# US 10,481,004 B2 · Light wavelength measurement method and light wavelength measurement apparatus

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- Number: US 10,481,004 B2
- Document ID: US10481004B2
- Status: Granted
- Kind: B2
- Application number: 15/812,049
- Filed: 2017-11-14
- Published: 2018-03-15
- Granted: 2019-11-19
- Earliest claimed: 2013-03-12
- Assignees: Osaka University
- Applicants: Osaka University
- Inventors: Tsuyoshi Konishi; Takema Satoh; Tomotaka Nagashima
- Web page: https://patentgrep.com/patent/US10481004B2

## CPC

- G01J 3/457: Correlation spectrometry, e.g. of the intensity (G01J3/453 takes precedence)
- G01J 3/0297: {Constructional arrangements for removing other types of optical noise or for performing calibration}
- G01J 3/18: using diffraction elements, e.g. grating (gratings per se G02B)
- G01J 3/2803: {using photoelectric array detector}
- G02B 6/12: of the integrated circuit kind (electric integrated circuits H10B, H10D84/00 - H10D89/00, H10F19/00, H10F39/00, H10H29/00, H10K19/00, H10K39/00, H10K59/00, H10N19/00, H10N39/00, H10N59/00, H10N69/00, H10N79/00, H10N89/00)
- G01J 2003/1861: {Transmission gratings}
- G01J 2003/2866: {Markers; Calibrating of scan}
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A light wavelength measurement method of measuring a wavelength of target light includes: receiving target light on a second dispersion device that disperses the target light into a plurality of second beams which reach a plurality of positions corresponding to the wavelength of the target light; and measuring the wavelength of the target light, by using the plurality of the second beams as a vernier scale for measuring the wavelength of the target light within a wavelength range specified by a main scale.

## Claims

### Claim 1

A spectrum measurement method of measuring a spectrum of input light, the spectrum measurement method comprising:
receiving the input light on a dispersion device that separates the input light into a plurality of beams having a predetermined interval, and disperses each beam of the plurality of beams in accordance with a wavelength of the beam;
causing the plurality of beams output from the dispersion device to overlap a main-scale device having graduations to allow at least part of the plurality of beams to pass through the main-scale device, wherein an interval of the graduations is different from the predetermined interval; and
measuring the spectrum of the input light by measuring, using an image sensor arranged separately from the main-scale device, an intensity distribution of the at least part of the plurality of beams having passed through the main-scale device.

### Claim 2

A spectrum measurement apparatus that measures a spectrum of input light, the spectrum measurement apparatus comprising:
a dispersion device that separates the input light into a plurality of beams having a predetermined interval, and disperses each beam of the plurality of beams in accordance with a wavelength of the beam;
a main-scale device having graduations, the main-scale device configured to allow at least part of the plurality of beams to pass through the main-scale device, and an interval of the graduations is different from the predetermined interval; and
an image sensor that is arranged separately from the main-scale device, and measures the spectrum of the input light by measuring an intensity distribution of the at least part of the plurality of beams having passed through the main-scale device.