# US 10,481,053 B2 · Method for detecting defects of glass substrates

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- Number: US 10,481,053 B2
- Document ID: US10481053B2
- Status: Granted
- Kind: B2
- Application number: 15/816,943
- Filed: 2017-11-17
- Published: 2018-05-17
- Granted: 2019-11-19
- Earliest claimed: 2016-11-17
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Cheol Min Park; Jeong Woo Park; Seung Kim; Seung Ho Kim; Hoi Kwan Lee; Woo Jin Cho; Hee Kyun Shin; Hyun Joon Oh
- Web page: https://patentgrep.com/patent/US10481053B2

## CPC

- G01N 1/30: Staining; Impregnating {; Fixation; Dehydration; Multistep processes for preparing samples of tissue, cell or nucleic acid material and the like for analysis}
- G01N 21/91: using penetration of dyes, e.g. fluorescent ink
- G01N 21/958: Inspecting transparent materials {or objects, e.g. windscreens (for conveyed flat sheet or rod G01N21/896)}
- C03C 15/00: Surface treatment of glass, not in the form of fibres or filaments, by etching (etching or surface-brightening compositions, in general C09K13/00)
- C03C 19/00: Surface treatment of glass, not in the form of fibres or filaments, by mechanical means (sand-blasting, grinding, or polishing glass B24)
- C03C 23/0055: {by ion implantation}
- G02F 1/1303: {Apparatus specially adapted to the manufacture of LCDs}
- G02F 1/1309: {Repairing; Testing}
- G02F 1/1333: Constructional arrangements; {Manufacturing methods}(G02F1/135, G02F1/136 take precedence)
- G02F 1/133302: {Rigid substrates, e.g. inorganic substrates}
- H10K 77/10: Substrates, e.g. flexible substrates
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- C03C: CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

A method of detecting defects of a glass substrate includes cutting a glass mother substrate into a plurality of glass substrates, penetrating ions into an incision surface of the glass substrate to visualize defects of the incision surface, and photographing the defects of the incision surface to determine a bending strength of the glass substrate based on a size of the defects.

## Claims

### Claim 1

A method for detecting defects of a glass substrate, the method comprising:
cutting a glass mother substrate into a plurality of glass substrates and making incision surfaces to the plurality of glass substrates which are side surfaces of the plurality of glass substrates;
penetrating ions into the incision surfaces of the plurality of glass substrates in perpendicular directions to the incision surfaces to visualize a defect of the incision surfaces; and
photographing the defect of the incision surfaces to determine a bending strength of the glass substrate based on a size of the defect.

### Claim 2 (depends on 1)

The detecting method of claim 1, wherein
the step of visualizing the defect of the incision surfaces includes performing plasma processing on the incision surface.

### Claim 3 (depends on 2)

The detecting method of claim 2, wherein
the plasma processing is performed by using a mixture of a reaction gas and an etching gas.

### Claim 4 (depends on 3)

The detecting method of claim 3, wherein
the reaction gas comprises at least one from among argon (Ar), helium (He), oxygen (O2), and hydrogen (H2).

### Claim 5 (depends on 3)

The detecting method of claim 3, wherein
the etching gas comprises at least one of nitrogen trifluoride (NF3) and carbon tetrafluoride (CF4).

### Claim 6 (depends on 2)

The detecting method of claim 2, wherein
the plasma processing is performed for between 10 seconds and 10 minutes.

### Claim 7 (depends on 2)

The detecting method of claim 2, wherein
the plasma processing is performed after stacking the plurality of glass substrates.

### Claim 8 (depends on 1)

The detecting method of claim 1, further comprising
grinding the incision surfaces of the glass substrates after cutting the glass mother substrate into the plurality of glass substrates.

### Claim 9 (depends on 1)

The detecting method of claim 1, wherein
visualizing the defect of the incision surfaces is performed by blackening the defect through the ions.

### Claim 10 (depends on 1)

The detecting method of claim 1, wherein
determining the bending strength of the glass substrate based on the size of the defect is performed by using a photographed image of the incision surface.