# US 10,480,056 B2 · Nozzle geometry for organic vapor jet printing

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- Number: US 10,480,056 B2
- Document ID: US10480056B2
- Status: Granted
- Kind: B2
- Application number: 15/719,972
- Filed: 2017-09-29
- Published: 2018-02-01
- Granted: 2019-11-19
- Earliest claimed: 2009-03-25
- Assignees: The Regents of the University of Michigan
- Applicants: The Regents of the University of Michigan
- Inventors: Stephen R. Forrest; Gregory McGraw
- Web page: https://patentgrep.com/patent/US10480056B2

## CPC

- C23C 14/12: Organic material
- B41J 2/005: characterised by bringing liquid or particles selectively into contact with a printing material (printing by selective application of impact or pressure on a printing or impression-transfer material B41J2/22)
- C23C 14/04: Coating on selected surface areas, e.g. using masks
- C23C 14/228: {Gas flow assisted PVD deposition}
- C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04)
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS

## Abstract

A first device is provided. The device includes a print head. The print head further includes a first nozzle hermetically sealed to a first source of gas. The first nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the first nozzle. At a distance from the aperture into the first nozzle that is 5 times the smallest dimension of the aperture of the first nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the first nozzle.

## Claims

### Claim 1

A first device, comprising:
a print head, further comprising a first nozzle hermetically sealed to a first source of gas;
wherein the first nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the first nozzle;
wherein, at a distance from the aperture into the first nozzle that is 5 times the smallest dimension of the aperture of the first nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the first nozzle.

### Claim 2 (depends on 1)

The first device of claim 1, wherein the print head comprises a plurality of first nozzles hermetically sealed to the first source of gas.

### Claim 3 (depends on 1)

The first device of claim 1, wherein the print head further comprises a second nozzle hermetically sealed to a second source of gas different from the first source of gas,
wherein the second nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the second nozzle;
wherein, at a distance from the aperture into the second nozzle that is 5 times the smallest dimension of the aperture of the second nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the second nozzle.

### Claim 4 (depends on 3)

The first device of claim 3, wherein the print head further comprises a third nozzle hermetically sealed to a third source of gas different from the first and second sources of gas,
wherein the third nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the third nozzle;
wherein, at a distance from the aperture into the third nozzle that is 5 times the smallest dimension of the aperture of the third nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the third nozzle.

### Claim 5 (depends on 4)

The first device of claim 4, wherein the print head comprises a plurality of first nozzles hermetically sealed to the first source of gas, a plurality of second nozzles hermetically sealed to the second source of gas, and a plurality of third nozzles hermetically sealed to the third source of gas.

### Claim 6 (depends on 1)

The first device of claim 1, wherein the first nozzle has a constant cross section from the aperture to a distance from the aperture into the first nozzle that is 2 times the smallest dimension of the aperture of the first nozzle.

### Claim 7 (depends on 1)

The first device of claim 1, wherein the smallest dimension of the first nozzle in a direction perpendicular to a flow direction of the first nozzle continuously increases with distance from the aperture of the first nozzle for distances in the range of zero to 2 times the smallest dimension of the aperture of the first nozzle.

### Claim 8 (depends on 1)

The first device of claim 1, wherein the smallest dimension of the first nozzle in a direction perpendicular to a flow direction of the first nozzle increases linearly with distance from the aperture of the first nozzle for distances in the range of zero to 2 times the smallest dimension of the aperture of the first nozzle.

### Claim 9 (depends on 1)

The first device of claim 1, wherein the first nozzle is formed from a metal or a ceramic.

### Claim 10 (depends on 1)

The first device of claim 1, wherein the first nozzle is formed of silicon.

### Claim 11 (depends on 1)

The first device of claim 1, wherein the first nozzle has an aperture having a smallest dimension of 100 to 500 microns in a direction perpendicular to a flow direction of the first nozzle.

### Claim 12 (depends on 1)

The first device of claim 1, wherein the first nozzle has an aperture having a smallest dimension of 20 to 100 microns in a direction perpendicular to a flow direction of the first nozzle.

### Claim 13 (depends on 1)

The first device of claim 1, wherein the first nozzle has an aperture having a smallest dimension of 0.5 to 20 microns in a direction perpendicular to a flow direction of the first nozzle.

### Claim 14 (depends on 1)

The first device of claim 1, wherein the cross section of the first nozzle perpendicular to the flow direction of the first nozzle is circular.

### Claim 15 (depends on 1)

The first device of claim 1, wherein the cross section of the first nozzle perpendicular to the flow direction of the first nozzle is rectangular.

### Claim 16 (depends on 3)

The first device of claim 3, wherein the first device further comprises:
the first and second sources of gas,
a thermal barrier disposed between the print head and the first and second sources of gas, and
independently controllable heat sources for each of the print head, the first source of gas, and the second source of gas.

### Claim 17 (depends on 1)

The first device of claim 1, wherein the first device further comprises:
the first source of gas, the first source of gas further comprising a first sublimation chamber and a second sublimation chamber;
a thermal barrier disposed between the print head and the first source of gas;
independently controllable heat sources for each of the print head, the first sublimation chamber and the second sublimation chamber.

### Claim 18 (depends on 1)

The first device of claim 1, wherein aperture is formed in a protrusion from the print head.

### Claim 19

A method, comprising:
providing a first device, the first device comprising:
a print head, further comprising a first nozzle hermetically sealed to a first source of gas;
wherein the first nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the first nozzle;
wherein, at a distance from the aperture into the first nozzle that is 5 times the smallest dimension of the aperture of the first nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the first nozzle;
ejecting a jet of gas from the first nozzle.

### Claim 20 (depends on 19)

The method of claim 19,
wherein the print head further comprises:
a second nozzle hermetically sealed to a second source of gas different from the first source of gas,
wherein the second nozzle has an aperture having a smallest dimension of 0.5 to 500 microns in a direction perpendicular to a flow direction of the second nozzle;
wherein, at a distance from the aperture into the second nozzle that is 5 times the smallest dimension of the aperture of the second nozzle, the smallest dimension perpendicular to the flow direction is at least twice the smallest dimension of the aperture of the second nozzle; and
wherein the method further comprises maintaining different and independently controllable temperatures at the print head, the first source of gas, and the second source of gas.
