# US 10,480,075 B2 · Graphene synthesis chamber and method of synthesizing graphene by using the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 10,480,075 B2 - Document ID: US10480075B2 - Status: Granted - Kind: B2 - Application number: 15/611,280 - Filed: 2017-06-01 - Published: 2017-09-21 - Granted: 2019-11-19 - Earliest claimed: 2011-03-17 - Assignees: NPS Corporation; Hanwha Aerospace Co., Ltd. - Applicants: NPS Corporation; Hanwha Aerospace Co., Ltd - Inventors: Dong-kwan Won; Won-Sik Nam - Web page: https://patentgrep.com/patent/US10480075B2 ## CPC - C23C 14/541: {Heating or cooling of the substrates} - B82Y 40/00: Manufacture or treatment of nanostructures - C23C 16/26: Deposition of carbon only - C23C 16/46: characterised by the method used for heating the substrate (C23C16/48, C23C16/50 take precedence) - C23C 16/482: {using incoherent light, UV to IR, e.g. lamps} - C23C 16/545: {for coating elongated substrates} - H01J 37/32724: {Temperature} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A graphene synthesis chamber includes: a chamber case in which a substrate including a metal thin film is placed; a gas supply unit which supplies at least one gas comprising a carbon gas into an inner space of the chamber case; a main heating unit which emits at least one light to the inner space to heat the substrate; and at least one auxiliary heating unit which absorbs the at least one light and emits radiant heat toward the substrate. ## Claims ### Claim 1 A graphene synthesis method comprising: disposing a substrate including a metal thin film in an inner space of a graphene synthesis chamber; depressurizing the inner space; supplying a gas including carbon into the inner space; and irradiating a light to the inner space to heat the substrate using a main heating unit, wherein an auxiliary heating unit comprising a graphite which absorbs the light emitted by the main heating unit, and emit radiant heat toward the substrate is disposed between the main heating unit and the substrate, wherein the auxiliary heating unit comprises a first auxiliary heating unit which faces a first surface of the substrate, and a second auxiliary heating unit which faces a second surface, opposite to the first surface, of the substrate, wherein each of the first auxiliary heating unit and the second auxiliary heating unit is spaced apart from the substrate, wherein the main heating unit comprises a first main heating unit and a second main heating unit, and wherein the first auxiliary heating unit is disposed between the first main heating unit and the substrate, and the second auxiliary heating unit is disposed between the second main heating unit and the substrate. ### Claim 2 (depends on 1) The graphene synthesis method of claim 1, wherein the supplying a gas including carbon comprises: supplying the gas including carbon from a gas supply unit located at a first side of an auxiliary space defined by the first auxiliary heating unit and the second auxiliary heating unit so that the gas including carbon flows along the substrate. ### Claim 3 (depends on 2) The graphene synthesis method of claim 2, wherein the gas including carbon supplied from the gas supply unit is discharged to an outside through a gas discharge unit located at a second side opposite to the first side of the auxiliary space. ### Claim 4 (depends on 1) The graphene synthesis method of claim 1, wherein the irradiating a light to the inner space comprises: irradiating the light so that a temperature of an auxiliary spaced defined by the first auxiliary heating unit and the second auxiliary heating unit is about 1000 degrees or more. ### Claim 5 (depends on 1) The graphene synthesis method of claim 1, wherein the metal thin film comprises copper. ### Claim 6 (depends on 1) The graphene synthesis method of claim 1, wherein the main heating unit comprises: a halogen lamp; and a window which is located on a path of light irradiated from the halogen lamp. ### Claim 7 (depends on 1) The graphene synthesis method of claim 1, further comprising before the supplying a gas including carbon, supplying an inert gas and a non-reactive gas into the inner space.