# US 10,480,065 B2 · Gas distribution for chemical vapor deposition/infiltration

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- Number: US 10,480,065 B2
- Document ID: US10480065B2
- Status: Granted
- Kind: B2
- Application number: 15/709,338
- Filed: 2017-09-19
- Published: 2019-03-21
- Granted: 2019-11-19
- Earliest claimed: 2017-09-19
- Assignees: Goodrich Corporation
- Applicants: Goodrich Corporation
- Inventors: Ying She; Naveen G. Menon; Zissis A. Dardas; Thomas P. Filburn; Xiaodan Cai
- Web page: https://patentgrep.com/patent/US10480065B2

## CPC

- C23C 16/045: {Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates}
- C04B 35/515: based on non-oxide ceramics
- C04B 35/571: obtained from {Si-containing} polymer precursors {or organosilicon monomers}
- C04B 35/62863: {Silicon carbide}
- C04B 35/62884: {by gas phase techniques}
- C04B 35/80: Fibres, filaments, whiskers, platelets, or the like
- C23C 16/325: {Silicon carbide}
- C23C 16/4405: {Cleaning of reactor or parts inside the reactor by using reactive gases}
- C23C 16/4412: {Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps}
- C23C 16/45502: {Flow conditions in reaction chamber}
- C23C 16/45565: {Shower nozzles}
- C23C 16/45574: {Nozzles for more than one gas}
- C04B 2235/3826: Silicon carbides
- C04B 2235/444: Halide containing anions, e.g. bromide, iodate, chlorite
- C04B 2235/483: Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes
- C04B 2235/5244: Silicon carbide
- C04B 2235/5248: Carbon, e.g. graphite
- C04B 2235/614: Gas infiltration of green bodies or pre-forms
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- C04B: LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE {(roofing granules E04D7/005)}; CERAMICS (devitrified glass-ceramics C03C10/00); REFRACTORIES; TREATMENT OF NATURAL STONE

## Abstract

A gas distribution plate for a chemical vapor deposition/infiltration system includes a body having a first side and a second side opposite the first side. The body may be hollow and may define an internal cavity. The gas distribution plate may also include a plurality of pass-through tubes extending through the internal cavity, a cavity inlet, and a plurality of cavity outlets. A reaction gas may be configured to flow through the plurality of pass-through tubes and a gaseous mitigation agent may be configured to flow into the internal cavity via the cavity inlet and out of the internal cavity via the plurality of cavity outlets to mix with reaction gas.

## Claims

### Claim 1

A gas distribution plate for a chemical vapor deposition/infiltration system, the gas distribution plate comprising:
a body comprising a first side and a second side opposite the first side, wherein the body is hollow and defines an internal cavity;
a plurality of pass-through tubes extending through the internal cavity, wherein each pass-through tube of the plurality of pass-through tubes extends from a first opening defined in the first side of the body to a second opening defined in the second side, wherein a reaction gas is configured to flow through the plurality of pass-through tubes; and
a cavity inlet defined in the first side of the body, wherein a gaseous mitigation agent is configured to flow into the internal cavity of the body via the cavity inlet; and
a plurality of cavity outlets defined in the second side of the body, wherein the gaseous mitigation agent is configured flow out the internal cavity via the plurality of cavity outlets;
wherein the body comprises a conical distribution feature having a base and an apex, wherein the base is flush with and extends from the second side of the body and the apex protrudes into the internal cavity directly opposite the cavity inlet.

### Claim 2 (depends on 1)

The gas distribution plate of claim 1, wherein the reaction gas in the plurality of pass-through tubes is isolated from the gaseous mitigation agent in the internal cavity.

### Claim 3 (depends on 1)

The gas distribution plate of claim 1, wherein the plurality of cavity outlets are distributed among the second opening of the plurality of pass-through tubes.

### Claim 4 (depends on 1)

The gas distribution plate of claim 1, further comprising a plurality of static mixing features extending from the second side of the gas distribution plate, wherein each static mixing feature of the plurality of static mixing features comprises a portion aligned with, disposed a distance from, and extending over a respective cavity outlet of the plurality of cavity outlets.

### Claim 5 (depends on 4)

The gas distribution plate of claim 4, wherein each static mixing feature of the plurality of static mixing features is “T” shaped.

### Claim 6 (depends on 1)

The gas distribution plate of claim 1, wherein the base of the conical distribution feature defines a footprint on the second side of the body, wherein the footprint is solid such that the second side of the body comprises a region, corresponding to the footprint of the conical distribution feature, that does not have any of the cavity outlets or the pass-through tubes.

### Claim 7 (depends on 1)

The gas distribution plate of claim 1, wherein the plurality of cavity outlets and the second opening of the plurality of pass-through tubes are disposed outward of a footprint of the conical distribution feature on the second side of the body.