# US 10,482,587 B2 · Apparatus having transfer control based on imaged image > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,482,587 B2 - Document ID: US10482587B2 - Status: Granted - Kind: B2 - Application number: 15/424,239 - Filed: 2017-02-03 - Published: 2017-08-17 - Granted: 2019-11-19 - Earliest claimed: 2016-02-12 - Assignees: Disco Corporation - Applicants: Disco Corporation - Inventors: Katsuharu Negishi; Kazunari Tanaka - Web page: https://patentgrep.com/patent/US10482587B2 ## CPC - H10P 72/0428: {Apparatus for mechanical treatment or grinding or cutting} - G06F 18/22: Matching criteria, e.g. proximity measures - G06T 7/0004: {Industrial image inspection} - G06V 10/75: Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries - H04N 23/63: by using electronic viewfinders - H10P 54/00: Cutting or separating of wafers, substrates or parts of devices - H10P 72/0616: {Monitoring of warpages, curvatures, damages, defects or the like} - H10P 72/53: {using optical controlling means} - G06T 2207/30148: Semiconductor; IC; Wafer - G06V 2201/06: Recognition of objects for industrial automation - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract Disclosed herein is an apparatus including an imaging unit configured to image a region in which a holding unit is moved by operation of a moving unit, a basic image storage unit configured to store a basic image corresponding to proper operation of the holding unit or an action unit, and a controller configured to compare an image imaged by the imaging unit with the basic image stored by the basic image storage unit, and control the moving unit or the action unit such that the two images coincide with each other. ## Claims ### Claim 1 An apparatus comprising: a holding means for holding a workpiece; an action means for applying action to the workpiece held by the holding means; a moving means for moving the holding means and the action means relative to each other; an imaging means for imaging a region in which the holding means is moved by operation of the moving means, wherein the region includes at least two of the following specific elements: the workpiece, the holding means and the action means; a basic image storing means for storing a basic image corresponding to proper operation of the holding means or the action means, wherein the basic image storing means includes a memory; and a control means for comparing an image imaged by the imaging means with the basic image stored by the basic image storing means, and controlling the moving means or the action means such that the two images coincide with each other, wherein the comparing an image imaged by the imaging means with the basic image includes verifying that a positional relation between at least two of said specific elements of the region imaged by the imaging means coincides with a corresponding positional relation in the basic image stored in the basic image storing means. ### Claim 2 (depends on 1) The apparatus according to claim 1, further comprising: a display means, wherein the control means makes the display means make error display when the two images do not coincide with each other even after the control means compares the image imaged by the imaging means with the basic image stored by the basic image storing means and controls the moving means or the action means such that the two images coincide with each other. ### Claim 3 (depends on 1) The apparatus according to claim 1, wherein the apparatus is one of a dicing apparatus, a laser processing apparatus, and a grinding apparatus. ### Claim 4 (depends on 1) The apparatus according to claim 1, wherein the action means is selected from the group consisting of a temporary placement part, a chuck table, an alignment means, a spindle unit, a cleaning means, and a cassette. ### Claim 5 (depends on 1) The apparatus according to claim 1, wherein the holding means is selected from the group consisting of a chuck table, a suction holding mechanism fitted to an actuating arm, and a workpiece carrying-in/out means. ### Claim 6 (depends on 1) The apparatus according to claim 1, wherein said moving means is configured and arranged for moving an associated one of said holding means from a position associated with one of said action means to a position associated with another of said action means. ### Claim 7 (depends on 1) The apparatus according to claim 1, wherein: the action means is a chuck table; and the holding means is a suction holding mechanism fitted to an actuating arm. ### Claim 8 (depends on 1) The apparatus according to claim 1, wherein: the action means is an alignment means; and the holding means is a chuck table. ### Claim 9 (depends on 1) The apparatus according to claim 1, wherein: the action means is a cleaning means; and the holding means is a suction holding mechanism fitted to an actuating arm. ### Claim 10 (depends on 1) The apparatus according to claim 1, wherein: the action means is a cassette; and the holding means is a workpiece carrying-in/out means. ### Claim 11 An apparatus comprising: a holding means for holding a workpiece; an action means for applying action to the workpiece held by the holding means; a moving means for moving the holding means and the action means relative to each other, wherein the moving means includes an actuating arm coupled to a motor; an imaging means for imaging a region in which the holding means is moved by operation of the moving means; a basic image storing means for storing a basic image corresponding to proper operation of the holding means or the action means, wherein the basic image storing means includes a memory; and a control means for comparing an image imaged by the imaging means with the basic image stored by the basic image storing means, and controlling the moving means or the action means such that the two images coincide with each other, wherein the comparing an image imaged by the imaging means with the basic image includes verifying that a positional relation between at least two specific elements of the region imaged by the imaging means coincides with a corresponding positional relation of said at least two specific elements in the basic image stored in the basic image storing means. ### Claim 12 (depends on 11) The apparatus according to claim 11, further comprising: display means, wherein the control means makes the display means make error display when the two images do not coincide with each other even after the control means compares the image imaged by the imaging means with the basic image stored by the basic image storing means and controls the moving means or the action means such that the two images coincide with each other. ### Claim 13 (depends on 11) The apparatus according to claim 11, wherein the apparatus is one of a dicing apparatus, a laser processing apparatus, and a grinding apparatus. ### Claim 14 (depends on 11) The apparatus according to claim 11, wherein the action means is selected from the group consisting of a temporary placement part, a chuck table, an alignment means, a spindle unit, a cleaning means, and a cassette. ### Claim 15 (depends on 11) The apparatus according to claim 11, wherein the holding means is selected from the group consisting of a chuck table, a suction holding mechanism fitted to an actuating arm, and a workpiece carrying-in/out means. ### Claim 16 An apparatus, wherein the apparatus includes a plurality of positions each configured and arranged for performing an action upon a workpiece, the apparatus comprising: a holding means for holding the workpiece; a moving means for moving the holding means with the workpiece thereon from one of said positions to another of said positions; an imaging means for imaging a region in which the holding means is moved by operation of the moving means; a basic image storing means for storing a basic image corresponding to proper operation of the holding means, wherein the basic image storing means includes a memory; and a control means for comparing an image imaged by the imaging means with the basic image stored by the basic image storing means, and controlling the moving means such that the two images coincide with each other, wherein the comparing an image imaged by the imaging means with the basic image includes verifying that a positional relation between at least two specific elements of the region imaged by the imaging means coincides with a corresponding positional relation of said at least two specific elements in the basic image stored in the basic image storing means. ### Claim 17 (depends on 16) The apparatus according to claim 16, further comprising: display means, wherein the control means makes the display means make error display when the two images do not coincide with each other even after the control means compares the image imaged by the imaging means with the basic image stored by the basic image storing means and controls the moving means or the action means such that the two images coincide with each other. ### Claim 18 (depends on 17) The apparatus according to claim 17, wherein: the apparatus is a dicing apparatus, that includes a spindle unit configured and arranged to dice the workpiece with a rotating cutting blade, the holding means comprises a chuck table, and the moving means comprises means for moving the chuck table to and from an operational position with respect to the spindle unit. ### Claim 19 (depends on 1) The apparatus according to claim 1, wherein the basic image comprises: a first basic image depicting a start state of the specific elements in the region; and a second basic image of a completion state of the specific elements in the region. ### Claim 20 (depends on 11) The apparatus according to claim 11, wherein the basic image comprises: a first basic image depicting a start state of the specific elements in the region; and a second basic image of a completion state of the specific elements in the region.