Imprint apparatus and method of manufacturing article

An imprint apparatus which performs molding of an imprint material on a substrate to form a pattern on the substrate, the apparatus comprising:

• a supply device including discharge ports which discharge the imprint material, and configured to supply the imprint material onto the substrate via the discharge ports;
• and
• a controller configured to cause, if there is a defective discharge port of the discharge ports, the supply device to discharge the imprint material from another discharge port, different from the defective discharge port, of the discharge ports,
• wherein a mold for the molding includes a line pattern, and
• the controller is configured to control the supply device such that intervals each of which between adjacent supply positions of the imprint material become closer to a constant interval in a direction along the line pattern than those before change from the defective discharge port to the other discharge port.

An imprint apparatus which performs molding of an imprint material on a substrate to form a pattern on the substrate, the apparatus comprising:

• a supply device including discharge ports which discharge the imprint material, and configured to supply the imprint material onto the substrate via the discharge ports based on a map;
• and
• a controller configured to cause, if there is a defective discharge port of the discharge ports, the supply device to discharge the imprint material from another discharge outlet, different from the defective discharge port, of the discharge ports, based on an updated map,
• wherein the controller is configured to change a time for filling a mold for the molding with the imprint material based on change from the defective discharge port to the other discharge port based on the updated map, to prevent droplets of the imprint material discharged from the discharge ports from being separated from each other by a predetermined distance or more.

An imprint apparatus which performs molding of an imprint material on a substrate to form a pattern on the substrate, the apparatus comprising:

• a supply device including discharge ports which discharge the imprint material, and configured to supply the imprint material onto the substrate via the discharge ports based on a map;
• and
• a controller configured to cause, if there is a defective discharge port of the discharge ports, the supply device to discharge the imprint material from another discharge port, different from the defective discharge port, of the discharge ports based on an updated map,
• wherein the controller is configured to control the supply device and a relative position between the supply device and the substrate, based on the updated map, to prevent droplets of the imprint material discharged from the discharge ports from being separated from each other by a predetermined distance or more, wherein the imprint material is supplied from the other discharge port to a supply position on the substrate of the imprint material which should have been supplied from the defective discharge port.