Fluid control device and pump
AssigneeMurata Manufacturing Co., Ltd.
InventorsAtsuhiko Hirata, Yukiharu Kodama
Life of this patent
Estimating the term…
Abstract
A pump (1) includes a vibrating plate (15) that has a central part (21), a frame part (22), and connecting parts (23 to 26), a piezoelectric element (16) that is stacked over the central part (21) and configured to cause flexural vibrations to occur concentrically from the central part (21) to the connecting parts (23 to 26), and an opposed plate (13) that is stacked over the frame part (22) and positioned facing each of the connecting parts (23 to 26) with a spacing therebetween. The vibrating plate (15) has such a resonant mode that an antinode occurs in each of the central part (21) and the connecting parts (23 to 26). The opposed plate (13) has, at positions facing the connecting parts (23 to 26), a plurality of channel holes (39 to 43) through which a fluid flows.
Claims21
A fluid control device comprising:
- an inlet for sucking fluid from an external space into the fluid control device,
- an outlet for discharging the fluid from within the fluid control device to the external space,
- a vibrating plate having a central part, a frame part surrounding the central part, and a connecting part connecting between the central part and the frame part;
- a driver stacked over the central part, the driver being configured to vibrate the vibrating plate in a flexural manner from the central part to the connecting part;
- and
- an opposed plate stacked over the frame part, the opposed plate being spaced apart from and opposed to at least the connecting part,
- wherein the vibrating plate has a resonant mode such that an antinode occurs in each of the central part and the connecting part,
- wherein the opposed plate has a plurality of channel holes through which the fluid flows, each of the channel holes being located at a position opposed to the connecting part, and
- wherein during operation of the fluid control device, the fluid is sucked through the inlet, flows through the plurality of channel holes, and is discharged through the outlet.
A pump comprising:
- an inlet for sucking fluid from an external space into the pump,
- an outlet for discharging the fluid from within the pump to the external space,
- a vibrating plate having a central part, a frame part surrounding the central part, and a connecting part connecting between the central part and the frame part;
- a driver stacked over the central part, the driver being configured to vibrate the vibrating plate in a flexural manner from the central part to the connecting part;
- and
- an opposed plate stacked over the frame part, the opposed plate being spaced apart from and opposed to at least the connecting part,
- wherein the vibrating plate has a resonant mode such that an antinode occurs in each of the central part and the connecting part,
- wherein the opposed plate has a plurality of channel holes through which the fluid flows, each of the channel holes being located at a position opposed to the connecting part,
- wherein the pump further comprises a pump chamber accommodating the vibrating plate and the driver,
- wherein the opposed plate forms a part of an inner wall of the pump chamber;
- and
- wherein during operation of the pump, the fluid is sucked through the inlet, flows through the plurality of channel holes, and is discharged through the outlet.
Dependencies are inferred from the claim text.