# US 10,481,390 B2 · Optical scanning device and manufacturing method of optical scanning device

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 10,481,390 B2
- Document ID: US10481390B2
- Status: Granted
- Kind: B2
- Application number: 15/699,346
- Filed: 2017-09-08
- Published: 2018-03-29
- Granted: 2019-11-19
- Earliest claimed: 2016-09-29
- Assignees: Mitsumi Electric Co., Ltd.
- Applicants: Yuki Maruyama; Tsukasa Yamada
- Inventors: Yuki Maruyama; Tsukasa Yamada
- Web page: https://patentgrep.com/patent/US10481390B2

## CPC

- G02B 26/0858: {the reflecting means being moved or deformed by piezoelectric means}
- B81B 3/0072: {For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers}
- G02B 26/10: Scanning systems
- B81B 2201/032: Bimorph and unimorph actuators, e.g. piezo and thermo
- B81B 2201/042: Micromirrors, not used as optical switches
- B81B 2203/058: Rotation out of a plane parallel to the substrate
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)

## Abstract

An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

## Claims

### Claim 1

An optical scanning device comprising:
a mirror that has an optical reflection surface;
a movable frame that supports the mirror;
a pair of drive beams that support the movable frame from both sides;
drive sources, disposed on the drive beams, that cause the movable frame to be swung around a predetermined axis; and
a fixed frame that supports the drive beams,
wherein each of the drive sources includes
a lower electrode formed on the drive beams,
a piezoelectric thin film formed on the lower electrode,
an upper electrode formed on the piezoelectric thin film, and
a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams, wherein
the drive beams are, in a state in which the mirror is stationary, supported in a state in which the drive beams are bent with respect to the fixed frame, wherein
ribs are formed on lower surfaces of the drive beams, and wherein the stress counter film generates the compressive stress and causes the drive beams to be bent in a direction of the lower surface on which the ribs are disposed.

### Claim 2 (depends on 1)

The optical scanning device according to claim 1, wherein ribs are disposed on lower surfaces of connection portions where the drive beams and the movable frame are connected and disposed on lower surfaces of portions where the adjacent drive beams are connected to each other.

### Claim 3 (depends on 1)

The optical scanning device according to claim 1, wherein the stress counter film is formed by a conductive material.

### Claim 4 (depends on 1)

The optical scanning device according to claim 1, wherein the stress counter film is formed by an alloy of titanium and tungsten.

### Claim 5

A manufacturing method of an optical scanning device that includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, drive sources, disposed on the drive beams, causing the movable frame to be swung around a predetermined axis, and a fixed frame supporting the drive beams, the manufacturing method comprising:
a step of forming a lower electrode on the drive beams;
a step of forming a piezoelectric thin film on the lower electrode;
a step of forming an upper electrode on the piezoelectric thin film; and
a step of forming a stress counter film on the upper electrode which generates a compressive stress on the drive beams according to a DC sputtering method, wherein
the drive beams are, in a state in which the mirror is stationary, supported in a state in which the drive beams are bent with respect to the fixed frame, wherein
ribs are formed on lower surfaces of the drive beams, and wherein the stress counter film generates the compressive stress and causes the drive beams to be bent in a direction of the lower surface on which the ribs are disposed.