# US 10,481,378 B2 · Interactive graphical representation of image quality and control thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,481,378 B2 - Document ID: US10481378B2 - Status: Granted - Kind: B2 - Application number: 15/232,760 - Filed: 2016-08-09 - Published: 2017-05-11 - Granted: 2019-11-19 - Earliest claimed: 2015-11-10 - Assignees: FEI Company - Applicants: FEI Company - Inventors: Pavel Poto{hacek over (c)}ek; Remco Schoenmakers - Web page: https://patentgrep.com/patent/US10481378B2 ## CPC - G02B 21/365: {Control or image processing arrangements for digital or video microscopes (G02B21/361, G02B21/362 take precedence)} - G02B 21/368: {details of associated display arrangements, e.g. mounting of LCD monitor} - G06T 7/0002: {Inspection of images, e.g. flaw detection} - G06T 11/26: Drawing of charts or graphs - H04N 17/002: {for television cameras} - G06T 2207/10056: Microscopic image - G06T 2207/30168: Image quality inspection - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G06T: IMAGE DATA PROCESSING OR GENERATION, IN GENERAL - H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION ## Abstract Systems and methods for controlling an imaging device are disclosed. In one aspect, a method determines a set of control parameters for the imaging device, and acquires an image based on the set of control parameters. The method determines a plurality of image quality measurements of the first image. A polygon may be displayed on an electronic display based on a plurality of image quality measurements. For example, positions of polygon vertices may be determined relative to an origin point based on corresponding image quality measurements. In some aspects, input may be received from a user interface indicating a change in position of one or more of the vertices and the corresponding image quality measurements. In some aspects, a new set of control parameters may then be determined to achieve the changed image quality measurement(s). In some aspects a composite measure of the image quality measurements may also be displayed. ## Claims ### Claim 1 A method, comprising: receiving a first image from an imaging device obtained based on a first set of image capture control parameters; determining, by processing the first image using a processor circuit, a plurality of image quality measurements of the first image and, based on the plurality of image quality measurements, a composite measure of image quality; displaying a polygon on an electronic display based on the plurality of image quality measurements, wherein displaying the polygon comprises: determining an origin point for the polygon; determining a plurality of vertices corresponding to the plurality of image quality measurements, each vertex a distance from the origin point proportional to a value of its corresponding image quality measurement; and displaying the polygon as a plurality of lines, each line connecting two of the plurality of vertices; displaying the composite measure of image quality based on the image quality measurements associated with the vertices corresponding to the plurality of image quality measurements; determining a second set of image capture control parameters for the imaging device based on the composite measure of image quality; and transmitting at least one of the second set of image capture control parameters for capture of a second image by the imaging device. ### Claim 2 (depends on 1) The method of claim 1, further comprising displaying the values of the plurality of image quality measurements of the first image along corresponding axes between the origin point and corresponding vertices. ### Claim 3 (depends on 1) The method of claim 1, further comprising acquiring the second image from the imaging device based on the second set of image capture control parameters. ### Claim 4 (depends on 3) The method of claim 3, wherein the second set of image capture control parameters includes at least one of a stigmator coil current and a dwell time. ### Claim 5 (depends on 1) The method of claim 1, wherein the imaging device is an electron microscope or an ion beam microscope. ### Claim 6 (depends on 3) The method of claim 3, wherein determining the second set of image capture control parameters comprises at least one of: determining a change in at least one of a focal plane position, a sample position, or a sample orientation in response to a change in a sharpness value, determining a change in at least one of an aperture opening, an illumination intensity level, or a shutter speed, in response to a change in a mean intensity value or a clipping value, determining a change in a stigmator coil current in response to a change in a stigmation value, and determining a change in a dwell time in response to a change in a signal to noise ratio. ### Claim 7 An apparatus for controlling an image capture device, the apparatus comprising: an electronic hardware processor; an electronic hardware memory, operably coupled to the electronic hardware processor, and storing instructions that when executed, cause the electronic hardware processor to: acquire an image via the image capture device based on a first set of image capture control parameters; determine a plurality of image quality measurements of the image; display a polygon on an electronic display based on the plurality of image quality measurements by: determining an origin point for the polygon; and determining a plurality of vertices corresponding to the plurality of image quality measurements, each vertex a distance from the origin point proportional to a value of a corresponding image quality measurement, wherein the polygon is displayed as a plurality of lines, each line connecting two of the plurality of vertices; based on the determined plurality of image quality measurements associated with the vertices, determine a composite measure of image quality; display a value associated with the composite measure of image quality on the electronic display; and determine a second set of image capture control parameters for the image capture device based on the composite measure of image quality. