# US 10,481,467 B2 · Terahertz wave generation apparatus and inspection apparatus

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- Number: US 10,481,467 B2
- Document ID: US10481467B2
- Status: Granted
- Kind: B2
- Application number: 15/982,214
- Filed: 2018-05-17
- Published: 2018-11-22
- Granted: 2019-11-19
- Earliest claimed: 2017-05-22
- Assignees: Ricoh Company, Ltd.; PHLUXi, Inc.
- Applicants: Takumi Satoh; Yasuhiro Higashi; Yoshio Wada; Toshiyuki Ikeoh; Yoshiharu Urata
- Inventors: Takumi Satoh; Yasuhiro Higashi; Yoshio Wada; Toshiyuki Ikeoh; Yoshiharu Urata
- Web page: https://patentgrep.com/patent/US10481467B2

## CPC

- G02F 1/3534: {Three-wave interaction, e.g. sum-difference frequency generation (G02F1/3532 takes precedence)}
- G01N 21/3581: using far infrared light; using Terahertz radiation
- G01N 21/3586: by Terahertz time domain spectroscopy [THz-TDS]
- G02F 3/024: {based on non-linear elements, e.g. non-linear Fabry-Perot cavity (G02F3/028 takes precedence)}
- G02F 3/026: {based on laser effects}
- G02F 2203/13: involving THZ radiation
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

A terahertz wave generation apparatus includes a plurality of laser light sources configured to generate laser beams respectively having different wavelengths; and a terahertz wave generating element configured to receive the laser beams having different wavelengths and generate a terahertz wave from the laser beams. The plurality of laser light sources include fiber laser light sources respectively including parameters that can be controlled independently, and the terahertz wave generating element includes a nonlinear optical crystal.

## Claims

### Claim 1

A terahertz wave generation apparatus comprising:
a plurality of fiber laser light sources configured to generate laser beams respectively having different wavelengths; and
a terahertz wave generating element configured to receive the laser beams having different wavelengths and generate a terahertz wave from the laser beams,
wherein the plurality of fiber laser light sources include fiber laser light sources respectively including parameters that can be controlled independently, and the terahertz wave generating element includes a nonlinear optical crystal, said parameters being at least one of a pulse width, a repetition frequency and movements of the fiber laser light sources that emit the laser beams, and
wherein the terahertz wave generation apparatus is configured to change an incident angle at which the laser beams enter the terahertz wave generating element by controlling the movements of the fiber laser light sources that emit the laser beams.

### Claim 2 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein the nonlinear optical crystal includes lithium niobate.

### Claim 3 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein the nonlinear optical crystal includes MgO-doped lithium niobate.

### Claim 4 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein the nonlinear optical crystal includes gallium phosphide.

### Claim 5 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein the laser beams having different wavelengths are emitted in parallel to each other, and distances between the laser beams can be changed.

### Claim 6 (depends on 5)

The terahertz wave generation apparatus according to claim 5, wherein the laser beams respectively emitted from the fiber laser light sources are condensed by a single optical member.

### Claim 7 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein the nonlinear optical crystal includes a 4-N, N-dimethylamino-4′-N′-methylstilbazolium tosylate or a N-benzyl-2-methyl-4-nitroaniline.

### Claim 8 (depends on 1)

An inspection apparatus comprising:
the terahertz wave generation apparatus according to claim 1, wherein
the inspection apparatus is configured to irradiate an inspection target object with the terahertz wave generated by the terahertz wave generating element, and inspect the inspection target object.

### Claim 9 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein said at least one of the plurality of fiber laser light sources include the fiber laser light sources configured to control the pulse width.

### Claim 10 (depends on 1)

The terahertz wave generation apparatus according to claim 1, wherein said at least one of the plurality of fiber laser light sources include the fiber laser light sources configured to control the repetition frequency.