# US 10,481,404 B1 · Rectangular cavity optical beam shaper and method of manufacturing the same

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- Number: US 10,481,404 B1
- Document ID: US10481404B1
- Status: Granted
- Kind: B1
- Application number: 15/978,420
- Filed: 2018-05-14
- Published: 2019-11-14
- Granted: 2019-11-19
- Earliest claimed: 2018-05-14
- Assignees: Palo Alto Research Center Incorporated
- Applicants: Palo Alto Research Center Incorporated
- Inventors: Christopher L. Chua; Yu Wang; David K. Biegelsen; Patrick Yasuo Maeda
- Web page: https://patentgrep.com/patent/US10481404B1

## CPC

- G02B 27/0977: {Reflective elements}
- G02B 27/0927: {Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat}
- G02B 27/0994: {Fibers, light pipes (optical fibers per se G02B6/02)}
- H10P 14/3456: {Polycrystalline}
- H10P 50/283: {by chemical means}
- H10P 50/73: {using masks for insulating materials}
- H10P 54/00: Cutting or separating of wafers, substrates or parts of devices
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A light beam shaper has a rectangular cavity bounded by wafer sidewalls and top and bottom caps. The top and bottom caps are wafer-bonded onto opposing surfaces of the wafer. A reflective coating covers inner surfaces of the cavity. A geometry of the cavity changes a light beam entering the cavity into a rectangular beam profile with uniform spatial intensity at the output.

## Claims

### Claim 1

A light beam shaper, comprising,
a wafer of crystalline semiconductor comprising a plurality of elongated channels separated by a plurality of elongated walls, the wafer being diced along a plurality of parallel lines that are at a non-zero angle to a longitudinal axis of the elongated channels such that the diced elongated walls form a plurality of wafer sidewalls;
top and bottom caps wafer-bonded onto opposing surfaces of the wafer to form a rectangular cavity bounded by two of the wafer sidewalls; and
a reflective coating on inner surfaces of the cavity, wherein a geometry of the cavity changes a light beam entering the cavity into a rectangular beam profile.

### Claim 2 (depends on 1)

The light beam shaper of claim 1, wherein the opposing surfaces of the wafer have a crystalline orientation of <110> and surfaces of the wafer sidewalls facing the rectangular cavity have a <111> crystal orientation.

### Claim 3 (depends on 1)

The light beam shaper of claim 1, wherein at least one of the top and bottom caps has a thermal expansion coefficient that is less than 30 times a thermal expansion coefficient of the wafer.

### Claim 4 (depends on 1)

The light beam shaper of claim 1, wherein at least one of the top and bottom caps comprises at least one of glass, semiconductor, polymer, and metal.

### Claim 5 (depends on 4)

The light beam shaper of claim 4, wherein the glass comprises a fluoroboric glass.

### Claim 6 (depends on 1)

The light beam shaper of claim 1, wherein the reflective coating comprises one or both of a metal and a dielectric.

### Claim 7 (depends on 6)

The light beam shaper of claim 6, wherein the reflective coating comprises the metal overcoated by the dielectric, the dielectric being phase-matched to a wavelength of the light beam.

### Claim 8 (depends on 6)

The light beam shaper of claim 6, wherein the reflective coating comprises the metal overcoated by polystyrene.

### Claim 9 (depends on 6)

The light beam shaper of claim 6, wherein the dielectric completely fills the cavity.

### Claim 10 (depends on 1)

The light beam shaper of claim 1, wherein light coupled into an entry end of the cavity exits with a spatial intensity profile that varies by no more than 35% at an exit end of the cavity.

### Claim 11 (depends on 1)

The light beam shaper of claim 1, wherein sides of the wafer sidewalls have a thickness that defines a height of the cavity, the thickness being less than 600 μm.

### Claim 12 (depends on 1)

An optical assembly comprising:
the light beam shaper of claim 1;
optical fiber; and
a coupler that aligns the optical fiber to a center of the cavity of the light beam shaper and mechanically secures the optical fiber to the light beam shaper.

### Claim 13

An article of manufacture, comprising:
a semiconductor wafer comprising a plurality of elongated channels separated by elongated walls;
first and second wafers bonded to opposing sides of the semiconductor wafer, the first and second wafers enclosing the elongated channels to form rectangular cavities, the semiconductor wafer and first and second wafers being diced along a plurality of parallel lines that are at a non-zero angle to a longitudinal axis of the elongated channels to form a plurality of optical beam shapers; and
a reflective coating on at least inner surfaces of the cavities of the optical beam shapers.

### Claim 14 (depends on 13)

The article of manufacture of claim 13, wherein the semiconductor wafer comprises crystalline Si with the opposing surfaces having a crystalline orientation of <110>.

### Claim 15

A method, comprising:
polishing opposing surfaces of a crystalline wafer, the opposing surfaces having a first crystal orientation;
depositing a mask on one of the opposing surfaces;
patterning the mask to define openings;
etching elongated channels in the crystalline wafer through the openings, edges of the elongated channels forming sidewalls having a second crystal orientation resulting in the sidewalls being at right angles to the opposing surfaces;
removing the mask;
bonding first and second wafers to opposing surfaces of the crystalline wafer to form a wafer stack, the first and second wafers enclosing the elongated channels;
dicing the wafer stack along parallel lines that are at a non-zero angle to a longitudinal axis of the elongated channels to form a plurality of light beam shapers, the enclosed elongated channels forming cavities of the light beam shapers; and
applying a reflective coating to the inner surfaces of the cavities.

### Claim 16 (depends on 15)

The method of claim 15, wherein the bonding of the first and second wafers to the opposing surfaces of the crystalline wafer comprises anodic bonding.

### Claim 17 (depends on 15)

The method of claim 15, wherein the mask comprises Ni.

### Claim 18 (depends on 15)

The method of claim 15, wherein the elongated channels are etched with KOH.

### Claim 19 (depends on 15)

The method of claim 15, wherein applying the reflective coating comprises flowing an AgNO3 solution through the cavities of the optical beam shapers.

### Claim 20 (depends on 19)

The method of claim 19, where applying the reflective coating further comprises flowing a SnCl2 solution through the cavities before flowing the AgNO3 solution.

### Claim 21 (depends on 15)

The method of claim 15, further comprising applying a transparent polymer coating to the reflective coating.

### Claim 22 (depends on 15)

The method of claim 15, wherein etching the elongated channels in the crystalline wafer comprises dry etching.

### Claim 23 (depends on 1)

The light beam shaper of claim 1, wherein the top and bottom caps are anodically wafer-bonded onto the opposing surfaces of the wafer.