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the electronic memory stores further instructions that when executed, cause the electronic hardware processor to display one or more values of the image quality measurements along corresponding axes between the origin and corresponding vertices. ### Claim 9 (depends on 7) The apparatus of claim 7, wherein the electronic memory stores further instructions that when executed, cause transmission to the image capture device of at least one of the second set of image capture control parameters and cause the electronic hardware processor to acquire a second image with the image capture device based on the at least one of the second set of image capture control parameters. ### Claim 10 (depends on 7) The apparatus of claim 7, wherein the electronic hardware processor is configured to determine the second set of image capture control parameters by at least one of: determining a change in at least one of a focal plane position, a sample position, or a sample orientation in response to a change in a sharpness value; determining a change in at least one of an aperture opening, an illumination intensity level, or a shutter speed, in response to a change in a mean intensity value or a clipping value; determining a change in a stigmator coil current in response to a change in a stigmation value; and determining a change in a dwell time in response to a change in a signal to noise ratio. ### Claim 11 A non-transitory computer-readable storage medium having stored thereon instructions that, when executed, cause an electronic hardware processor of an image capture device to: acquire an image based on a set of image capture control parameters; determine a plurality of image quality measurements of the image; determine a composite measure of image quality based on a combination of the image quality measurements of the plurality of image quality measurements; display a polygon on an electronic display based on the plurality of image quality measurements by determining an origin point for the polygon and a plurality of vertices corresponding to the plurality of image quality measurements, each vertex a distance from the origin point proportional to a value of a corresponding image quality measurement, wherein the polygon is displayed as a plurality of lines, each line connecting two of the plurality of vertices; display a value corresponding to the composite measure of image quality within the polygon; determine an updated set of image capture control parameters for the image capture device based on the composite measure of image quality; transmit to the image capture device at least one of the second set of image capture control parameters for capture of a second image; and acquire a second image from the image capture device based on the updated set of the image capture control parameters. ### Claim 12 The apparatus of 7, wherein the image capture device is an electron beam microscope or an ion beam microscope, and at least the second set of image capture control parameters determined by the electronic hardware processor includes at least one of a stigmator coil current and a dwell time. ### Claim 13 The apparatus of 7, wherein the image capture device is an electron beam microscope or an ion beam microscope, and at least the second set of image capture control parameters determined by the electronic hardware processor includes a stigmator coil current. ### Claim 14 The apparatus of 12, wherein the image capture device is an electron beam microscope or an ion beam microscope, and the first and second sets of image capture control parameters determined by the electronic hardware processor include at least one of a stigmator coil current and a dwell time. ### Claim 15 The apparatus of 7, wherein the image capture device is a scanning microscope, and at least the second set of image capture control parameters determined by the electronic hardware processor includes a dwell time. ### Claim 16 (depends on 1) The method of claim 1, wherein the imaging device is a scanning microscope. ### Claim 17 (depends on 1) The method of claim 1, further comprising normalizing each of the image quality measurements of the plurality of image quality measurements, wherein the value of the composite measure of image quality is based on the normalized image quality measurements. ### Claim 18 (depends on 17) The method of claim 17, wherein the composite measure of image quality is a product of the normalized image quality measurements. ### Claim 19 (depends on 1) The method of claim 1, wherein the composite measure of image quality is a weighted sum of each of the plurality of image quality measurements. ### Claim 20 (depends on 1) The method of claim 1, further comprising: using an input device to change the distance from the origin point of the vertex associated with at least one image quality measurement; and in response to the change in the distance, changing one or more of the image capture control parameters of the first set of image capture to establish corresponding image capture control parameters of the second set of image capture control parameters. ### Claim 21 (depends on 20) The method of claim 20, further comprising acquiring a second image based on the second set of image capture control parameters. ### Claim 22 (depends on 20) The method of claim 20, wherein the input device is a touch screen. ### Claim 23 (depends on 1) The method of claim 1, wherein the value associated with the composite measure of image quality is displayed within the polygon. ### Claim 24 (depends on 1) The method of claim 1, further wherein the value associated with the composite measure of image quality is displayed at the origin. ### Claim 25 (depends on 24) The method of claim 24, further comprising displaying at least a portion of an area of the polygon with a color associated with the value of the composite measure of image quality. ### Claim 26 (depends on 7) The apparatus of claim 7, further comprising: an input device, operable to change the distance from the origin of a vertex in the plurality of vertices; wherein in response to the change in the distance, the electronic hardware processor changes one or more of the image capture control parameters of the first set of image capture to establish corresponding image capture control parameters of the second set of image capture control parameters. ### Claim 27 (depends on 26) The apparatus of claim 26, wherein the composite measure of image quality is a product of image quality measurement corresponding to the plurality of image quality measurements or a weighted sum of the plurality of image quality measurements. ### Claim 28 (depends on 26) The non-transitory computer-readable storage medium of claim 26, further comprising instructions that, when executed, cause the electronic hardware processor of the image capture device to be operable in response to an input device, to change the distance from the origin of at least one vertex of the plurality of vertices, wherein the change in distance from the origin represents a request to change at least one image capture control parameter. ### Claim 29 (depends on 7) The apparatus claim 7, wherein the electronic memory stores further instructions that when executed, cause the electronic hardware processor to display within the polygon the value associated with the composite measure of image quality.