# US 10,480,076 B2 · Plasma enhanced chemical vapor deposition apparatus that includes conductive mask supports > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,480,076 B2 - Document ID: US10480076B2 - Status: Granted - Kind: B2 - Application number: 15/049,162 - Filed: 2016-02-22 - Published: 2017-01-05 - Granted: 2019-11-19 - Earliest claimed: 2015-06-30 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Jai Hyuk Choi; Won Woong Park; Sung Hun Key; Min Soo Kim; Byeong Chun Lee; Suk Won Jung; Hyun Woo Joo; Myung Soo Huh - Web page: https://patentgrep.com/patent/US10480076B2 ## CPC - C23C 16/50: using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} - C23C 16/042: {using masks} - H01J 37/32366: {Localised processing} - H01J 37/32715: {Workpiece holder} - H01J 37/32807: {Construction (includes replacing parts of the apparatus)} - H10P 14/6336: {in the presence of a plasma [PECVD]} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A plasma enhanced chemical vapor deposition (PECVD) apparatus including a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor, the mask supports being formed of a conductive material that provides elastic force by supporting a mask to maintain and control a level of the mask; and a power supply unit to supply power to the upper electrode. ## Claims ### Claim 1 A plasma enhanced chemical vapor deposition (PECVD) apparatus, comprising: a chamber; an upper electrode in the chamber; a spray unit in the upper electrode to spray a gas introduced from outside the chamber toward a substrate inside the chamber; a susceptor on which the substrate is mountable; a plurality of mask supports in a mask frame at an edge of the susceptor; and a power supply unit to supply power to the upper electrode, wherein each mask support includes: a body insertedly installed in the mask frame; a conductive member insertedly installed in the body, the conductive member contacting and supporting the mask; an elastic member supporting the conductive member, the elastic member having elasticity; and a fixing member under the elastic member to support the conductive member, the fixing member being fixed to the body to prevent the conductive member and the elastic member from being separated from the body. ### Claim 2 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the plurality of mask supports are spaced apart from one another on the mask frame with interposing intervals therebetween. ### Claim 3 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the conductive member is formed of a metal material. ### Claim 4 (depends on 3) The PECVD apparatus as claimed in claim 3, wherein the conductive member is formed of aluminum or copper. ### Claim 5 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the conductive member is formed of an inorganic material or a polymer having conductivity. ### Claim 6 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the elastic member is formed of a metal material. ### Claim 7 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the elastic member includes a ceramic material and a conductive material coated on a surface of the ceramic material. ### Claim 8 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the elastic member is spring shaped. ### Claim 9 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the elastic member is sheet shaped. ### Claim 10 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the body is fixed to the mask frame by a bolt. ### Claim 11 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the body is formed of aluminum or copper. ### Claim 12 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the mask is formed of a metal material. ### Claim 13 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the mask includes a ceramic material and a metal material coated on a surface of the ceramic material. ### Claim 14 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the mask includes a metal material and a ceramic material coated on a surface of the metal material. ### Claim 15 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the mask includes a metal material and a polymer material coated on a surface of the metal material. ### Claim 16 (depends on 1) The PECVD apparatus as claimed in claim 1, wherein the power supply unit applies a voltage of −10 kV to +10 kV to the upper electrode.