape measuring device. ### Claim 31 A non-transitory computer readable recording medium storing a shape measuring program that projects a pattern of light onto a measurement target, acquires picture image data by capturing a picture image of an image of the pattern of light projected onto the measurement target in a direction different from a projection direction of the pattern of light, and measures the shape of the measurement target based on the image of the pattern of light of the picture image data, the shape measuring program being configured to cause a computer to execute: moving a projected position of the pattern of light relative to the measurement target; changing a position of a region-of-interest in accordance with a movement of the image of the pattern of light in a capturing area which is captured, the region-of-interest being for acquiring information used to measure the measurement target, and being set to include the image of the pattern of light at least in part of the capturing area; measuring a shape of the measurement target based on a position of the image of the pattern of light in the region-of the-interest; and changing the position of the region-of-interest based on at least one of a moving distance and a moving direction of the image of the pattern of light in the capturing area, the moving distance and the moving direction being with a relative movement of the projection unit and the measurement target. ### Claim 32 A non-transitory computer readable recording medium storing a shape measuring program that projects a pattern of light onto a measurement target, acquires picture image data by capturing a picture image of an image of the pattern of light projected onto the measurement target in a direction different from a projection direction of the pattern of light, and measures the shape of the measurement target based on the image of the pattern of light of the picture image data, the shape measuring program being configured to cause a computer to execute: moving a projected position of the pattern of light relative to the measurement target; changing a position of a region-of-interest in accordance with a movement of the image of the pattern of light in a capturing area which is captured, the region-of-interest being for acquiring information used to measure the measurement target, and being set to include the image of the pattern of light at least in part of the capturing area; measuring a shape of the measurement target based on a position of the image of the pattern of light in the region-of the-interest; and changing the position of the region-of-interest based on a distance between the image of the pattern of light and an edge of the region-of-interest.