# US 10,480,999 B2 · Spectroscope and method for producing spectroscope

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- Number: US 10,480,999 B2
- Document ID: US10480999B2
- Status: Granted
- Kind: B2
- Application number: 16/180,328
- Filed: 2018-11-05
- Published: 2019-03-07
- Granted: 2019-11-19
- Earliest claimed: 2014-02-05
- Assignees: Hamamatsu Photonics K.K.
- Applicants: Hamamatsu Photonics K.K.
- Inventors: Takafumi Yokino; Katsumi Shibayama
- Web page: https://patentgrep.com/patent/US10480999B2

## CPC

- G01J 3/18: using diffraction elements, e.g. grating (gratings per se G02B)
- G01J 3/0256: {Compact construction}
- G01J 3/0286: {Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum}
- G01J 3/0291: {Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements}
- G01J 3/2803: {using photoelectric array detector}
- G01J 3/36: Investigating two or more bands of a spectrum by separate detectors
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.

## Claims

### Claim 1

A spectrometer comprising:
a light detection unit having a substrate made of a semiconductor material;
a support having a base wall part opposing the light detection unit through a space, and a side wall part to which the light detection unit is fixed; and
a dispersive part configured to disperse and reflect light entering the space to a light detection part of the light detection unit,
wherein a first slit and a second slit are formed in the substrate,
the first slit is configured to allow light entering the space to pass therethrough,
the second slit is configured to allow a part of light reflected by the dispersive part to pass therethrough,
in the first slit, an end part on an entrance side of light widens toward the entrance side of the light, and
in the second slit, an end part on the opposite side from an entrance side of light widens toward the opposite side from the entrance side of the light.

### Claim 2 (depends on 1)

The spectrometer according to claim 1, wherein the light detection unit further has a cover disposed on the opposite side from the space side with respect to the substrate.

### Claim 3 (depends on 2)

The spectrometer according to claim 2, wherein a third slit opposing the first slit is formed in the cover.

### Claim 4 (depends on 1)

The spectrometer according to claim 1, wherein the light dispersed and reflected by the dispersive part is directly let into the light detection part.

### Claim 5 (depends on 1)

The spectrometer according to claim 1, wherein a concave curved surface is provided on a surface of the base wall part on the light detection unit side.

### Claim 6 (depends on 1)

The spectrometer according to claim 1, wherein an incident light diffuses at the first slit, and
the light dispersed by the dispersive part converges at a same height as the first slit in a first direction in which the base wall part and the light detection unit oppose each other.