# US 10,481,328 B1 · Optical phased array with integrated secondary optics > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,481,328 B1 - Document ID: US10481328B1 - Status: Granted - Kind: B1 - Application number: 16/162,044 - Filed: 2018-10-16 - Granted: 2019-11-19 - Earliest claimed: 2018-10-16 - Assignees: Honeywell International Inc. - Applicants: Honeywell International Inc. - Inventors: Neil A. Krueger; Matthew Wade Puckett - Web page: https://patentgrep.com/patent/US10481328B1 ## CPC - G01S 7/4815: {using multiple transmitters} - G02B 6/1221: {made from organic materials} - G01S 7/4817: {relating to scanning} - G02B 6/28: having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals - G02B 6/34: utilising prism or grating {(G02B6/293 takes precedence)} - G02B 27/0037: {with diffracting elements (G02B27/0056 takes precedence; holographic optical elements G02B5/32; zone systems G02B5/1876)} - G02B 27/0961: {Lens arrays (lens arrays per se G02B3/0006)} - G02B 27/0972: {Prisms (prisms per se G02B5/04)} - G02F 1/292: {by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31)} - G01S: RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract An optical phased array comprises a substrate layer having a substantially planar surface, a plurality of emitters on the surface of the substrate, and at least one cladding layer over the emitters. A plurality of optics components coupled to the cladding layer is located a predetermined distance away from the emitters, with the optics components in optical communication with the emitters. The optics components comprise a first set of optics configured for angular correction of light beams emitted from the emitters, and a second set of optics separated from the first set of optics, the second set of optics configured for divergence enhancement of the light beams transmitted from the first set of optics. Alternatively, the optics components comprise a combined set of optics configured for angular correction of light beams emitted from the emitters, and for divergence enhancement of the light beams transmitted from the combined set of optics. ## Claims ### Claim 1 An optical phased array, comprising: a substrate layer having a substantially planar surface; a plurality of emitters on the substantially planar surface of the substrate; at least one cladding layer over the plurality of emitters; a plurality of optics components coupled to the at least one cladding layer and located a predetermined distance away from the plurality of emitters, the plurality of optics components in optical communication with the plurality of emitters; wherein the emitters are configured to emit respective light beams at multiple different angles with respect to the substantially planar surface of the substrate; wherein a pitch between the light beams after being transmitted through the optical components is substantially reduced compared to the pitch between the light beams emitted at the substrate layer; wherein the plurality of optics components comprise: a first set of optics configured for angular correction of light beams emitted from the plurality of emitters, and at least a second optical component separated from the first set of optics, the at least second optical component configured for divergence enhancement of the light beams transmitted from the first set of optics; or a combined set of optics configured for angular correction of light beams emitted from the plurality of emitters, and for divergence enhancement of the light beams transmitted from the combined set of optics. ### Claim 2 (depends on 1) The optical phased array of claim 1, wherein the substrate comprises a microchip. ### Claim 3 (depends on 1) The optical phased array of claim 1, wherein the emitters have a two-dimensional grid layout on the substrate. ### Claim 4 (depends on 1) The optical phased array of claim 1, wherein the emitters each include an output grating coupler in optical communication with a waveguide and a phase shifter. ### Claim 5 (depends on 4) The optical phased array of claim 4, wherein the output grating coupler and the waveguide comprise silicon nitride, and the phase shifter comprises a micro-heater that locally tunes optical phase in a routing waveguide via the thereto-optic effect. ### Claim 6 (depends on 1) The optical phased array of claim 1, wherein the at least one cladding layer comprises an optically transmissive material. ### Claim 7 (depends on 1) The optical phased array of claim 1, wherein the first set of optics comprises at least one prism; and the at least second optical component comprises a microlens array. ### Claim 8 (depends on 1) The optical phased array of claim 1, wherein the first set of optics comprises a first metasurface, and the at least second optical component comprises a second metasurface. ### Claim 9 (depends on 1) The optical phased array of claim 1, wherein the combined set of optics comprises at least one prism. ### Claim 10 (depends on 1) The optical phased array of claim 1, wherein the combined set of optics comprises a metasurface. ### Claim 11 A method of fabricating an optical phased array, the method comprising: providing a substrate having a substantially planar surface; forming a plurality of emitters on the substantially planar surface of the substrate; depositing a first optically transmissive cladding layer over the emitters; forming a first set of optics on the first cladding layer; depositing a second optically transmissive cladding layer over the first set of optics; and forming a second set of optics on the second cladding layer; wherein the emitters are formed to emit respective light beams at multiple different angles with respect to the substantially planar surface of the substrate; wherein the first set of optics are formed to act on each of the light beams received from the emitters, such that the light beams propagate in parallel after being transmitted through the first set of optics; wherein the second set of optics are formed to act on each of the light beams received from the first set of optics, such that the light beams propagate in a divergent manner after being transmitted through the second set of optics. ### Claim 12 (depends on 11) The method of claim 11, wherein the substrate comprises a microchip. ### Claim 13 (depends on 11) The method of claim 11, wherein: the first set of optics comprises at least one direct-laser written prism; and the second set of optics comprises at least one direct-laser written lens. ### Claim 14 (depends on 11) The method of claim 11, wherein: the first set of optics comprises a first nano-fabricated sub-wavelength array; and the second set of optics comprises a second nano-fabricated sub-wavelength array. ### Claim 15 (depends on 11) The method of claim 11, wherein: the first set of optics comprises a first metasurface; and the second set of optics comprises a second metasurface. ### Claim 16 A method of fabricating an optical phased array, the method comprising: providing a substrate having a substantially planar surface; forming a plurality of emitters on the substantially planar surface of the substrate; depositing a cladding layer over the emitters; and forming a set of optics on the cladding layer; wherein the emitters are formed to emit respective light beams at multiple different angles with respect to the substantially planar surface of the substrate; wherein the set of optics are formed to act on each of the light beams such that the light beams propagate in a divergent manner after being transmitted through the set of optics; wherein a pitch between the light beams transmitted through the set of optics is substantially reduced compared to the pitch between the light beams emitted at the substrate layer. ### Claim 17 (depends on 16) The method of claim 16, wherein the substrate comprises a microchip. ### Claim 18 (depends on 16) The method of claim 16, wherein the set of optics comprises at least one direct-laser written prism. ### Claim 19 (depends on 16) The method of claim 16, wherein the set of optics comprises a nano-fabricated sub-wavelength array. ### Claim 20 (depends on 16) The method of claim 16, wherein the set of optics comprises a metasurface.