# US 10,481,354 B2 · Structure of connection between optical unit and optical path tube > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,481,354 B2 - Document ID: US10481354B2 - Status: Granted - Kind: B2 - Application number: 16/055,243 - Filed: 2018-08-06 - Published: 2018-11-29 - Granted: 2019-11-19 - Earliest claimed: 2016-03-10 - Assignees: Gigaphoton Inc. - Applicants: Gigaphoton Inc. - Inventors: Yukio Watanabe; Hiroshi Someya; Yuki Kawashima; Yuto Tanaka - Web page: https://patentgrep.com/patent/US10481354B2 ## CPC - G02B 6/4296: {coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources} - G03F 7/70033: {by plasma extreme ultraviolet [EUV] sources} - G03F 7/70991: {Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum} - H05G 2/0086: {Optical arrangements for conveying the laser beam to the plasma generation location} - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H05G: X-RAY TECHNIQUE (investigating or analysing materials by the use of X-rays G01N23/00; apparatus for X-ray photography G03B42/02; X-ray tubes H01J35/00; TV systems having X-ray input H04N5/321) ## Abstract An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends. ## Claims ### Claim 1 A structure of connection between an optical unit and an optical path tube, the optical path tube being detachable from the optical unit, the structure comprising: an extensible tube constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange attached to one end of the optical path tube; a flange receiving part provided on the optical unit, the flange receiving part receiving a front surface of the flange, the front surface of the flange being an end surface on an open side; and a biasing part configured to bias at least a part of the optical path tube in a direction in which the extensible tube extends, wherein the optical unit includes a flange accommodating part that accommodates at least a part of the flange, and the flange accommodating part has a shape that allows the flange to go into the flange accommodating part from an upper side in a vertical direction or an oblique direction crossing the vertical direction. ### Claim 2 (depends on 1) The structure according to claim 1, wherein the optical path tube has one end part provided with the extensible tube, and the flange is attached to one end of the extensible tube. ### Claim 3 (depends on 1) The structure according to claim 1, wherein the extensible tube is a bellows tube. ### Claim 4 (depends on 1) The structure according to claim 1, wherein the extensible tube is a tube having a nested structure, the nested structure including an inner tube and an outer tube that are movable in the tube axis direction relative to each other. ### Claim 5 (depends on 1) The structure according to claim 1, wherein the optical path tube includes a rigid tube that is connected with the extensible tube. ### Claim 6 (depends on 1) The structure according to claim 1, wherein the biasing part generates force for the biasing, by spring force. ### Claim 7 (depends on 6) The structure according to claim 6, wherein the biasing part comprises the extensible tube. ### Claim 8 (depends on 6) The structure according to claim 6, wherein the biasing part is a plunger. ### Claim 9 (depends on 1) The structure according to claim 1, comprising a first position determining part that contacts with the optical path tube connected with the optical unit, on a lower side in a vertical direction, the first position determining part being a determining part that determines a position of the optical path tube. ### Claim 10 (depends on 1) The structure according to claim 1, comprising a second position determining part that contacts with the optical path tube connected with the optical unit, on one side in a direction crossing a vertical direction, the second position determining part being a determining part that determines a position of the optical path tube. ### Claim 11 (depends on 1) The structure according to claim 1, comprising a third position determining part that contacts with the optical path tube connected with the optical unit, on an upper side in a vertical direction, the third position determining part being a determining part that determines a position of the optical path tube. ### Claim 12 (depends on 11) The structure according to claim 11, comprising a portion that faces a rear surface of the flange received by the flange receiving part. ### Claim 13 (depends on 1) The structure according to claim 1, wherein a blacking process has been performed to an inner surface of the optical path tube. ### Claim 14 (depends on 1) The structure according to claim 1, wherein the optical path tube includes a gas inlet port through which gas is introduced into an interior of the optical path tube. ### Claim 15 (depends on 1) The structure according to claim 1, wherein the optical unit is a chamber of an extreme ultraviolet light generating apparatus that generates an extreme ultraviolet light, the chamber being movable. ### Claim 16 A structure of connection between an optical unit and an optical path tube, the optical path tube being detachable from the optical unit, the structure comprising: an extensible tube constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange attached to one end of the optical path tube; a flange receiving part provided on the optical unit, the flange receiving part receiving a front surface of the flange, the front surface of the flange being an end surface on an open side; and a biasing part configured to bias at least a part of the optical path tube in a direction in which the extensible tube extends, wherein an operation tab for operating a limit switch is attached to the optical path tube, and the limit switch is attached to the optical unit, operation of the limit switch being performed by means of the operation tab in a state where the front surface of the flange is received by the flange receiving part. ### Claim 17 (depends on 16) The structure according to claim 16, wherein the optical path tube has one end part provided with the extensible tube, and the flange is attached to one end of the extensible tube. ### Claim 18 (depends on 16) The structure according to claim 16, wherein the extensible tube is a bellows tube. ### Claim 19 (depends on 16) The structure according to claim 16, wherein the extensible tube is a tube having a nested structure, the nested structure including an inner tube and an outer tube that are movable in the tube axis direction relative to each other. ### Claim 20 A structure of connection between an optical unit and an optical path tube, the optical path tube being detachable from the optical unit, the structure comprising: an extensible tube constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange attached to one end of the optical path tube; a flange receiving part provided on the optical unit, the flange receiving part receiving a front surface of the flange, the front surface of the flange being an end surface on an open side; and a biasing part configured to bias at least a part of the optical path tube in a direction in which the extensible tube extends, wherein the optical unit includes a flange accommodating part that accommodates at least a part of the flange, an operation tab for operating a limit switch is attached to the optical path tube, the limit switch is attached to the optical unit, operation of the limit switch being performed by means of the operation tab in a state where the front surface of the flange is received by the flange receiving part, and the operation tab and the limit switch are disposed such that the operation is performed by movement of the optical path tube when the flange goes into the flange accommodating part.