# US 10,481,743 B2 · High-performance touch sensor and manufacturing method thereof

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- Number: US 10,481,743 B2
- Document ID: US10481743B2
- Status: Granted
- Kind: B2
- Application number: 15/907,976
- Filed: 2018-02-28
- Published: 2018-08-30
- Granted: 2019-11-19
- Earliest claimed: 2017-02-28
- Assignees: Dongwoo Fine-Chem Co., Ltd.
- Applicants: Dongwoo Fine-Chem Co., Ltd.
- Inventors: Yong Seok Choi; Jae Hyun Lee
- Web page: https://patentgrep.com/patent/US10481743B2

## CPC

- G06V 40/1306: {non-optical, e.g. ultrasonic or capacitive sensing}
- G01B 7/34: for measuring roughness or irregularity of surfaces
- G06F 3/0443: {using a single layer of sensing electrodes}
- G06F 3/0446: {using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes}
- G06F 2203/04102: Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
- G06F 2203/04103: Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
- G06F 2203/04111: Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
- G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)

## Abstract

Provided are a high-performance touch sensor and a method of manufacturing the same. The touch sense includes a substrate, a sense electrode part formed on the substrate, and an insulating layer formed on the sense electrode part. A pitch of a unit sense cell including the sense electrode part is in a range of 50 μm to 70 μm. A dielectric constant of the insulating layer is in a range of 6 to 10. A unit sense cell pitch and a mutual capacitance sufficient for stably identifying a user's fingerprints may be achieved and both light transmittance and visibility may be improved.

## Claims

### Claim 1

A high-performance touch sensor comprising:
a substrate;
a sense electrode part formed on the substrate;
an insulating layer formed on the sense electrode part;
an isolation layer formed between the substrate and the sense electrode part;
a first protective layer formed between the isolation layer and the sense electrode part; and
a second protective layer formed to cover the sense electrode part and the insulating layer,
wherein a pitch of a unit sense cell including the sense electrode part is in a range of 50 μtm to 70 μtm, and
a dielectric constant of the insulating layer is in a range of 6 to 10
wherein a material of the insulating layer is acryl-based resin.

### Claim 2 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the insulating layer has a thickness of 1 μm to 2 μm.

### Claim 3 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the insulating layer has a refractive index of 1.5 to 2.0.

### Claim 4 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the unit sense cell has an area of 2000 μm2 to 4000 μm2.

### Claim 5 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the sense electrode part included in the unit sense cell has an area of 2,300 μm2 to 2,600 μm2.

### Claim 6 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the substrate comprises a soft material or a hard material.

### Claim 7 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the substrate comprises a flexible substrate.

### Claim 8 (depends on 1)

The high-performance touch sensor according to claim 1, wherein the unit sense cell has a mutual capacitance of 8 fF to 15 fF.

### Claim 9

A method of manufacturing a high-performance touch sensor, the method comprising:
forming an isolation layer on a carrier substrate;
forming a first protective later on the isolation layer;
forming a sense electrode part on the carrier substrate;
forming an insulating layer on the sense electrode part;
forming a second protective layer covering the sense electrode part and the insulating layer;
separating the carrier substrate; and
bonding a base film having flexibility on the isolation layer exposed due to the separation of the carrier substrate,
wherein a pitch of a unit sense cell including the sense electrode part is in a range of 50 μm to 70 μm, and
a dielectric constant of the insulating layer is in a range of 6 to 10,
wherein a material of the insulating layer is acryl-based resin.

### Claim 10 (depends on 9)

The method according to claim 9, wherein the insulating layer has a thickness of 1 μm to 2 μm.

### Claim 11 (depends on 9)

The method according to claim 9, wherein the insulating layer has a refractive index of 1.5 to 2.0.

### Claim 12 (depends on 9)

The method according to claim 9, wherein the unit sense cell has an area of 2000 μm2 to 4000 μm2.

### Claim 13 (depends on 9)

The method according to claim 9, wherein the sense electrode part included in the unit sense cell has an area of 2,300 μm2 to 2,600 μm2.

### Claim 14 (depends on 9)

The method according to claim 9, wherein the substrate comprises a soft material or a hard material.

### Claim 15 (depends on 9)

The method according to claim 9, wherein the first protective layer is formed to cover side walls of the isolation layer.

### Claim 16 (depends on 9)

The method according to claim 9, wherein the unit sense cell has a mutual capacitance of 8 fF to 15 fF.
