# US 10,481,509 B2 · Vibration damping apparatus, lithography apparatus, and method of manufacturing article > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,481,509 B2 - Document ID: US10481509B2 - Status: Granted - Kind: B2 - Application number: 16/291,119 - Filed: 2019-03-04 - Published: 2019-09-12 - Granted: 2019-11-19 - Earliest claimed: 2018-03-08 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Yoshihiro Morimoto; Hiromichi Hara; Masahiko Ogawa; Ryo Takai - Web page: https://patentgrep.com/patent/US10481509B2 ## CPC - G03F 7/709: {Vibration, e.g. vibration detection, compensation, suppression or isolation} - G02B 7/026: {using retaining rings or springs (G02B7/027 takes precedence)} - G02B 27/646: {compensating for small deviations, e.g. due to vibration or shake (movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68)} - G03F 7/70825: {Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707)} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS ## Abstract The present invention provides a vibration damping apparatus that performs vibration damping of a first optical element among a plurality of optical elements arranged in a barrel, comprising: a holding member connected to the barrel and configured to hold the first optical element; and a mass body supported by the holding member via a damper element, wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements. ## Claims ### Claim 1 A vibration damping apparatus that performs vibration damping of a first optical element among a plurality of optical elements arranged in a barrel, comprising: a holding member connected to the barrel and configured to hold the first optical element; and a mass body spaced apart from the barrel and supported by the holding member via a damper element, wherein the mass body includes a second optical element arranged in the barrel and different from the first optical element among the plurality of optical elements. ### Claim 2 (depends on 1) The apparatus according to claim 1, further comprising a connecting member configured to connect the barrel and the holding member so as to attenuate the vibration from the barrel. ### Claim 3 (depends on 2) The apparatus according to claim 2, wherein the holding member includes a cutout portion between a holding portion of the first optical element and a connecting portion to the connecting member. ### Claim 4 (depends on 2) The apparatus according to claim 2, wherein the holding member includes a cutout portion between a holding portion of the first optical element and a connecting portion to the damper element. ### Claim 5 (depends on 2) The apparatus according to claim 2, wherein a natural frequency of the mass body supported by the damper element is different from a natural frequency of the first optical element supported by the connecting member. ### Claim 6 (depends on 1) The apparatus according to claim 1, wherein the first optical element and the second optical element have different changing amounts of optical characteristics from each other with respect to a positional fluctuation amount. ### Claim 7 (depends on 1) The apparatus according to claim 1, wherein the first optical element and the second optical element have different masses from each other. ### Claim 8 (depends on 1) The apparatus according to claim 1, wherein the first optical element and the second optical element have different refractive powers from each other. ### Claim 9 A lithography apparatus that forms a pattern on a substrate, comprising: an optical system that includes a plurality of optical elements arranged in a barrel; and a vibration damping apparatus configured to perform vibration damping on a first optical element among the plurality of optical elements arranged in the barrel, wherein the vibration damping apparatus includes: a holding member connected to the barrel and configured to hold the first optical element; and a mass body spaced apart from the barrel and supported by the holding member via a damper element, and wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements. ### Claim 10 A method of manufacturing an article, the method comprising: forming a pattern on a substrate using a lithography apparatus; processing the substrate, on which the pattern has been formed, to manufacture the article, wherein the lithography apparatus that forms a pattern on the substrate, comprising: an optical system that includes a plurality of optical elements arranged in a barrel; and a vibration damping apparatus configured to perform vibration damping on a first optical element among the plurality of optical elements arranged in the barrel, wherein the vibration damping apparatus includes: a holding member connected to the barrel and configured to hold the first optical element; and a mass body spaced apart from the barrel and supported by the holding member via a damper element, and wherein the mass body includes a second optical element different from the first optical element among the plurality of optical elements. ### Claim 11 A vibration damping apparatus that performs vibration damping on a first optical element and a second optical element among a plurality of optical elements arranged in a barrel, comprising: a first holding member connected to the barrel and configured to hold the first optical element; a second holding member connected to the barrel and configured to hold the second optical element; and a mass body connected to the first holding member via a first damper element and to the second holding member via a second damper element. ### Claim 12 (depends on 11) The apparatus according to claim 11, wherein the mass body includes a third optical