# US 10,480,873 B2 · Flow path member, and adsorption device and cooling device using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,480,873 B2 - Document ID: US10480873B2 - Status: Granted - Kind: B2 - Application number: 14/403,848 - Filed: 2013-05-21 - Published: 2015-05-07 - Granted: 2019-11-19 - Earliest claimed: 2012-05-30 - Assignees: KYOCERA Corporation - Applicants: KYOCERA Corporation - Inventors: Kou Ito; Kouji Teramoto; Hiroyasu Momikura - Web page: https://patentgrep.com/patent/US10480873B2 ## CPC - F28F 21/04: of ceramic; of concrete; of natural stone - F28D 15/00: Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls {; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies (F28D17/00, F28D19/00, F28D20/00 take precedence)} - F28F 7/02: Blocks traversed by passages for heat-exchange media {(F28D7/0008 takes precedence)} - F28F 13/12: by creating turbulence, e.g. by stirring, by increasing the force of circulation (F28F13/08 takes precedence) - H10P 72/0434: {mainly by convection} - H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks - F28D 2021/0028: {for cooling heat generating elements, e.g. for cooling electronic components or electric devices} - F28F 2255/18: sintered - F28F: DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION (water and air traps, air venting F16) - F28D: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT (fluid heaters having heat generating means and heat transferring means F24H; furnaces F27; details of heat-exchange apparatus of general) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A flow path member 1 according to one aspect of the invention includes a main body 4 formed of a ceramic sintered body in which a first flow path 6 is provided so as to allow a fluid to flow therethrough, wherein the main body 4 includes a projection 10 formed of part of the ceramic sintered body on an inner wall of the first flow path 6. ## Claims ### Claim 1 A flow path member, comprising: a main body containing a ceramic sintered body, and comprising: an inner wall inside the main body; a flow path surrounded by the inner wall so as to allow a fluid to flow therethrough in a flow direction, wherein the flow direction is longitudinal along the inner wall, the flow path elongated in the flow direction and comprising a curved section; a first projection on the inner wall and extending longitudinally along the inner wall, comprising a closed pore inside the first projection; and a second projection on the inner wall, wherein the first and second projections are disposed in the curved section, and are separated from each other in the flow direction. ### Claim 2 (depends on 1) The flow path member according to claim 1, wherein the first projection is elongated in the flow direction. ### Claim 3 (depends on 1) The flow path member according to claim 1, wherein the main body further comprises a third projection on the inner wall, the first and third projections face opposite to each other on the inner wall in a cross section of the main body, the cross section perpendicular to the flow direction of the flow path. ### Claim 4 (depends on 3) The flow path member according to claim 3, wherein the flow path has a rectangular shape with a corner in the cross section, and the first projection is located at the corner in the cross section. ### Claim 5 (depends on 4) The flow path member according to claim 4, wherein a surface of the projection has a shape of convex curve in the cross section. ### Claim 6 (depends on 3) The flow path member according to claim 3, wherein the flow path has a rounded shape in the cross section. ### Claim 7 (depends on 1) A chucking device, comprising: the flow path member according to claim 1; and a fluid supplying unit that supplies the fluid to the flow path of the flow path member. ### Claim 8 (depends on 1) A cooling device, comprising: the flow path member according to claim 1; and a fluid supplying unit that supplies the fluid which is a cooling fluid to the flow path of the flow path member. ### Claim 9 A flow path member comprising: a main body containing a ceramic sintered body; an inner wall in the main body; a flow path surrounded by the inner wall, and allowing a fluid to flow therethrough in a flow direction; and a plurality of projections disposed on the inner wall, and comprising first and second projections disposed in a line and spaced in the flow direction. ### Claim 10 (depends on 9) The flow path member according to claim 9, wherein the main body comprises a first portion and a second portion, the first portion bonded to the second portion with an interface therebetween, the flow path is disposed between the first portion and the second portion, and the first projection is located on the interface in a cross section that is perpendicular to the flow direction. ### Claim 11 (depends on 9) A chucking device, comprising: the flow path member according to claim 9; and a fluid supplying unit that is connected to the flow path member, and that is configured to supply the fluid to the flow path. ### Claim 12 (depends on 9) A cooling device, comprising: the flow path member according to claim 9; and a fluid supplying unit that is connected to the flow path member, and that is configured to supply the fluid to the flow path for cooling.