Pneumatic actuator and method for operating an active vibration isolation system
AssigneeIntegrated Dynamics Engineering GmbH
InventorsArndt Evers, Frank Hofmann, Han Hartgers, Till Scharf
Life of this patent
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Abstract
A pneumatic actuator configured for a stationary vibration isolation system which serves to accommodate equipment for processing semiconductor devices. The pneumatic actuator comprises a working space with a piston which divides the working space into a first and a second pressure chamber, and the piston is spaced apart from an inner surface of the working space by a gap, and the piston is movable only in an axial direction.
Claims12
A pneumatic actuator for a stationary vibration isolation system, comprising a working space with a piston that divides the working space into a first pressure chamber and a second pressure chamber, wherein the piston is spaced apart from an inner surface of the working space by a gap so that the piston is not guided by the inner surface of the working space, wherein the piston is movable only in an axial direction, and wherein the piston is guided axially by at least two leaf springs that are spaced apart from each other.
Dependencies are inferred from the claim text.