element different from the first optical element and the second optical element among the plurality of optical elements. ### Claim 13 (depends on 11) The apparatus according to claim 11, further comprising: a first connecting member configured to connect the first holding member and the barrel so as to attenuate the vibration from the barrel; and a second connecting member configured to connect the second holding member to the barrel so as to attenuate the vibration from the barrel. ### Claim 14 (depends on 13) The apparatus according to claim 13, wherein a natural frequency of the mass body supported by the first damper element and the second damper element is different from a natural frequency of the first optical element supported by the first connecting member and a natural frequency of the second optical element supported by the second connecting member. ### Claim 15 A lithography apparatus that forms a pattern on a substrate, comprising: an optical system that includes a plurality of optical elements arranged in a barrel; and a vibration damping apparatus configured to perform vibration damping on a first optical element and a second optical element among the plurality of optical elements arranged in the barrel, wherein the vibration damping apparatus includes: a first holding member connected to the barrel and configured to hold the first optical element; a second holding member connected to the barrel and configured to hold the second optical element; and a mass body connected to the first holding member via a first damper element and to the second holding member via a second damper element. ### Claim 16 A method of manufacturing an article, the method comprising: forming a pattern on a substrate using a lithography apparatus; processing the substrate, on which the pattern has been formed, to manufacture the article, wherein the lithography apparatus that forms a pattern on a substrate, comprising: an optical system that includes a plurality of optical elements arranged in a barrel; and a vibration damping apparatus configured to perform vibration damping on a first optical element and a second optical element among the plurality of optical elements arranged in the barrel, and wherein the vibration damping apparatus includes: a first holding member connected to the barrel and configured to hold the first optical element; a second holding member connected to the barrel and configured to hold the second optical element; and a mass body connected to the first holding member via a first damper element and to the second holding member via a second damper element. ### Claim 17 A vibration damping apparatus that performs vibration damping on a first optical element and a second optical element among a plurality of optical elements arranged in a barrel; comprising: a first holding member connected to the barrel and configured to hold the first optical element; and a second holding member connected to the barrel and configured to hold the second optical element, wherein the first holding member and the second holding member are connected to each other by a damper element. ### Claim 18 (depends on 17) The apparatus according to claim 17, further comprising: a first connecting member configured to connect the first holding member and the barrel so as to attenuate the vibration from the barrel; and a second connecting member configured to connect the second holding member and the barrel so as to attenuate the vibration from the barrel. ### Claim 19 (depends on 18) The apparatus according to claim 18, wherein a natural frequency of the first optical element supported by the first connecting member and a natural frequency of the second optical element supported by the second connecting member are different from each other. ### Claim 20 A lithography apparatus that forms a pattern on a substrate, comprising: an optical system including a plurality of optical elements arranged in a barrel; and a vibration damping apparatus configured to perform vibration damping on a first optical element and a second optical element among the plurality of optical elements arranged in the barrel, wherein the vibration damping apparatus includes: a first holding member connected to the barrel and configured to hold the first optical element; and a second holding member connected to the barrel and configured to hold the second optical element, and wherein the first holding member and the second holding member are connected to each other by a damper element. ### Claim 21 (depends on 1) The apparatus according to claim 1, wherein each of the plurality of optical elements is at least one of a lens, a mirror, a diffraction grating and a parallel plate. ### Claim 22 (depends on 1) The apparatus according to claim 1, wherein the plurality of optical elements is arranged in the barrel of a projection optical system for projecting a pattern of a mask onto a substrate, or an illumination optical system for illuminating the mask. ### Claim 23 (depends on 11) The apparatus according to claim 11, wherein the mass body is spaced apart from the barrel. ### Claim 24 (depends on 11) The apparatus according to claim 11, further comprising: the first damper element configured to connect the mass body and the first holding member to each other without interposing the barrel; the second damper element configured to connect the mass body and the second holding member to each other without interposing the barrel. ### Claim 25 (depends on 17) The apparatus according to claim 17, further comprising the damper element configured to connect the first holding member and the second holding member to each other without interposing the barrel.